5/20/2011	8:18:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	8:18:05 AM	Recipe started at 8:18 AM
5/20/2011	8:18:05 AM	H2 valve closed
5/20/2011	8:18:05 AM	BCl3 valve closed
5/20/2011	8:18:05 AM	PH3 valve closed
5/20/2011	8:18:05 AM	SiCl4 pre valve closed
5/20/2011	8:18:05 AM	SiCl4 post valve closed
5/20/2011	8:18:05 AM	Main Vac valve closed
5/20/2011	8:18:05 AM	Bypass valve closed
5/20/2011	8:18:05 AM	Bubbler valve closed
5/20/2011	8:18:05 AM	Helium valve opened
5/20/2011	8:18:05 AM	Helium MFC set to  500.000000
5/20/2011	8:18:05 AM	H2 MFC set to  0.000000
5/20/2011	8:18:05 AM	BCl3 MFC set to  0.000000
5/20/2011	8:18:05 AM	PHl3 MFC set to  0.000000
5/20/2011	8:18:05 AM	SiCl4 MFC set to  0.000000
5/20/2011	8:18:05 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	8:18:05 AM	Tube furnace set to 0
5/20/2011	8:18:45 AM	Helium valve closed
5/20/2011	8:18:45 AM	H2 valve closed
5/20/2011	8:18:45 AM	BCl3 valve closed
5/20/2011	8:18:45 AM	PH3 valve closed
5/20/2011	8:18:45 AM	SiCl4 pre valve closed
5/20/2011	8:18:45 AM	SiCl4 post valve closed
5/20/2011	8:18:45 AM	Main Vac valve closed
5/20/2011	8:18:45 AM	Bypass valve closed
5/20/2011	8:18:45 AM	Bubbler valve closed
5/20/2011	8:18:45 AM	Helium MFC set to  0.000000
5/20/2011	8:18:45 AM	H2 MFC set to  0.000000
5/20/2011	8:18:45 AM	BCl3 MFC set to  0.000000
5/20/2011	8:18:45 AM	PHl3 MFC set to  0.000000
5/20/2011	8:18:45 AM	SiCl4 MFC set to  0.000000
5/20/2011	8:18:45 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	8:18:45 AM	Tube furnace set to 0
5/20/2011	8:18:45 AM	Run finished at 8:18 AM
5/20/2011	8:18:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	8:30:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	8:30:39 AM	Recipe started at 8:30 AM
5/20/2011	8:30:39 AM	Helium valve closed
5/20/2011	8:30:39 AM	H2 valve closed
5/20/2011	8:30:39 AM	BCl3 valve closed
5/20/2011	8:30:39 AM	PH3 valve closed
5/20/2011	8:30:39 AM	SiCl4 pre valve closed
5/20/2011	8:30:39 AM	SiCl4 post valve closed
5/20/2011	8:30:39 AM	Main Vac valve closed
5/20/2011	8:30:39 AM	Bubbler valve closed
5/20/2011	8:30:39 AM	Bypass valve opened
5/20/2011	8:30:39 AM	Helium MFC set to  0.000000
5/20/2011	8:30:39 AM	H2 MFC set to  0.000000
5/20/2011	8:30:39 AM	BCl3 MFC set to  0.000000
5/20/2011	8:30:39 AM	PHl3 MFC set to  0.000000
5/20/2011	8:30:39 AM	SiCl4 MFC set to  0.000000
5/20/2011	8:30:39 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	8:30:40 AM	Tube furnace set to 0
5/20/2011	8:31:15 AM	Helium valve closed
5/20/2011	8:31:15 AM	H2 valve closed
5/20/2011	8:31:15 AM	BCl3 valve closed
5/20/2011	8:31:15 AM	PH3 valve closed
5/20/2011	8:31:15 AM	SiCl4 pre valve closed
5/20/2011	8:31:15 AM	SiCl4 post valve closed
5/20/2011	8:31:15 AM	Bubbler valve closed
5/20/2011	8:31:15 AM	Main Vac valve opened
5/20/2011	8:31:15 AM	Bypass valve opened
5/20/2011	8:31:15 AM	Helium MFC set to  0.000000
5/20/2011	8:31:15 AM	H2 MFC set to  0.000000
5/20/2011	8:31:15 AM	BCl3 MFC set to  0.000000
5/20/2011	8:31:15 AM	PHl3 MFC set to  0.000000
5/20/2011	8:31:15 AM	SiCl4 MFC set to  0.000000
5/20/2011	8:31:15 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	8:31:15 AM	Tube furnace set to 0
5/20/2011	8:31:16 AM	Run finished at 8:31 AM
5/20/2011	8:31:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	9:40:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	9:41:08 AM	Recipe started at 9:41 AM
5/20/2011	9:41:08 AM	Helium valve closed
5/20/2011	9:41:08 AM	H2 valve closed
5/20/2011	9:41:08 AM	BCl3 valve closed
5/20/2011	9:41:08 AM	PH3 valve closed
5/20/2011	9:41:08 AM	SiCl4 pre valve closed
5/20/2011	9:41:08 AM	SiCl4 post valve closed
5/20/2011	9:41:08 AM	Main Vac valve closed
5/20/2011	9:41:08 AM	Bubbler valve closed
5/20/2011	9:41:08 AM	Bypass valve opened
5/20/2011	9:41:08 AM	Helium MFC set to  0.000000
5/20/2011	9:41:08 AM	H2 MFC set to  0.000000
5/20/2011	9:41:08 AM	BCl3 MFC set to  0.000000
5/20/2011	9:41:08 AM	PHl3 MFC set to  0.000000
5/20/2011	9:41:08 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:41:08 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:41:08 AM	Tube furnace set to 0
5/20/2011	9:41:08 AM	Helium valve closed
5/20/2011	9:41:08 AM	H2 valve closed
5/20/2011	9:41:08 AM	BCl3 valve closed
5/20/2011	9:41:08 AM	PH3 valve closed
5/20/2011	9:41:08 AM	SiCl4 pre valve closed
5/20/2011	9:41:08 AM	SiCl4 post valve closed
5/20/2011	9:41:08 AM	Bubbler valve closed
5/20/2011	9:41:08 AM	Main Vac valve opened
5/20/2011	9:41:08 AM	Bypass valve opened
5/20/2011	9:41:08 AM	Helium MFC set to  0.000000
5/20/2011	9:41:08 AM	H2 MFC set to  0.000000
5/20/2011	9:41:08 AM	BCl3 MFC set to  0.000000
5/20/2011	9:41:08 AM	PHl3 MFC set to  0.000000
5/20/2011	9:41:08 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:41:08 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:41:09 AM	Tube furnace set to 0
5/20/2011	9:42:09 AM	H2 valve closed
5/20/2011	9:42:09 AM	BCl3 valve closed
5/20/2011	9:42:09 AM	PH3 valve closed
5/20/2011	9:42:09 AM	SiCl4 pre valve closed
5/20/2011	9:42:09 AM	SiCl4 post valve closed
5/20/2011	9:42:09 AM	Bubbler valve closed
5/20/2011	9:42:09 AM	Helium valve opened
5/20/2011	9:42:09 AM	Main Vac valve opened
5/20/2011	9:42:09 AM	Bypass valve opened
5/20/2011	9:42:09 AM	Helium MFC set to  100.000000
5/20/2011	9:42:09 AM	H2 MFC set to  0.000000
5/20/2011	9:42:09 AM	BCl3 MFC set to  0.000000
5/20/2011	9:42:09 AM	PHl3 MFC set to  0.000000
5/20/2011	9:42:09 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:42:09 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:42:09 AM	Tube furnace set to 0
5/20/2011	9:43:09 AM	Helium valve closed
5/20/2011	9:43:09 AM	H2 valve closed
5/20/2011	9:43:09 AM	BCl3 valve closed
5/20/2011	9:43:09 AM	PH3 valve closed
5/20/2011	9:43:09 AM	SiCl4 pre valve closed
5/20/2011	9:43:09 AM	SiCl4 post valve closed
5/20/2011	9:43:09 AM	Bubbler valve closed
5/20/2011	9:43:09 AM	Main Vac valve opened
5/20/2011	9:43:09 AM	Bypass valve opened
5/20/2011	9:43:09 AM	Helium MFC set to  0.000000
5/20/2011	9:43:09 AM	H2 MFC set to  0.000000
5/20/2011	9:43:09 AM	BCl3 MFC set to  0.000000
5/20/2011	9:43:09 AM	PHl3 MFC set to  0.000000
5/20/2011	9:43:09 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:43:09 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:43:09 AM	Tube furnace set to 0
5/20/2011	9:44:09 AM	H2 valve closed
5/20/2011	9:44:09 AM	BCl3 valve closed
5/20/2011	9:44:09 AM	PH3 valve closed
5/20/2011	9:44:09 AM	SiCl4 pre valve closed
5/20/2011	9:44:09 AM	SiCl4 post valve closed
5/20/2011	9:44:09 AM	Bubbler valve closed
5/20/2011	9:44:09 AM	Helium valve opened
5/20/2011	9:44:09 AM	Main Vac valve opened
5/20/2011	9:44:09 AM	Bypass valve opened
5/20/2011	9:44:09 AM	Helium MFC set to  100.000000
5/20/2011	9:44:09 AM	H2 MFC set to  0.000000
5/20/2011	9:44:09 AM	BCl3 MFC set to  0.000000
5/20/2011	9:44:09 AM	PHl3 MFC set to  0.000000
5/20/2011	9:44:09 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:44:09 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:44:09 AM	Tube furnace set to 0
5/20/2011	9:45:09 AM	Helium valve closed
5/20/2011	9:45:09 AM	H2 valve closed
5/20/2011	9:45:09 AM	BCl3 valve closed
5/20/2011	9:45:09 AM	PH3 valve closed
5/20/2011	9:45:09 AM	SiCl4 pre valve closed
5/20/2011	9:45:09 AM	SiCl4 post valve closed
5/20/2011	9:45:09 AM	Bubbler valve closed
5/20/2011	9:45:09 AM	Main Vac valve opened
5/20/2011	9:45:09 AM	Bypass valve opened
5/20/2011	9:45:09 AM	Helium MFC set to  0.000000
5/20/2011	9:45:09 AM	H2 MFC set to  0.000000
5/20/2011	9:45:09 AM	BCl3 MFC set to  0.000000
5/20/2011	9:45:09 AM	PHl3 MFC set to  0.000000
5/20/2011	9:45:09 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:45:09 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:45:09 AM	Tube furnace set to 0
5/20/2011	9:46:09 AM	H2 valve closed
5/20/2011	9:46:09 AM	BCl3 valve closed
5/20/2011	9:46:09 AM	PH3 valve closed
5/20/2011	9:46:09 AM	SiCl4 pre valve closed
5/20/2011	9:46:09 AM	SiCl4 post valve closed
5/20/2011	9:46:09 AM	Bubbler valve closed
5/20/2011	9:46:09 AM	Helium valve opened
5/20/2011	9:46:09 AM	Main Vac valve opened
5/20/2011	9:46:09 AM	Bypass valve opened
5/20/2011	9:46:09 AM	Helium MFC set to  100.000000
5/20/2011	9:46:09 AM	H2 MFC set to  0.000000
5/20/2011	9:46:09 AM	BCl3 MFC set to  0.000000
5/20/2011	9:46:09 AM	PHl3 MFC set to  0.000000
5/20/2011	9:46:09 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:46:09 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:46:10 AM	Tube furnace set to 0
5/20/2011	9:47:10 AM	Helium valve closed
5/20/2011	9:47:10 AM	H2 valve closed
5/20/2011	9:47:10 AM	BCl3 valve closed
5/20/2011	9:47:10 AM	PH3 valve closed
5/20/2011	9:47:10 AM	SiCl4 pre valve closed
5/20/2011	9:47:10 AM	SiCl4 post valve closed
5/20/2011	9:47:10 AM	Bubbler valve closed
5/20/2011	9:47:10 AM	Main Vac valve opened
5/20/2011	9:47:10 AM	Bypass valve opened
5/20/2011	9:47:10 AM	Helium MFC set to  0.000000
5/20/2011	9:47:10 AM	H2 MFC set to  0.000000
5/20/2011	9:47:10 AM	BCl3 MFC set to  0.000000
5/20/2011	9:47:10 AM	PHl3 MFC set to  0.000000
5/20/2011	9:47:10 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:47:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:47:10 AM	Tube furnace set to 0
5/20/2011	9:48:10 AM	H2 valve closed
5/20/2011	9:48:10 AM	BCl3 valve closed
5/20/2011	9:48:10 AM	PH3 valve closed
5/20/2011	9:48:10 AM	SiCl4 pre valve closed
5/20/2011	9:48:10 AM	SiCl4 post valve closed
5/20/2011	9:48:10 AM	Bubbler valve closed
5/20/2011	9:48:10 AM	Helium valve opened
5/20/2011	9:48:10 AM	Main Vac valve opened
5/20/2011	9:48:10 AM	Bypass valve opened
5/20/2011	9:48:10 AM	Helium MFC set to  100.000000
5/20/2011	9:48:10 AM	H2 MFC set to  0.000000
5/20/2011	9:48:10 AM	BCl3 MFC set to  0.000000
5/20/2011	9:48:10 AM	PHl3 MFC set to  0.000000
5/20/2011	9:48:10 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:48:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:48:10 AM	Tube furnace set to 0
5/20/2011	9:49:10 AM	Helium valve closed
5/20/2011	9:49:10 AM	H2 valve closed
5/20/2011	9:49:10 AM	BCl3 valve closed
5/20/2011	9:49:10 AM	PH3 valve closed
5/20/2011	9:49:10 AM	SiCl4 pre valve closed
5/20/2011	9:49:10 AM	SiCl4 post valve closed
5/20/2011	9:49:10 AM	Bubbler valve closed
5/20/2011	9:49:10 AM	Main Vac valve opened
5/20/2011	9:49:10 AM	Bypass valve opened
5/20/2011	9:49:10 AM	Helium MFC set to  0.000000
5/20/2011	9:49:10 AM	H2 MFC set to  0.000000
5/20/2011	9:49:10 AM	BCl3 MFC set to  0.000000
5/20/2011	9:49:10 AM	PHl3 MFC set to  0.000000
5/20/2011	9:49:10 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:49:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:49:10 AM	Tube furnace set to 0
5/20/2011	9:50:10 AM	H2 valve closed
5/20/2011	9:50:10 AM	BCl3 valve closed
5/20/2011	9:50:10 AM	PH3 valve closed
5/20/2011	9:50:10 AM	SiCl4 pre valve closed
5/20/2011	9:50:10 AM	SiCl4 post valve closed
5/20/2011	9:50:10 AM	Bubbler valve closed
5/20/2011	9:50:10 AM	Helium valve opened
5/20/2011	9:50:10 AM	Main Vac valve opened
5/20/2011	9:50:10 AM	Bypass valve opened
5/20/2011	9:50:10 AM	Helium MFC set to  100.000000
5/20/2011	9:50:10 AM	H2 MFC set to  0.000000
5/20/2011	9:50:10 AM	BCl3 MFC set to  0.000000
5/20/2011	9:50:10 AM	PHl3 MFC set to  0.000000
5/20/2011	9:50:10 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:50:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:50:10 AM	Tube furnace set to 0
5/20/2011	9:51:10 AM	Helium valve closed
5/20/2011	9:51:10 AM	H2 valve closed
5/20/2011	9:51:10 AM	BCl3 valve closed
5/20/2011	9:51:10 AM	PH3 valve closed
5/20/2011	9:51:10 AM	SiCl4 pre valve closed
5/20/2011	9:51:10 AM	SiCl4 post valve closed
5/20/2011	9:51:10 AM	Bubbler valve closed
5/20/2011	9:51:10 AM	Main Vac valve opened
5/20/2011	9:51:10 AM	Bypass valve opened
5/20/2011	9:51:10 AM	Helium MFC set to  0.000000
5/20/2011	9:51:10 AM	H2 MFC set to  0.000000
5/20/2011	9:51:10 AM	BCl3 MFC set to  0.000000
5/20/2011	9:51:10 AM	PHl3 MFC set to  0.000000
5/20/2011	9:51:10 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:51:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:51:11 AM	Tube furnace set to 0
5/20/2011	9:52:11 AM	H2 valve closed
5/20/2011	9:52:11 AM	BCl3 valve closed
5/20/2011	9:52:11 AM	PH3 valve closed
5/20/2011	9:52:11 AM	SiCl4 pre valve closed
5/20/2011	9:52:11 AM	SiCl4 post valve closed
5/20/2011	9:52:11 AM	Bubbler valve closed
5/20/2011	9:52:11 AM	Helium valve opened
5/20/2011	9:52:11 AM	Main Vac valve opened
5/20/2011	9:52:11 AM	Bypass valve opened
5/20/2011	9:52:11 AM	Helium MFC set to  100.000000
5/20/2011	9:52:11 AM	H2 MFC set to  0.000000
5/20/2011	9:52:11 AM	BCl3 MFC set to  0.000000
5/20/2011	9:52:11 AM	PHl3 MFC set to  0.000000
5/20/2011	9:52:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:52:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:52:11 AM	Tube furnace set to 0
5/20/2011	9:53:11 AM	Helium valve closed
5/20/2011	9:53:11 AM	H2 valve closed
5/20/2011	9:53:11 AM	BCl3 valve closed
5/20/2011	9:53:11 AM	PH3 valve closed
5/20/2011	9:53:11 AM	SiCl4 pre valve closed
5/20/2011	9:53:11 AM	SiCl4 post valve closed
5/20/2011	9:53:11 AM	Bubbler valve closed
5/20/2011	9:53:11 AM	Main Vac valve opened
5/20/2011	9:53:11 AM	Bypass valve opened
5/20/2011	9:53:11 AM	Helium MFC set to  0.000000
5/20/2011	9:53:11 AM	H2 MFC set to  0.000000
5/20/2011	9:53:11 AM	BCl3 MFC set to  0.000000
5/20/2011	9:53:11 AM	PHl3 MFC set to  0.000000
5/20/2011	9:53:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:53:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:53:11 AM	Tube furnace set to 0
5/20/2011	9:54:11 AM	H2 valve closed
5/20/2011	9:54:11 AM	BCl3 valve closed
5/20/2011	9:54:11 AM	PH3 valve closed
5/20/2011	9:54:11 AM	SiCl4 pre valve closed
5/20/2011	9:54:11 AM	SiCl4 post valve closed
5/20/2011	9:54:11 AM	Bubbler valve closed
5/20/2011	9:54:11 AM	Helium valve opened
5/20/2011	9:54:11 AM	Main Vac valve opened
5/20/2011	9:54:11 AM	Bypass valve opened
5/20/2011	9:54:11 AM	Helium MFC set to  100.000000
5/20/2011	9:54:11 AM	H2 MFC set to  0.000000
5/20/2011	9:54:11 AM	BCl3 MFC set to  0.000000
5/20/2011	9:54:11 AM	PHl3 MFC set to  0.000000
5/20/2011	9:54:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:54:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:54:11 AM	Tube furnace set to 0
5/20/2011	9:55:11 AM	Helium valve closed
5/20/2011	9:55:11 AM	H2 valve closed
5/20/2011	9:55:11 AM	BCl3 valve closed
5/20/2011	9:55:11 AM	PH3 valve closed
5/20/2011	9:55:11 AM	SiCl4 pre valve closed
5/20/2011	9:55:11 AM	SiCl4 post valve closed
5/20/2011	9:55:11 AM	Bubbler valve closed
5/20/2011	9:55:11 AM	Main Vac valve opened
5/20/2011	9:55:11 AM	Bypass valve opened
5/20/2011	9:55:11 AM	Helium MFC set to  0.000000
5/20/2011	9:55:11 AM	H2 MFC set to  0.000000
5/20/2011	9:55:11 AM	BCl3 MFC set to  0.000000
5/20/2011	9:55:11 AM	PHl3 MFC set to  0.000000
5/20/2011	9:55:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:55:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:55:11 AM	Tube furnace set to 0
5/20/2011	9:56:11 AM	H2 valve closed
5/20/2011	9:56:11 AM	BCl3 valve closed
5/20/2011	9:56:11 AM	PH3 valve closed
5/20/2011	9:56:11 AM	SiCl4 pre valve closed
5/20/2011	9:56:11 AM	SiCl4 post valve closed
5/20/2011	9:56:11 AM	Bubbler valve closed
5/20/2011	9:56:11 AM	Helium valve opened
5/20/2011	9:56:11 AM	Main Vac valve opened
5/20/2011	9:56:11 AM	Bypass valve opened
5/20/2011	9:56:11 AM	Helium MFC set to  100.000000
5/20/2011	9:56:11 AM	H2 MFC set to  0.000000
5/20/2011	9:56:11 AM	BCl3 MFC set to  0.000000
5/20/2011	9:56:11 AM	PHl3 MFC set to  0.000000
5/20/2011	9:56:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:56:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:56:12 AM	Tube furnace set to 0
5/20/2011	9:57:12 AM	Helium valve closed
5/20/2011	9:57:12 AM	H2 valve closed
5/20/2011	9:57:12 AM	BCl3 valve closed
5/20/2011	9:57:12 AM	PH3 valve closed
5/20/2011	9:57:12 AM	SiCl4 pre valve closed
5/20/2011	9:57:12 AM	SiCl4 post valve closed
5/20/2011	9:57:12 AM	Bubbler valve closed
5/20/2011	9:57:12 AM	Main Vac valve opened
5/20/2011	9:57:12 AM	Bypass valve opened
5/20/2011	9:57:12 AM	Helium MFC set to  0.000000
5/20/2011	9:57:12 AM	H2 MFC set to  0.000000
5/20/2011	9:57:12 AM	BCl3 MFC set to  0.000000
5/20/2011	9:57:12 AM	PHl3 MFC set to  0.000000
5/20/2011	9:57:12 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:57:12 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:57:12 AM	Tube furnace set to 0
5/20/2011	9:58:12 AM	H2 valve closed
5/20/2011	9:58:12 AM	BCl3 valve closed
5/20/2011	9:58:12 AM	PH3 valve closed
5/20/2011	9:58:12 AM	SiCl4 pre valve closed
5/20/2011	9:58:12 AM	SiCl4 post valve closed
5/20/2011	9:58:12 AM	Bubbler valve closed
5/20/2011	9:58:12 AM	Helium valve opened
5/20/2011	9:58:12 AM	Main Vac valve opened
5/20/2011	9:58:12 AM	Bypass valve opened
5/20/2011	9:58:12 AM	Helium MFC set to  100.000000
5/20/2011	9:58:12 AM	H2 MFC set to  0.000000
5/20/2011	9:58:12 AM	BCl3 MFC set to  0.000000
5/20/2011	9:58:12 AM	PHl3 MFC set to  0.000000
5/20/2011	9:58:12 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:58:12 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:58:12 AM	Tube furnace set to 0
5/20/2011	9:59:12 AM	Helium valve closed
5/20/2011	9:59:12 AM	H2 valve closed
5/20/2011	9:59:12 AM	BCl3 valve closed
5/20/2011	9:59:12 AM	PH3 valve closed
5/20/2011	9:59:12 AM	SiCl4 pre valve closed
5/20/2011	9:59:12 AM	SiCl4 post valve closed
5/20/2011	9:59:12 AM	Bubbler valve closed
5/20/2011	9:59:12 AM	Main Vac valve opened
5/20/2011	9:59:12 AM	Bypass valve opened
5/20/2011	9:59:12 AM	Helium MFC set to  0.000000
5/20/2011	9:59:12 AM	H2 MFC set to  0.000000
5/20/2011	9:59:12 AM	BCl3 MFC set to  0.000000
5/20/2011	9:59:12 AM	PHl3 MFC set to  0.000000
5/20/2011	9:59:12 AM	SiCl4 MFC set to  0.000000
5/20/2011	9:59:12 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:59:12 AM	Tube furnace set to 0
5/20/2011	10:00:12 AM	H2 valve closed
5/20/2011	10:00:12 AM	BCl3 valve closed
5/20/2011	10:00:12 AM	PH3 valve closed
5/20/2011	10:00:12 AM	SiCl4 pre valve closed
5/20/2011	10:00:12 AM	SiCl4 post valve closed
5/20/2011	10:00:12 AM	Bubbler valve closed
5/20/2011	10:00:12 AM	Helium valve opened
5/20/2011	10:00:12 AM	Main Vac valve opened
5/20/2011	10:00:12 AM	Bypass valve opened
5/20/2011	10:00:12 AM	Helium MFC set to  100.000000
5/20/2011	10:00:12 AM	H2 MFC set to  0.000000
5/20/2011	10:00:12 AM	BCl3 MFC set to  0.000000
5/20/2011	10:00:12 AM	PHl3 MFC set to  0.000000
5/20/2011	10:00:12 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:00:12 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:00:12 AM	Tube furnace set to 0
5/20/2011	10:01:12 AM	Helium valve closed
5/20/2011	10:01:12 AM	H2 valve closed
5/20/2011	10:01:12 AM	BCl3 valve closed
5/20/2011	10:01:12 AM	PH3 valve closed
5/20/2011	10:01:12 AM	SiCl4 pre valve closed
5/20/2011	10:01:12 AM	SiCl4 post valve closed
5/20/2011	10:01:12 AM	Bubbler valve closed
5/20/2011	10:01:12 AM	Main Vac valve opened
5/20/2011	10:01:12 AM	Bypass valve opened
5/20/2011	10:01:12 AM	Helium MFC set to  0.000000
5/20/2011	10:01:12 AM	H2 MFC set to  0.000000
5/20/2011	10:01:12 AM	BCl3 MFC set to  0.000000
5/20/2011	10:01:12 AM	PHl3 MFC set to  0.000000
5/20/2011	10:01:12 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:01:12 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:01:13 AM	Tube furnace set to 0
5/20/2011	10:01:14 AM	Run finished at 10:01 AM
5/20/2011	10:01:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	10:01:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	10:01:16 AM	Recipe started at 10:01 AM
5/20/2011	10:01:16 AM	Helium valve closed
5/20/2011	10:01:16 AM	H2 valve closed
5/20/2011	10:01:16 AM	BCl3 valve closed
5/20/2011	10:01:16 AM	PH3 valve closed
5/20/2011	10:01:16 AM	SiCl4 pre valve closed
5/20/2011	10:01:16 AM	SiCl4 post valve closed
5/20/2011	10:01:16 AM	Main Vac valve closed
5/20/2011	10:01:16 AM	Bubbler valve closed
5/20/2011	10:01:16 AM	Bypass valve opened
5/20/2011	10:01:16 AM	Helium MFC set to  0.000000
5/20/2011	10:01:16 AM	H2 MFC set to  0.000000
5/20/2011	10:01:16 AM	BCl3 MFC set to  0.000000
5/20/2011	10:01:16 AM	PHl3 MFC set to  0.000000
5/20/2011	10:01:16 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:01:16 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:01:16 AM	Tube furnace set to 0
5/20/2011	10:01:17 AM	Helium valve closed
5/20/2011	10:01:17 AM	H2 valve closed
5/20/2011	10:01:17 AM	BCl3 valve closed
5/20/2011	10:01:17 AM	PH3 valve closed
5/20/2011	10:01:17 AM	SiCl4 pre valve closed
5/20/2011	10:01:17 AM	SiCl4 post valve closed
5/20/2011	10:01:17 AM	Bubbler valve closed
5/20/2011	10:01:17 AM	Main Vac valve opened
5/20/2011	10:01:17 AM	Bypass valve opened
5/20/2011	10:01:17 AM	Helium MFC set to  0.000000
5/20/2011	10:01:17 AM	H2 MFC set to  0.000000
5/20/2011	10:01:17 AM	BCl3 MFC set to  0.000000
5/20/2011	10:01:17 AM	PHl3 MFC set to  0.000000
5/20/2011	10:01:17 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:01:17 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:01:17 AM	Tube furnace set to 0
5/20/2011	10:01:17 AM	Run finished at 10:01 AM
5/20/2011	10:01:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	10:01:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	10:01:54 AM	Recipe started at 10:01 AM
5/20/2011	10:01:55 AM	Helium valve closed
5/20/2011	10:01:55 AM	H2 valve closed
5/20/2011	10:01:55 AM	BCl3 valve closed
5/20/2011	10:01:55 AM	PH3 valve closed
5/20/2011	10:01:55 AM	SiCl4 pre valve closed
5/20/2011	10:01:55 AM	SiCl4 post valve closed
5/20/2011	10:01:55 AM	Main Vac valve closed
5/20/2011	10:01:55 AM	Bypass valve closed
5/20/2011	10:01:55 AM	Bubbler valve closed
5/20/2011	10:01:55 AM	Helium MFC set to  0.000000
5/20/2011	10:01:55 AM	H2 MFC set to  0.000000
5/20/2011	10:01:55 AM	BCl3 MFC set to  0.000000
5/20/2011	10:01:55 AM	PHl3 MFC set to  0.000000
5/20/2011	10:01:55 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:01:55 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:01:55 AM	Tube furnace set to 0
5/20/2011	10:01:55 AM	Run finished at 10:01 AM
5/20/2011	10:01:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	10:02:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	10:02:02 AM	Recipe started at 10:02 AM
5/20/2011	10:02:02 AM	Helium valve closed
5/20/2011	10:02:02 AM	H2 valve closed
5/20/2011	10:02:02 AM	BCl3 valve closed
5/20/2011	10:02:02 AM	PH3 valve closed
5/20/2011	10:02:02 AM	SiCl4 pre valve closed
5/20/2011	10:02:02 AM	SiCl4 post valve closed
5/20/2011	10:02:02 AM	Main Vac valve closed
5/20/2011	10:02:02 AM	Bubbler valve closed
5/20/2011	10:02:02 AM	Bypass valve opened
5/20/2011	10:02:02 AM	Helium MFC set to  0.000000
5/20/2011	10:02:02 AM	H2 MFC set to  0.000000
5/20/2011	10:02:02 AM	BCl3 MFC set to  0.000000
5/20/2011	10:02:02 AM	PHl3 MFC set to  0.000000
5/20/2011	10:02:02 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:02:02 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:02:03 AM	Tube furnace set to 0
5/20/2011	10:02:03 AM	Helium valve closed
5/20/2011	10:02:03 AM	H2 valve closed
5/20/2011	10:02:03 AM	BCl3 valve closed
5/20/2011	10:02:03 AM	PH3 valve closed
5/20/2011	10:02:03 AM	SiCl4 pre valve closed
5/20/2011	10:02:03 AM	SiCl4 post valve closed
5/20/2011	10:02:03 AM	Bubbler valve closed
5/20/2011	10:02:03 AM	Main Vac valve opened
5/20/2011	10:02:03 AM	Bypass valve opened
5/20/2011	10:02:03 AM	Helium MFC set to  0.000000
5/20/2011	10:02:03 AM	H2 MFC set to  0.000000
5/20/2011	10:02:03 AM	BCl3 MFC set to  0.000000
5/20/2011	10:02:03 AM	PHl3 MFC set to  0.000000
5/20/2011	10:02:03 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:02:03 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:02:03 AM	Tube furnace set to 0
5/20/2011	10:02:03 AM	Run finished at 10:02 AM
5/20/2011	10:02:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	10:02:11 AM	Recipe started at 10:02 AM
5/20/2011	10:02:11 AM	Helium valve closed
5/20/2011	10:02:11 AM	BCl3 valve closed
5/20/2011	10:02:11 AM	PH3 valve closed
5/20/2011	10:02:11 AM	SiCl4 pre valve closed
5/20/2011	10:02:11 AM	SiCl4 post valve closed
5/20/2011	10:02:11 AM	Main Vac valve closed
5/20/2011	10:02:11 AM	Bypass valve closed
5/20/2011	10:02:11 AM	Bubbler valve closed
5/20/2011	10:02:11 AM	H2 valve opened
5/20/2011	10:02:11 AM	Helium MFC set to  0.000000
5/20/2011	10:02:11 AM	H2 MFC set to  500.000000
5/20/2011	10:02:11 AM	BCl3 MFC set to  0.000000
5/20/2011	10:02:11 AM	PHl3 MFC set to  0.000000
5/20/2011	10:02:11 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:02:11 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:02:11 AM	Tube furnace set to 0
5/20/2011	10:03:34 AM	Helium valve closed
5/20/2011	10:03:34 AM	BCl3 valve closed
5/20/2011	10:03:34 AM	PH3 valve closed
5/20/2011	10:03:34 AM	SiCl4 pre valve closed
5/20/2011	10:03:34 AM	SiCl4 post valve closed
5/20/2011	10:03:34 AM	Main Vac valve closed
5/20/2011	10:03:34 AM	Bypass valve closed
5/20/2011	10:03:34 AM	H2 valve opened
5/20/2011	10:03:34 AM	Bubbler valve opened
5/20/2011	10:03:34 AM	Helium MFC set to  0.000000
5/20/2011	10:03:34 AM	H2 MFC set to  500.000000
5/20/2011	10:03:34 AM	BCl3 MFC set to  0.000000
5/20/2011	10:03:34 AM	PHl3 MFC set to  0.000000
5/20/2011	10:03:34 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:03:34 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:03:34 AM	Tube furnace set to 250
5/20/2011	10:23:34 AM	Helium valve closed
5/20/2011	10:23:34 AM	BCl3 valve closed
5/20/2011	10:23:34 AM	PH3 valve closed
5/20/2011	10:23:34 AM	SiCl4 pre valve closed
5/20/2011	10:23:34 AM	SiCl4 post valve closed
5/20/2011	10:23:34 AM	Main Vac valve closed
5/20/2011	10:23:34 AM	Bypass valve closed
5/20/2011	10:23:34 AM	H2 valve opened
5/20/2011	10:23:34 AM	Bubbler valve opened
5/20/2011	10:23:34 AM	Helium MFC set to  0.000000
5/20/2011	10:23:34 AM	H2 MFC set to  500.000000
5/20/2011	10:23:34 AM	BCl3 MFC set to  0.000000
5/20/2011	10:23:34 AM	PHl3 MFC set to  0.000000
5/20/2011	10:23:34 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:23:34 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:23:34 AM	Tube furnace set to 1000
5/20/2011	10:43:34 AM	Helium valve closed
5/20/2011	10:43:34 AM	BCl3 valve closed
5/20/2011	10:43:34 AM	Main Vac valve closed
5/20/2011	10:43:34 AM	Bypass valve closed
5/20/2011	10:43:34 AM	H2 valve opened
5/20/2011	10:43:34 AM	PH3 valve opened
5/20/2011	10:43:34 AM	SiCl4 pre valve opened
5/20/2011	10:43:34 AM	SiCl4 post valve opened
5/20/2011	10:43:34 AM	Bubbler valve opened
5/20/2011	10:43:34 AM	Helium MFC set to  0.000000
5/20/2011	10:43:34 AM	H2 MFC set to  500.000000
5/20/2011	10:43:34 AM	BCl3 MFC set to  0.000000
5/20/2011	10:43:34 AM	PHl3 MFC set to  1.000000
5/20/2011	10:43:34 AM	SiCl4 MFC set to  50.000000
5/20/2011	10:43:34 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:43:34 AM	Tube furnace set to 1000
5/20/2011	10:59:34 AM	H2 valve closed
5/20/2011	10:59:34 AM	BCl3 valve closed
5/20/2011	10:59:34 AM	PH3 valve closed
5/20/2011	10:59:34 AM	SiCl4 pre valve closed
5/20/2011	10:59:34 AM	SiCl4 post valve closed
5/20/2011	10:59:34 AM	Main Vac valve closed
5/20/2011	10:59:34 AM	Bypass valve closed
5/20/2011	10:59:34 AM	Helium valve opened
5/20/2011	10:59:34 AM	Bubbler valve opened
5/20/2011	10:59:34 AM	Helium MFC set to  500.000000
5/20/2011	10:59:34 AM	H2 MFC set to  0.000000
5/20/2011	10:59:34 AM	BCl3 MFC set to  0.000000
5/20/2011	10:59:34 AM	PHl3 MFC set to  0.000000
5/20/2011	10:59:34 AM	SiCl4 MFC set to  0.000000
5/20/2011	10:59:34 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:59:35 AM	Tube furnace set to 0
5/20/2011	11:19:35 AM	Helium valve closed
5/20/2011	11:19:35 AM	H2 valve closed
5/20/2011	11:19:35 AM	BCl3 valve closed
5/20/2011	11:19:35 AM	PH3 valve closed
5/20/2011	11:19:35 AM	SiCl4 pre valve closed
5/20/2011	11:19:35 AM	SiCl4 post valve closed
5/20/2011	11:19:35 AM	Main Vac valve closed
5/20/2011	11:19:35 AM	Bypass valve closed
5/20/2011	11:19:35 AM	Bubbler valve closed
5/20/2011	11:19:35 AM	Helium MFC set to  0.000000
5/20/2011	11:19:35 AM	H2 MFC set to  0.000000
5/20/2011	11:19:35 AM	BCl3 MFC set to  0.000000
5/20/2011	11:19:35 AM	PHl3 MFC set to  0.000000
5/20/2011	11:19:35 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:19:35 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:19:35 AM	Tube furnace set to 0
5/20/2011	11:19:35 AM	Run finished at 11:19 AM
5/20/2011	11:23:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:23:35 AM	Recipe started at 11:23 AM
5/20/2011	11:23:35 AM	H2 valve closed
5/20/2011	11:23:35 AM	BCl3 valve closed
5/20/2011	11:23:35 AM	PH3 valve closed
5/20/2011	11:23:35 AM	SiCl4 pre valve closed
5/20/2011	11:23:35 AM	SiCl4 post valve closed
5/20/2011	11:23:35 AM	Main Vac valve closed
5/20/2011	11:23:35 AM	Bypass valve closed
5/20/2011	11:23:35 AM	Bubbler valve closed
5/20/2011	11:23:35 AM	Helium valve opened
5/20/2011	11:23:35 AM	Helium MFC set to  500.000000
5/20/2011	11:23:35 AM	H2 MFC set to  0.000000
5/20/2011	11:23:35 AM	BCl3 MFC set to  0.000000
5/20/2011	11:23:35 AM	PHl3 MFC set to  0.000000
5/20/2011	11:23:35 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:23:35 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:23:35 AM	Tube furnace set to 0
5/20/2011	11:23:36 AM	Helium valve closed
5/20/2011	11:23:36 AM	H2 valve closed
5/20/2011	11:23:36 AM	BCl3 valve closed
5/20/2011	11:23:36 AM	PH3 valve closed
5/20/2011	11:23:36 AM	SiCl4 pre valve closed
5/20/2011	11:23:36 AM	SiCl4 post valve closed
5/20/2011	11:23:36 AM	Main Vac valve closed
5/20/2011	11:23:36 AM	Bypass valve closed
5/20/2011	11:23:36 AM	Bubbler valve closed
5/20/2011	11:23:36 AM	Helium MFC set to  0.000000
5/20/2011	11:23:36 AM	H2 MFC set to  0.000000
5/20/2011	11:23:36 AM	BCl3 MFC set to  0.000000
5/20/2011	11:23:36 AM	PHl3 MFC set to  0.000000
5/20/2011	11:23:36 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:23:36 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:23:36 AM	Tube furnace set to 0
5/20/2011	11:23:36 AM	Run finished at 11:23 AM
5/20/2011	11:23:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:24:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:25:00 AM	Recipe started at 11:25 AM
5/20/2011	11:25:00 AM	H2 valve closed
5/20/2011	11:25:00 AM	BCl3 valve closed
5/20/2011	11:25:00 AM	PH3 valve closed
5/20/2011	11:25:00 AM	SiCl4 pre valve closed
5/20/2011	11:25:00 AM	SiCl4 post valve closed
5/20/2011	11:25:00 AM	Main Vac valve closed
5/20/2011	11:25:00 AM	Bypass valve closed
5/20/2011	11:25:00 AM	Bubbler valve closed
5/20/2011	11:25:00 AM	Helium valve opened
5/20/2011	11:25:00 AM	Helium MFC set to  500.000000
5/20/2011	11:25:00 AM	H2 MFC set to  0.000000
5/20/2011	11:25:00 AM	BCl3 MFC set to  0.000000
5/20/2011	11:25:00 AM	PHl3 MFC set to  0.000000
5/20/2011	11:25:00 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:25:00 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:25:00 AM	Tube furnace set to 0
5/20/2011	11:25:01 AM	Helium valve closed
5/20/2011	11:25:01 AM	H2 valve closed
5/20/2011	11:25:01 AM	BCl3 valve closed
5/20/2011	11:25:01 AM	PH3 valve closed
5/20/2011	11:25:01 AM	SiCl4 pre valve closed
5/20/2011	11:25:01 AM	SiCl4 post valve closed
5/20/2011	11:25:01 AM	Main Vac valve closed
5/20/2011	11:25:01 AM	Bypass valve closed
5/20/2011	11:25:01 AM	Bubbler valve closed
5/20/2011	11:25:01 AM	Helium MFC set to  0.000000
5/20/2011	11:25:01 AM	H2 MFC set to  0.000000
5/20/2011	11:25:01 AM	BCl3 MFC set to  0.000000
5/20/2011	11:25:01 AM	PHl3 MFC set to  0.000000
5/20/2011	11:25:01 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:25:01 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:25:01 AM	Tube furnace set to 0
5/20/2011	11:25:01 AM	Run finished at 11:25 AM
5/20/2011	11:25:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:30:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:30:28 AM	Recipe started at 11:30 AM
5/20/2011	11:30:28 AM	Helium valve closed
5/20/2011	11:30:28 AM	H2 valve closed
5/20/2011	11:30:28 AM	BCl3 valve closed
5/20/2011	11:30:28 AM	PH3 valve closed
5/20/2011	11:30:28 AM	SiCl4 pre valve closed
5/20/2011	11:30:28 AM	SiCl4 post valve closed
5/20/2011	11:30:28 AM	Main Vac valve closed
5/20/2011	11:30:28 AM	Bubbler valve closed
5/20/2011	11:30:28 AM	Bypass valve opened
5/20/2011	11:30:28 AM	Helium MFC set to  0.000000
5/20/2011	11:30:28 AM	H2 MFC set to  0.000000
5/20/2011	11:30:28 AM	BCl3 MFC set to  0.000000
5/20/2011	11:30:28 AM	PHl3 MFC set to  0.000000
5/20/2011	11:30:28 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:30:28 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:30:29 AM	Tube furnace set to 0
5/20/2011	11:30:55 AM	Run aborted at 11:30 AM
5/20/2011	11:30:55 AM	Helium valve closed
5/20/2011	11:30:55 AM	H2 valve closed
5/20/2011	11:30:55 AM	BCl3 valve closed
5/20/2011	11:30:55 AM	PH3 valve closed
5/20/2011	11:30:55 AM	SiCl4 pre valve closed
5/20/2011	11:30:55 AM	SiCl4 post valve closed
5/20/2011	11:30:55 AM	Bypass valve closed
5/20/2011	11:30:55 AM	Main Vac valve closed
5/20/2011	11:30:55 AM	Bubbler valve closed
5/20/2011	11:30:55 AM	Helium MFC set to  0.000000
5/20/2011	11:30:55 AM	H2 MFC set to  0.000000
5/20/2011	11:30:55 AM	BCl3 MFC set to  0.000000
5/20/2011	11:30:55 AM	PHl3 MFC set to  0.000000
5/20/2011	11:30:55 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:30:55 AM	Tube furnace set to 0
5/20/2011	11:30:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:31:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:31:42 AM	Recipe started at 11:31 AM
5/20/2011	11:31:42 AM	Helium valve closed
5/20/2011	11:31:42 AM	H2 valve closed
5/20/2011	11:31:42 AM	BCl3 valve closed
5/20/2011	11:31:42 AM	PH3 valve closed
5/20/2011	11:31:42 AM	SiCl4 pre valve closed
5/20/2011	11:31:42 AM	SiCl4 post valve closed
5/20/2011	11:31:42 AM	Main Vac valve closed
5/20/2011	11:31:42 AM	Bubbler valve closed
5/20/2011	11:31:42 AM	Bypass valve opened
5/20/2011	11:31:42 AM	Helium MFC set to  0.000000
5/20/2011	11:31:42 AM	H2 MFC set to  0.000000
5/20/2011	11:31:42 AM	BCl3 MFC set to  0.000000
5/20/2011	11:31:42 AM	PHl3 MFC set to  0.000000
5/20/2011	11:31:42 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:31:42 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:31:42 AM	Tube furnace set to 0
5/20/2011	11:32:50 AM	Run aborted at 11:32 AM
5/20/2011	11:32:50 AM	Helium valve closed
5/20/2011	11:32:50 AM	H2 valve closed
5/20/2011	11:32:50 AM	BCl3 valve closed
5/20/2011	11:32:50 AM	PH3 valve closed
5/20/2011	11:32:50 AM	SiCl4 pre valve closed
5/20/2011	11:32:50 AM	SiCl4 post valve closed
5/20/2011	11:32:50 AM	Bypass valve closed
5/20/2011	11:32:50 AM	Main Vac valve closed
5/20/2011	11:32:50 AM	Bubbler valve closed
5/20/2011	11:32:50 AM	Helium MFC set to  0.000000
5/20/2011	11:32:50 AM	H2 MFC set to  0.000000
5/20/2011	11:32:50 AM	BCl3 MFC set to  0.000000
5/20/2011	11:32:50 AM	PHl3 MFC set to  0.000000
5/20/2011	11:32:50 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:32:50 AM	Tube furnace set to 0
5/20/2011	11:32:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:32:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	11:32:55 AM	Recipe started at 11:32 AM
5/20/2011	11:32:55 AM	Helium valve closed
5/20/2011	11:32:55 AM	H2 valve closed
5/20/2011	11:32:55 AM	BCl3 valve closed
5/20/2011	11:32:55 AM	PH3 valve closed
5/20/2011	11:32:55 AM	SiCl4 pre valve closed
5/20/2011	11:32:55 AM	SiCl4 post valve closed
5/20/2011	11:32:55 AM	Main Vac valve closed
5/20/2011	11:32:55 AM	Bypass valve closed
5/20/2011	11:32:55 AM	Bubbler valve closed
5/20/2011	11:32:55 AM	Helium MFC set to  0.000000
5/20/2011	11:32:55 AM	H2 MFC set to  0.000000
5/20/2011	11:32:55 AM	BCl3 MFC set to  0.000000
5/20/2011	11:32:55 AM	PHl3 MFC set to  0.000000
5/20/2011	11:32:55 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:32:55 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:32:55 AM	Tube furnace set to 0
5/20/2011	11:32:56 AM	Run finished at 11:32 AM
5/20/2011	11:32:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	11:32:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:32:58 AM	Recipe started at 11:32 AM
5/20/2011	11:32:58 AM	H2 valve closed
5/20/2011	11:32:58 AM	BCl3 valve closed
5/20/2011	11:32:58 AM	PH3 valve closed
5/20/2011	11:32:58 AM	SiCl4 pre valve closed
5/20/2011	11:32:58 AM	SiCl4 post valve closed
5/20/2011	11:32:58 AM	Main Vac valve closed
5/20/2011	11:32:58 AM	Bypass valve closed
5/20/2011	11:32:58 AM	Bubbler valve closed
5/20/2011	11:32:58 AM	Helium valve opened
5/20/2011	11:32:58 AM	Helium MFC set to  500.000000
5/20/2011	11:32:58 AM	H2 MFC set to  0.000000
5/20/2011	11:32:58 AM	BCl3 MFC set to  0.000000
5/20/2011	11:32:58 AM	PHl3 MFC set to  0.000000
5/20/2011	11:32:58 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:32:58 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:32:58 AM	Tube furnace set to 0
5/20/2011	11:32:59 AM	Helium valve closed
5/20/2011	11:32:59 AM	H2 valve closed
5/20/2011	11:32:59 AM	BCl3 valve closed
5/20/2011	11:32:59 AM	PH3 valve closed
5/20/2011	11:32:59 AM	SiCl4 pre valve closed
5/20/2011	11:32:59 AM	SiCl4 post valve closed
5/20/2011	11:32:59 AM	Main Vac valve closed
5/20/2011	11:32:59 AM	Bypass valve closed
5/20/2011	11:32:59 AM	Bubbler valve closed
5/20/2011	11:32:59 AM	Helium MFC set to  0.000000
5/20/2011	11:32:59 AM	H2 MFC set to  0.000000
5/20/2011	11:32:59 AM	BCl3 MFC set to  0.000000
5/20/2011	11:32:59 AM	PHl3 MFC set to  0.000000
5/20/2011	11:32:59 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:32:59 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:32:59 AM	Tube furnace set to 0
5/20/2011	11:32:59 AM	Run finished at 11:32 AM
5/20/2011	11:32:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:33:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:33:59 AM	Recipe started at 11:33 AM
5/20/2011	11:33:59 AM	Helium valve closed
5/20/2011	11:33:59 AM	H2 valve closed
5/20/2011	11:33:59 AM	BCl3 valve closed
5/20/2011	11:33:59 AM	PH3 valve closed
5/20/2011	11:33:59 AM	SiCl4 pre valve closed
5/20/2011	11:33:59 AM	SiCl4 post valve closed
5/20/2011	11:33:59 AM	Main Vac valve closed
5/20/2011	11:33:59 AM	Bubbler valve closed
5/20/2011	11:33:59 AM	Bypass valve opened
5/20/2011	11:33:59 AM	Helium MFC set to  0.000000
5/20/2011	11:33:59 AM	H2 MFC set to  0.000000
5/20/2011	11:33:59 AM	BCl3 MFC set to  0.000000
5/20/2011	11:33:59 AM	PHl3 MFC set to  0.000000
5/20/2011	11:33:59 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:33:59 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:33:59 AM	Tube furnace set to 0
5/20/2011	11:34:17 AM	Run aborted at 11:34 AM
5/20/2011	11:34:17 AM	Helium valve closed
5/20/2011	11:34:17 AM	H2 valve closed
5/20/2011	11:34:17 AM	BCl3 valve closed
5/20/2011	11:34:17 AM	PH3 valve closed
5/20/2011	11:34:17 AM	SiCl4 pre valve closed
5/20/2011	11:34:17 AM	SiCl4 post valve closed
5/20/2011	11:34:17 AM	Bypass valve closed
5/20/2011	11:34:18 AM	Main Vac valve closed
5/20/2011	11:34:18 AM	Bubbler valve closed
5/20/2011	11:34:18 AM	Helium MFC set to  0.000000
5/20/2011	11:34:18 AM	H2 MFC set to  0.000000
5/20/2011	11:34:18 AM	BCl3 MFC set to  0.000000
5/20/2011	11:34:18 AM	PHl3 MFC set to  0.000000
5/20/2011	11:34:18 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:34:18 AM	Tube furnace set to 0
5/20/2011	11:34:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:34:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	11:34:33 AM	Recipe started at 11:34 AM
5/20/2011	11:34:33 AM	Helium valve closed
5/20/2011	11:34:33 AM	H2 valve closed
5/20/2011	11:34:33 AM	BCl3 valve closed
5/20/2011	11:34:33 AM	PH3 valve closed
5/20/2011	11:34:33 AM	SiCl4 pre valve closed
5/20/2011	11:34:33 AM	SiCl4 post valve closed
5/20/2011	11:34:33 AM	Main Vac valve closed
5/20/2011	11:34:33 AM	Bubbler valve closed
5/20/2011	11:34:33 AM	Bypass valve opened
5/20/2011	11:34:33 AM	Helium MFC set to  0.000000
5/20/2011	11:34:33 AM	H2 MFC set to  0.000000
5/20/2011	11:34:33 AM	BCl3 MFC set to  0.000000
5/20/2011	11:34:33 AM	PHl3 MFC set to  0.000000
5/20/2011	11:34:33 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:34:33 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:34:33 AM	Tube furnace set to 0
5/20/2011	11:34:33 AM	Run aborted at 11:34 AM
5/20/2011	11:34:33 AM	Helium valve closed
5/20/2011	11:34:33 AM	H2 valve closed
5/20/2011	11:34:33 AM	BCl3 valve closed
5/20/2011	11:34:33 AM	PH3 valve closed
5/20/2011	11:34:33 AM	SiCl4 pre valve closed
5/20/2011	11:34:33 AM	SiCl4 post valve closed
5/20/2011	11:34:33 AM	Bypass valve closed
5/20/2011	11:34:33 AM	Main Vac valve closed
5/20/2011	11:34:33 AM	Bubbler valve closed
5/20/2011	11:34:33 AM	Helium MFC set to  0.000000
5/20/2011	11:34:33 AM	H2 MFC set to  0.000000
5/20/2011	11:34:33 AM	BCl3 MFC set to  0.000000
5/20/2011	11:34:33 AM	PHl3 MFC set to  0.000000
5/20/2011	11:34:33 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:34:33 AM	Tube furnace set to 0
5/20/2011	11:34:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	11:34:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:34:35 AM	Recipe started at 11:34 AM
5/20/2011	11:34:35 AM	H2 valve closed
5/20/2011	11:34:35 AM	BCl3 valve closed
5/20/2011	11:34:35 AM	PH3 valve closed
5/20/2011	11:34:35 AM	SiCl4 pre valve closed
5/20/2011	11:34:35 AM	SiCl4 post valve closed
5/20/2011	11:34:35 AM	Main Vac valve closed
5/20/2011	11:34:35 AM	Bypass valve closed
5/20/2011	11:34:35 AM	Bubbler valve closed
5/20/2011	11:34:35 AM	Helium valve opened
5/20/2011	11:34:35 AM	Helium MFC set to  500.000000
5/20/2011	11:34:35 AM	H2 MFC set to  0.000000
5/20/2011	11:34:35 AM	BCl3 MFC set to  0.000000
5/20/2011	11:34:35 AM	PHl3 MFC set to  0.000000
5/20/2011	11:34:35 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:34:35 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:34:36 AM	Tube furnace set to 0
5/20/2011	11:34:36 AM	Helium valve closed
5/20/2011	11:34:36 AM	H2 valve closed
5/20/2011	11:34:36 AM	BCl3 valve closed
5/20/2011	11:34:36 AM	PH3 valve closed
5/20/2011	11:34:36 AM	SiCl4 pre valve closed
5/20/2011	11:34:36 AM	SiCl4 post valve closed
5/20/2011	11:34:36 AM	Main Vac valve closed
5/20/2011	11:34:36 AM	Bypass valve closed
5/20/2011	11:34:36 AM	Bubbler valve closed
5/20/2011	11:34:36 AM	Helium MFC set to  0.000000
5/20/2011	11:34:36 AM	H2 MFC set to  0.000000
5/20/2011	11:34:36 AM	BCl3 MFC set to  0.000000
5/20/2011	11:34:36 AM	PHl3 MFC set to  0.000000
5/20/2011	11:34:36 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:34:36 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:34:36 AM	Tube furnace set to 0
5/20/2011	11:34:36 AM	Run finished at 11:34 AM
5/20/2011	11:34:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:37:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:37:17 AM	Recipe started at 11:37 AM
5/20/2011	11:37:17 AM	H2 valve closed
5/20/2011	11:37:17 AM	BCl3 valve closed
5/20/2011	11:37:17 AM	PH3 valve closed
5/20/2011	11:37:17 AM	SiCl4 pre valve closed
5/20/2011	11:37:17 AM	SiCl4 post valve closed
5/20/2011	11:37:17 AM	Main Vac valve closed
5/20/2011	11:37:17 AM	Bypass valve closed
5/20/2011	11:37:17 AM	Bubbler valve closed
5/20/2011	11:37:17 AM	Helium valve opened
5/20/2011	11:37:17 AM	Helium MFC set to  500.000000
5/20/2011	11:37:17 AM	H2 MFC set to  0.000000
5/20/2011	11:37:17 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:17 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:17 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:17 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:17 AM	Tube furnace set to 0
5/20/2011	11:37:18 AM	Helium valve closed
5/20/2011	11:37:18 AM	H2 valve closed
5/20/2011	11:37:18 AM	BCl3 valve closed
5/20/2011	11:37:18 AM	PH3 valve closed
5/20/2011	11:37:18 AM	SiCl4 pre valve closed
5/20/2011	11:37:18 AM	SiCl4 post valve closed
5/20/2011	11:37:18 AM	Main Vac valve closed
5/20/2011	11:37:18 AM	Bypass valve closed
5/20/2011	11:37:18 AM	Bubbler valve closed
5/20/2011	11:37:18 AM	Helium MFC set to  0.000000
5/20/2011	11:37:18 AM	H2 MFC set to  0.000000
5/20/2011	11:37:18 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:18 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:18 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:18 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:18 AM	Tube furnace set to 0
5/20/2011	11:37:18 AM	Run finished at 11:37 AM
5/20/2011	11:37:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:37:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:37:24 AM	Recipe started at 11:37 AM
5/20/2011	11:37:24 AM	Helium valve closed
5/20/2011	11:37:24 AM	H2 valve closed
5/20/2011	11:37:24 AM	BCl3 valve closed
5/20/2011	11:37:24 AM	PH3 valve closed
5/20/2011	11:37:24 AM	SiCl4 pre valve closed
5/20/2011	11:37:24 AM	SiCl4 post valve closed
5/20/2011	11:37:24 AM	Main Vac valve closed
5/20/2011	11:37:24 AM	Bubbler valve closed
5/20/2011	11:37:24 AM	Bypass valve opened
5/20/2011	11:37:24 AM	Helium MFC set to  0.000000
5/20/2011	11:37:24 AM	H2 MFC set to  0.000000
5/20/2011	11:37:24 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:24 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:24 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:24 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:24 AM	Tube furnace set to 0
5/20/2011	11:37:36 AM	Run aborted at 11:37 AM
5/20/2011	11:37:36 AM	Helium valve closed
5/20/2011	11:37:36 AM	H2 valve closed
5/20/2011	11:37:36 AM	BCl3 valve closed
5/20/2011	11:37:36 AM	PH3 valve closed
5/20/2011	11:37:36 AM	SiCl4 pre valve closed
5/20/2011	11:37:36 AM	SiCl4 post valve closed
5/20/2011	11:37:36 AM	Bypass valve closed
5/20/2011	11:37:36 AM	Main Vac valve closed
5/20/2011	11:37:36 AM	Bubbler valve closed
5/20/2011	11:37:36 AM	Helium MFC set to  0.000000
5/20/2011	11:37:36 AM	H2 MFC set to  0.000000
5/20/2011	11:37:36 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:36 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:36 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:36 AM	Tube furnace set to 0
5/20/2011	11:37:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:37:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:37:43 AM	Recipe started at 11:37 AM
5/20/2011	11:37:43 AM	H2 valve closed
5/20/2011	11:37:43 AM	BCl3 valve closed
5/20/2011	11:37:43 AM	PH3 valve closed
5/20/2011	11:37:43 AM	SiCl4 pre valve closed
5/20/2011	11:37:43 AM	SiCl4 post valve closed
5/20/2011	11:37:43 AM	Main Vac valve closed
5/20/2011	11:37:43 AM	Bypass valve closed
5/20/2011	11:37:43 AM	Bubbler valve closed
5/20/2011	11:37:43 AM	Helium valve opened
5/20/2011	11:37:43 AM	Helium MFC set to  500.000000
5/20/2011	11:37:43 AM	H2 MFC set to  0.000000
5/20/2011	11:37:43 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:43 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:43 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:43 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:43 AM	Tube furnace set to 0
5/20/2011	11:37:43 AM	Helium valve closed
5/20/2011	11:37:43 AM	H2 valve closed
5/20/2011	11:37:43 AM	BCl3 valve closed
5/20/2011	11:37:43 AM	PH3 valve closed
5/20/2011	11:37:43 AM	SiCl4 pre valve closed
5/20/2011	11:37:43 AM	SiCl4 post valve closed
5/20/2011	11:37:43 AM	Main Vac valve closed
5/20/2011	11:37:43 AM	Bypass valve closed
5/20/2011	11:37:43 AM	Bubbler valve closed
5/20/2011	11:37:43 AM	Helium MFC set to  0.000000
5/20/2011	11:37:43 AM	H2 MFC set to  0.000000
5/20/2011	11:37:43 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:43 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:43 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:43 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:43 AM	Tube furnace set to 0
5/20/2011	11:37:44 AM	Run finished at 11:37 AM
5/20/2011	11:37:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:37:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:37:46 AM	Recipe started at 11:37 AM
5/20/2011	11:37:46 AM	Helium valve closed
5/20/2011	11:37:46 AM	H2 valve closed
5/20/2011	11:37:46 AM	BCl3 valve closed
5/20/2011	11:37:46 AM	PH3 valve closed
5/20/2011	11:37:46 AM	SiCl4 pre valve closed
5/20/2011	11:37:46 AM	SiCl4 post valve closed
5/20/2011	11:37:46 AM	Main Vac valve closed
5/20/2011	11:37:46 AM	Bubbler valve closed
5/20/2011	11:37:46 AM	Bypass valve opened
5/20/2011	11:37:46 AM	Helium MFC set to  0.000000
5/20/2011	11:37:46 AM	H2 MFC set to  0.000000
5/20/2011	11:37:46 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:46 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:46 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:46 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:37:46 AM	Tube furnace set to 0
5/20/2011	11:37:52 AM	Run aborted at 11:37 AM
5/20/2011	11:37:52 AM	Helium valve closed
5/20/2011	11:37:52 AM	H2 valve closed
5/20/2011	11:37:52 AM	BCl3 valve closed
5/20/2011	11:37:52 AM	PH3 valve closed
5/20/2011	11:37:52 AM	SiCl4 pre valve closed
5/20/2011	11:37:52 AM	SiCl4 post valve closed
5/20/2011	11:37:52 AM	Bypass valve closed
5/20/2011	11:37:52 AM	Main Vac valve closed
5/20/2011	11:37:52 AM	Bubbler valve closed
5/20/2011	11:37:52 AM	Helium MFC set to  0.000000
5/20/2011	11:37:52 AM	H2 MFC set to  0.000000
5/20/2011	11:37:52 AM	BCl3 MFC set to  0.000000
5/20/2011	11:37:52 AM	PHl3 MFC set to  0.000000
5/20/2011	11:37:52 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:37:52 AM	Tube furnace set to 0
5/20/2011	11:37:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:43:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:43:20 AM	Recipe started at 11:43 AM
5/20/2011	11:43:20 AM	Helium valve closed
5/20/2011	11:43:20 AM	H2 valve closed
5/20/2011	11:43:20 AM	BCl3 valve closed
5/20/2011	11:43:20 AM	PH3 valve closed
5/20/2011	11:43:20 AM	SiCl4 pre valve closed
5/20/2011	11:43:20 AM	SiCl4 post valve closed
5/20/2011	11:43:20 AM	Main Vac valve closed
5/20/2011	11:43:20 AM	Bubbler valve closed
5/20/2011	11:43:20 AM	Bypass valve opened
5/20/2011	11:43:20 AM	Helium MFC set to  0.000000
5/20/2011	11:43:20 AM	H2 MFC set to  0.000000
5/20/2011	11:43:20 AM	BCl3 MFC set to  0.000000
5/20/2011	11:43:20 AM	PHl3 MFC set to  0.000000
5/20/2011	11:43:20 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:43:20 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:43:20 AM	Tube furnace set to 0
5/20/2011	11:43:25 AM	Run aborted at 11:43 AM
5/20/2011	11:43:25 AM	Helium valve closed
5/20/2011	11:43:25 AM	H2 valve closed
5/20/2011	11:43:25 AM	BCl3 valve closed
5/20/2011	11:43:25 AM	PH3 valve closed
5/20/2011	11:43:25 AM	SiCl4 pre valve closed
5/20/2011	11:43:25 AM	SiCl4 post valve closed
5/20/2011	11:43:25 AM	Bypass valve closed
5/20/2011	11:43:25 AM	Main Vac valve closed
5/20/2011	11:43:25 AM	Bubbler valve closed
5/20/2011	11:43:25 AM	Helium MFC set to  0.000000
5/20/2011	11:43:25 AM	H2 MFC set to  0.000000
5/20/2011	11:43:25 AM	BCl3 MFC set to  0.000000
5/20/2011	11:43:25 AM	PHl3 MFC set to  0.000000
5/20/2011	11:43:25 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:43:25 AM	Tube furnace set to 0
5/20/2011	11:43:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:44:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:44:37 AM	Recipe started at 11:44 AM
5/20/2011	11:44:37 AM	Helium valve closed
5/20/2011	11:44:37 AM	H2 valve closed
5/20/2011	11:44:37 AM	BCl3 valve closed
5/20/2011	11:44:37 AM	PH3 valve closed
5/20/2011	11:44:37 AM	SiCl4 pre valve closed
5/20/2011	11:44:37 AM	SiCl4 post valve closed
5/20/2011	11:44:37 AM	Main Vac valve closed
5/20/2011	11:44:37 AM	Bubbler valve closed
5/20/2011	11:44:37 AM	Bypass valve opened
5/20/2011	11:44:37 AM	Helium MFC set to  0.000000
5/20/2011	11:44:37 AM	H2 MFC set to  0.000000
5/20/2011	11:44:37 AM	BCl3 MFC set to  0.000000
5/20/2011	11:44:37 AM	PHl3 MFC set to  0.000000
5/20/2011	11:44:37 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:44:37 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:44:37 AM	Tube furnace set to 0
5/20/2011	11:45:20 AM	Run aborted at 11:45 AM
5/20/2011	11:45:20 AM	Helium valve closed
5/20/2011	11:45:20 AM	H2 valve closed
5/20/2011	11:45:20 AM	BCl3 valve closed
5/20/2011	11:45:20 AM	PH3 valve closed
5/20/2011	11:45:20 AM	SiCl4 pre valve closed
5/20/2011	11:45:20 AM	SiCl4 post valve closed
5/20/2011	11:45:20 AM	Bypass valve closed
5/20/2011	11:45:20 AM	Main Vac valve closed
5/20/2011	11:45:20 AM	Bubbler valve closed
5/20/2011	11:45:20 AM	Helium MFC set to  0.000000
5/20/2011	11:45:20 AM	H2 MFC set to  0.000000
5/20/2011	11:45:20 AM	BCl3 MFC set to  0.000000
5/20/2011	11:45:20 AM	PHl3 MFC set to  0.000000
5/20/2011	11:45:20 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:45:21 AM	Tube furnace set to 0
5/20/2011	11:45:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:45:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:45:27 AM	Recipe started at 11:45 AM
5/20/2011	11:45:27 AM	H2 valve closed
5/20/2011	11:45:27 AM	BCl3 valve closed
5/20/2011	11:45:27 AM	PH3 valve closed
5/20/2011	11:45:27 AM	SiCl4 pre valve closed
5/20/2011	11:45:27 AM	SiCl4 post valve closed
5/20/2011	11:45:27 AM	Main Vac valve closed
5/20/2011	11:45:27 AM	Bypass valve closed
5/20/2011	11:45:27 AM	Bubbler valve closed
5/20/2011	11:45:27 AM	Helium valve opened
5/20/2011	11:45:27 AM	Helium MFC set to  500.000000
5/20/2011	11:45:27 AM	H2 MFC set to  0.000000
5/20/2011	11:45:27 AM	BCl3 MFC set to  0.000000
5/20/2011	11:45:27 AM	PHl3 MFC set to  0.000000
5/20/2011	11:45:27 AM	SiCl4 MFC set to  0.000000
5/20/2011	11:45:27 AM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:45:27 AM	Tube furnace set to 0
5/20/2011	1:18:58 PM	Helium valve closed
5/20/2011	1:18:58 PM	H2 valve closed
5/20/2011	1:18:58 PM	BCl3 valve closed
5/20/2011	1:18:58 PM	PH3 valve closed
5/20/2011	1:18:58 PM	SiCl4 pre valve closed
5/20/2011	1:18:58 PM	SiCl4 post valve closed
5/20/2011	1:18:58 PM	Main Vac valve closed
5/20/2011	1:18:58 PM	Bypass valve closed
5/20/2011	1:18:58 PM	Bubbler valve closed
5/20/2011	1:18:58 PM	Helium MFC set to  0.000000
5/20/2011	1:18:58 PM	H2 MFC set to  0.000000
5/20/2011	1:18:58 PM	BCl3 MFC set to  0.000000
5/20/2011	1:18:58 PM	PHl3 MFC set to  0.000000
5/20/2011	1:18:58 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:18:58 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	1:18:58 PM	Tube furnace set to 0
5/20/2011	1:18:59 PM	Run finished at 1:18 PM
5/20/2011	1:18:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	1:19:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	1:19:54 PM	Recipe started at 1:19 PM
5/20/2011	1:19:54 PM	H2 valve closed
5/20/2011	1:19:54 PM	BCl3 valve closed
5/20/2011	1:19:54 PM	PH3 valve closed
5/20/2011	1:19:54 PM	SiCl4 pre valve closed
5/20/2011	1:19:54 PM	SiCl4 post valve closed
5/20/2011	1:19:54 PM	Main Vac valve closed
5/20/2011	1:19:54 PM	Bypass valve closed
5/20/2011	1:19:54 PM	Bubbler valve closed
5/20/2011	1:19:54 PM	Helium valve opened
5/20/2011	1:19:54 PM	Helium MFC set to  500.000000
5/20/2011	1:19:54 PM	H2 MFC set to  0.000000
5/20/2011	1:19:54 PM	BCl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	PHl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:19:54 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	1:19:54 PM	Tube furnace set to 0
5/20/2011	1:19:54 PM	Helium valve closed
5/20/2011	1:19:54 PM	H2 valve closed
5/20/2011	1:19:54 PM	BCl3 valve closed
5/20/2011	1:19:54 PM	PH3 valve closed
5/20/2011	1:19:54 PM	SiCl4 pre valve closed
5/20/2011	1:19:54 PM	SiCl4 post valve closed
5/20/2011	1:19:54 PM	Main Vac valve closed
5/20/2011	1:19:54 PM	Bypass valve closed
5/20/2011	1:19:54 PM	Bubbler valve closed
5/20/2011	1:19:54 PM	Helium MFC set to  0.000000
5/20/2011	1:19:54 PM	H2 MFC set to  0.000000
5/20/2011	1:19:54 PM	BCl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	PHl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:19:54 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	1:19:54 PM	Tube furnace set to 0
5/20/2011	1:19:54 PM	Helium valve closed
5/20/2011	1:19:54 PM	H2 valve closed
5/20/2011	1:19:54 PM	BCl3 valve closed
5/20/2011	1:19:54 PM	PH3 valve closed
5/20/2011	1:19:54 PM	SiCl4 pre valve closed
5/20/2011	1:19:54 PM	SiCl4 post valve closed
5/20/2011	1:19:54 PM	Main Vac valve closed
5/20/2011	1:19:54 PM	Bubbler valve closed
5/20/2011	1:19:54 PM	Bypass valve closed
5/20/2011	1:19:54 PM	Helium MFC set to  0.000000
5/20/2011	1:19:54 PM	H2 MFC set to  0.000000
5/20/2011	1:19:54 PM	BCl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	PHl3 MFC set to  0.000000
5/20/2011	1:19:54 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:19:54 PM	Bypass solenoid MFC set to  760.000000
5/20/2011	1:19:55 PM	Tube furnace set to 0
5/20/2011	1:19:55 PM	Baratron reads 900.567492 Torr.  Emergency exit.
5/20/2011	1:19:56 PM	Run aborted at 1:19 PM
5/20/2011	1:19:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	1:19:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	1:19:58 PM	Recipe started at 1:19 PM
5/20/2011	1:19:58 PM	Helium valve closed
5/20/2011	1:19:58 PM	H2 valve closed
5/20/2011	1:19:58 PM	BCl3 valve closed
5/20/2011	1:19:58 PM	PH3 valve closed
5/20/2011	1:19:58 PM	SiCl4 pre valve closed
5/20/2011	1:19:58 PM	SiCl4 post valve closed
5/20/2011	1:19:58 PM	Main Vac valve closed
5/20/2011	1:19:58 PM	Bubbler valve closed
5/20/2011	1:19:58 PM	Bypass valve opened
5/20/2011	1:19:58 PM	Helium MFC set to  0.000000
5/20/2011	1:19:58 PM	H2 MFC set to  0.000000
5/20/2011	1:19:58 PM	BCl3 MFC set to  0.000000
5/20/2011	1:19:58 PM	PHl3 MFC set to  0.000000
5/20/2011	1:19:58 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:19:58 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	1:19:58 PM	Tube furnace set to 0
5/20/2011	1:20:29 PM	Helium valve closed
5/20/2011	1:20:29 PM	H2 valve closed
5/20/2011	1:20:29 PM	BCl3 valve closed
5/20/2011	1:20:29 PM	PH3 valve closed
5/20/2011	1:20:29 PM	SiCl4 pre valve closed
5/20/2011	1:20:29 PM	SiCl4 post valve closed
5/20/2011	1:20:29 PM	Bubbler valve closed
5/20/2011	1:20:29 PM	Main Vac valve opened
5/20/2011	1:20:29 PM	Bypass valve opened
5/20/2011	1:20:29 PM	Helium MFC set to  0.000000
5/20/2011	1:20:29 PM	H2 MFC set to  0.000000
5/20/2011	1:20:30 PM	BCl3 MFC set to  0.000000
5/20/2011	1:20:30 PM	PHl3 MFC set to  0.000000
5/20/2011	1:20:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	1:20:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	1:20:30 PM	Tube furnace set to 0
5/20/2011	1:20:30 PM	Run finished at 1:20 PM
5/20/2011	1:20:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	2:32:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	2:32:21 PM	Recipe started at 2:32 PM
5/20/2011	2:32:21 PM	Helium valve closed
5/20/2011	2:32:21 PM	H2 valve closed
5/20/2011	2:32:21 PM	BCl3 valve closed
5/20/2011	2:32:21 PM	PH3 valve closed
5/20/2011	2:32:21 PM	SiCl4 pre valve closed
5/20/2011	2:32:21 PM	SiCl4 post valve closed
5/20/2011	2:32:21 PM	Main Vac valve closed
5/20/2011	2:32:21 PM	Bubbler valve closed
5/20/2011	2:32:21 PM	Bypass valve opened
5/20/2011	2:32:21 PM	Helium MFC set to  0.000000
5/20/2011	2:32:21 PM	H2 MFC set to  0.000000
5/20/2011	2:32:21 PM	BCl3 MFC set to  0.000000
5/20/2011	2:32:21 PM	PHl3 MFC set to  0.000000
5/20/2011	2:32:21 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:32:21 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:32:21 PM	Tube furnace set to 0
5/20/2011	2:32:21 PM	Helium valve closed
5/20/2011	2:32:21 PM	H2 valve closed
5/20/2011	2:32:21 PM	BCl3 valve closed
5/20/2011	2:32:21 PM	PH3 valve closed
5/20/2011	2:32:21 PM	SiCl4 pre valve closed
5/20/2011	2:32:21 PM	SiCl4 post valve closed
5/20/2011	2:32:21 PM	Bubbler valve closed
5/20/2011	2:32:21 PM	Main Vac valve opened
5/20/2011	2:32:21 PM	Bypass valve opened
5/20/2011	2:32:21 PM	Helium MFC set to  0.000000
5/20/2011	2:32:21 PM	H2 MFC set to  0.000000
5/20/2011	2:32:21 PM	BCl3 MFC set to  0.000000
5/20/2011	2:32:21 PM	PHl3 MFC set to  0.000000
5/20/2011	2:32:21 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:32:21 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:32:22 PM	Tube furnace set to 0
5/20/2011	2:33:22 PM	H2 valve closed
5/20/2011	2:33:22 PM	BCl3 valve closed
5/20/2011	2:33:22 PM	PH3 valve closed
5/20/2011	2:33:22 PM	SiCl4 pre valve closed
5/20/2011	2:33:22 PM	SiCl4 post valve closed
5/20/2011	2:33:22 PM	Bubbler valve closed
5/20/2011	2:33:22 PM	Helium valve opened
5/20/2011	2:33:22 PM	Main Vac valve opened
5/20/2011	2:33:22 PM	Bypass valve opened
5/20/2011	2:33:22 PM	Helium MFC set to  100.000000
5/20/2011	2:33:22 PM	H2 MFC set to  0.000000
5/20/2011	2:33:22 PM	BCl3 MFC set to  0.000000
5/20/2011	2:33:22 PM	PHl3 MFC set to  0.000000
5/20/2011	2:33:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:33:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:33:22 PM	Tube furnace set to 0
5/20/2011	2:34:22 PM	Helium valve closed
5/20/2011	2:34:22 PM	H2 valve closed
5/20/2011	2:34:22 PM	BCl3 valve closed
5/20/2011	2:34:22 PM	PH3 valve closed
5/20/2011	2:34:22 PM	SiCl4 pre valve closed
5/20/2011	2:34:22 PM	SiCl4 post valve closed
5/20/2011	2:34:22 PM	Bubbler valve closed
5/20/2011	2:34:22 PM	Main Vac valve opened
5/20/2011	2:34:22 PM	Bypass valve opened
5/20/2011	2:34:22 PM	Helium MFC set to  0.000000
5/20/2011	2:34:22 PM	H2 MFC set to  0.000000
5/20/2011	2:34:22 PM	BCl3 MFC set to  0.000000
5/20/2011	2:34:22 PM	PHl3 MFC set to  0.000000
5/20/2011	2:34:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:34:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:34:22 PM	Tube furnace set to 0
5/20/2011	2:35:22 PM	H2 valve closed
5/20/2011	2:35:22 PM	BCl3 valve closed
5/20/2011	2:35:22 PM	PH3 valve closed
5/20/2011	2:35:22 PM	SiCl4 pre valve closed
5/20/2011	2:35:22 PM	SiCl4 post valve closed
5/20/2011	2:35:22 PM	Bubbler valve closed
5/20/2011	2:35:22 PM	Helium valve opened
5/20/2011	2:35:22 PM	Main Vac valve opened
5/20/2011	2:35:22 PM	Bypass valve opened
5/20/2011	2:35:22 PM	Helium MFC set to  100.000000
5/20/2011	2:35:22 PM	H2 MFC set to  0.000000
5/20/2011	2:35:22 PM	BCl3 MFC set to  0.000000
5/20/2011	2:35:22 PM	PHl3 MFC set to  0.000000
5/20/2011	2:35:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:35:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:35:22 PM	Tube furnace set to 0
5/20/2011	2:36:22 PM	Helium valve closed
5/20/2011	2:36:22 PM	H2 valve closed
5/20/2011	2:36:22 PM	BCl3 valve closed
5/20/2011	2:36:22 PM	PH3 valve closed
5/20/2011	2:36:22 PM	SiCl4 pre valve closed
5/20/2011	2:36:22 PM	SiCl4 post valve closed
5/20/2011	2:36:22 PM	Bubbler valve closed
5/20/2011	2:36:22 PM	Main Vac valve opened
5/20/2011	2:36:22 PM	Bypass valve opened
5/20/2011	2:36:22 PM	Helium MFC set to  0.000000
5/20/2011	2:36:22 PM	H2 MFC set to  0.000000
5/20/2011	2:36:22 PM	BCl3 MFC set to  0.000000
5/20/2011	2:36:22 PM	PHl3 MFC set to  0.000000
5/20/2011	2:36:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:36:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:36:22 PM	Tube furnace set to 0
5/20/2011	2:37:22 PM	H2 valve closed
5/20/2011	2:37:22 PM	BCl3 valve closed
5/20/2011	2:37:22 PM	PH3 valve closed
5/20/2011	2:37:22 PM	SiCl4 pre valve closed
5/20/2011	2:37:22 PM	SiCl4 post valve closed
5/20/2011	2:37:22 PM	Bubbler valve closed
5/20/2011	2:37:22 PM	Helium valve opened
5/20/2011	2:37:22 PM	Main Vac valve opened
5/20/2011	2:37:22 PM	Bypass valve opened
5/20/2011	2:37:22 PM	Helium MFC set to  100.000000
5/20/2011	2:37:22 PM	H2 MFC set to  0.000000
5/20/2011	2:37:22 PM	BCl3 MFC set to  0.000000
5/20/2011	2:37:22 PM	PHl3 MFC set to  0.000000
5/20/2011	2:37:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:37:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:37:23 PM	Tube furnace set to 0
5/20/2011	2:38:23 PM	Helium valve closed
5/20/2011	2:38:23 PM	H2 valve closed
5/20/2011	2:38:23 PM	BCl3 valve closed
5/20/2011	2:38:23 PM	PH3 valve closed
5/20/2011	2:38:23 PM	SiCl4 pre valve closed
5/20/2011	2:38:23 PM	SiCl4 post valve closed
5/20/2011	2:38:23 PM	Bubbler valve closed
5/20/2011	2:38:23 PM	Main Vac valve opened
5/20/2011	2:38:23 PM	Bypass valve opened
5/20/2011	2:38:23 PM	Helium MFC set to  0.000000
5/20/2011	2:38:23 PM	H2 MFC set to  0.000000
5/20/2011	2:38:23 PM	BCl3 MFC set to  0.000000
5/20/2011	2:38:23 PM	PHl3 MFC set to  0.000000
5/20/2011	2:38:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:38:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:38:23 PM	Tube furnace set to 0
5/20/2011	2:39:23 PM	H2 valve closed
5/20/2011	2:39:23 PM	BCl3 valve closed
5/20/2011	2:39:23 PM	PH3 valve closed
5/20/2011	2:39:23 PM	SiCl4 pre valve closed
5/20/2011	2:39:23 PM	SiCl4 post valve closed
5/20/2011	2:39:23 PM	Bubbler valve closed
5/20/2011	2:39:23 PM	Helium valve opened
5/20/2011	2:39:23 PM	Main Vac valve opened
5/20/2011	2:39:23 PM	Bypass valve opened
5/20/2011	2:39:23 PM	Helium MFC set to  100.000000
5/20/2011	2:39:23 PM	H2 MFC set to  0.000000
5/20/2011	2:39:23 PM	BCl3 MFC set to  0.000000
5/20/2011	2:39:23 PM	PHl3 MFC set to  0.000000
5/20/2011	2:39:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:39:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:39:23 PM	Tube furnace set to 0
5/20/2011	2:40:23 PM	Helium valve closed
5/20/2011	2:40:23 PM	H2 valve closed
5/20/2011	2:40:23 PM	BCl3 valve closed
5/20/2011	2:40:23 PM	PH3 valve closed
5/20/2011	2:40:23 PM	SiCl4 pre valve closed
5/20/2011	2:40:23 PM	SiCl4 post valve closed
5/20/2011	2:40:23 PM	Bubbler valve closed
5/20/2011	2:40:23 PM	Main Vac valve opened
5/20/2011	2:40:23 PM	Bypass valve opened
5/20/2011	2:40:23 PM	Helium MFC set to  0.000000
5/20/2011	2:40:23 PM	H2 MFC set to  0.000000
5/20/2011	2:40:23 PM	BCl3 MFC set to  0.000000
5/20/2011	2:40:23 PM	PHl3 MFC set to  0.000000
5/20/2011	2:40:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:40:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:40:23 PM	Tube furnace set to 0
5/20/2011	2:41:23 PM	H2 valve closed
5/20/2011	2:41:23 PM	BCl3 valve closed
5/20/2011	2:41:23 PM	PH3 valve closed
5/20/2011	2:41:23 PM	SiCl4 pre valve closed
5/20/2011	2:41:23 PM	SiCl4 post valve closed
5/20/2011	2:41:23 PM	Bubbler valve closed
5/20/2011	2:41:23 PM	Helium valve opened
5/20/2011	2:41:23 PM	Main Vac valve opened
5/20/2011	2:41:23 PM	Bypass valve opened
5/20/2011	2:41:23 PM	Helium MFC set to  100.000000
5/20/2011	2:41:23 PM	H2 MFC set to  0.000000
5/20/2011	2:41:23 PM	BCl3 MFC set to  0.000000
5/20/2011	2:41:23 PM	PHl3 MFC set to  0.000000
5/20/2011	2:41:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:41:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:41:23 PM	Tube furnace set to 0
5/20/2011	2:42:23 PM	Helium valve closed
5/20/2011	2:42:23 PM	H2 valve closed
5/20/2011	2:42:23 PM	BCl3 valve closed
5/20/2011	2:42:23 PM	PH3 valve closed
5/20/2011	2:42:23 PM	SiCl4 pre valve closed
5/20/2011	2:42:23 PM	SiCl4 post valve closed
5/20/2011	2:42:23 PM	Bubbler valve closed
5/20/2011	2:42:23 PM	Main Vac valve opened
5/20/2011	2:42:23 PM	Bypass valve opened
5/20/2011	2:42:23 PM	Helium MFC set to  0.000000
5/20/2011	2:42:23 PM	H2 MFC set to  0.000000
5/20/2011	2:42:23 PM	BCl3 MFC set to  0.000000
5/20/2011	2:42:23 PM	PHl3 MFC set to  0.000000
5/20/2011	2:42:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:42:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:42:24 PM	Tube furnace set to 0
5/20/2011	2:43:24 PM	H2 valve closed
5/20/2011	2:43:24 PM	BCl3 valve closed
5/20/2011	2:43:24 PM	PH3 valve closed
5/20/2011	2:43:24 PM	SiCl4 pre valve closed
5/20/2011	2:43:24 PM	SiCl4 post valve closed
5/20/2011	2:43:24 PM	Bubbler valve closed
5/20/2011	2:43:24 PM	Helium valve opened
5/20/2011	2:43:24 PM	Main Vac valve opened
5/20/2011	2:43:24 PM	Bypass valve opened
5/20/2011	2:43:24 PM	Helium MFC set to  100.000000
5/20/2011	2:43:24 PM	H2 MFC set to  0.000000
5/20/2011	2:43:24 PM	BCl3 MFC set to  0.000000
5/20/2011	2:43:24 PM	PHl3 MFC set to  0.000000
5/20/2011	2:43:24 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:43:24 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:43:24 PM	Tube furnace set to 0
5/20/2011	2:44:24 PM	Helium valve closed
5/20/2011	2:44:24 PM	H2 valve closed
5/20/2011	2:44:24 PM	BCl3 valve closed
5/20/2011	2:44:24 PM	PH3 valve closed
5/20/2011	2:44:24 PM	SiCl4 pre valve closed
5/20/2011	2:44:24 PM	SiCl4 post valve closed
5/20/2011	2:44:24 PM	Bubbler valve closed
5/20/2011	2:44:24 PM	Main Vac valve opened
5/20/2011	2:44:24 PM	Bypass valve opened
5/20/2011	2:44:24 PM	Helium MFC set to  0.000000
5/20/2011	2:44:24 PM	H2 MFC set to  0.000000
5/20/2011	2:44:24 PM	BCl3 MFC set to  0.000000
5/20/2011	2:44:24 PM	PHl3 MFC set to  0.000000
5/20/2011	2:44:24 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:44:24 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:44:24 PM	Tube furnace set to 0
5/20/2011	2:45:24 PM	H2 valve closed
5/20/2011	2:45:24 PM	BCl3 valve closed
5/20/2011	2:45:24 PM	PH3 valve closed
5/20/2011	2:45:24 PM	SiCl4 pre valve closed
5/20/2011	2:45:24 PM	SiCl4 post valve closed
5/20/2011	2:45:24 PM	Bubbler valve closed
5/20/2011	2:45:24 PM	Helium valve opened
5/20/2011	2:45:24 PM	Main Vac valve opened
5/20/2011	2:45:24 PM	Bypass valve opened
5/20/2011	2:45:24 PM	Helium MFC set to  100.000000
5/20/2011	2:45:24 PM	H2 MFC set to  0.000000
5/20/2011	2:45:24 PM	BCl3 MFC set to  0.000000
5/20/2011	2:45:24 PM	PHl3 MFC set to  0.000000
5/20/2011	2:45:24 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:45:24 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:45:24 PM	Tube furnace set to 0
5/20/2011	2:46:24 PM	Helium valve closed
5/20/2011	2:46:24 PM	H2 valve closed
5/20/2011	2:46:24 PM	BCl3 valve closed
5/20/2011	2:46:24 PM	PH3 valve closed
5/20/2011	2:46:24 PM	SiCl4 pre valve closed
5/20/2011	2:46:24 PM	SiCl4 post valve closed
5/20/2011	2:46:24 PM	Bubbler valve closed
5/20/2011	2:46:24 PM	Main Vac valve opened
5/20/2011	2:46:24 PM	Bypass valve opened
5/20/2011	2:46:24 PM	Helium MFC set to  0.000000
5/20/2011	2:46:24 PM	H2 MFC set to  0.000000
5/20/2011	2:46:24 PM	BCl3 MFC set to  0.000000
5/20/2011	2:46:24 PM	PHl3 MFC set to  0.000000
5/20/2011	2:46:24 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:46:24 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:46:24 PM	Tube furnace set to 0
5/20/2011	2:47:24 PM	H2 valve closed
5/20/2011	2:47:24 PM	BCl3 valve closed
5/20/2011	2:47:24 PM	PH3 valve closed
5/20/2011	2:47:24 PM	SiCl4 pre valve closed
5/20/2011	2:47:24 PM	SiCl4 post valve closed
5/20/2011	2:47:24 PM	Bubbler valve closed
5/20/2011	2:47:24 PM	Helium valve opened
5/20/2011	2:47:24 PM	Main Vac valve opened
5/20/2011	2:47:24 PM	Bypass valve opened
5/20/2011	2:47:24 PM	Helium MFC set to  100.000000
5/20/2011	2:47:24 PM	H2 MFC set to  0.000000
5/20/2011	2:47:24 PM	BCl3 MFC set to  0.000000
5/20/2011	2:47:24 PM	PHl3 MFC set to  0.000000
5/20/2011	2:47:24 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:47:24 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:47:25 PM	Tube furnace set to 0
5/20/2011	2:48:25 PM	Helium valve closed
5/20/2011	2:48:25 PM	H2 valve closed
5/20/2011	2:48:25 PM	BCl3 valve closed
5/20/2011	2:48:25 PM	PH3 valve closed
5/20/2011	2:48:25 PM	SiCl4 pre valve closed
5/20/2011	2:48:25 PM	SiCl4 post valve closed
5/20/2011	2:48:25 PM	Bubbler valve closed
5/20/2011	2:48:25 PM	Main Vac valve opened
5/20/2011	2:48:25 PM	Bypass valve opened
5/20/2011	2:48:25 PM	Helium MFC set to  0.000000
5/20/2011	2:48:25 PM	H2 MFC set to  0.000000
5/20/2011	2:48:25 PM	BCl3 MFC set to  0.000000
5/20/2011	2:48:25 PM	PHl3 MFC set to  0.000000
5/20/2011	2:48:25 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:48:25 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:48:25 PM	Tube furnace set to 0
5/20/2011	2:49:25 PM	H2 valve closed
5/20/2011	2:49:25 PM	BCl3 valve closed
5/20/2011	2:49:25 PM	PH3 valve closed
5/20/2011	2:49:25 PM	SiCl4 pre valve closed
5/20/2011	2:49:25 PM	SiCl4 post valve closed
5/20/2011	2:49:25 PM	Bubbler valve closed
5/20/2011	2:49:25 PM	Helium valve opened
5/20/2011	2:49:25 PM	Main Vac valve opened
5/20/2011	2:49:25 PM	Bypass valve opened
5/20/2011	2:49:25 PM	Helium MFC set to  100.000000
5/20/2011	2:49:25 PM	H2 MFC set to  0.000000
5/20/2011	2:49:25 PM	BCl3 MFC set to  0.000000
5/20/2011	2:49:25 PM	PHl3 MFC set to  0.000000
5/20/2011	2:49:25 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:49:25 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:49:25 PM	Tube furnace set to 0
5/20/2011	2:50:25 PM	Helium valve closed
5/20/2011	2:50:25 PM	H2 valve closed
5/20/2011	2:50:25 PM	BCl3 valve closed
5/20/2011	2:50:25 PM	PH3 valve closed
5/20/2011	2:50:25 PM	SiCl4 pre valve closed
5/20/2011	2:50:25 PM	SiCl4 post valve closed
5/20/2011	2:50:25 PM	Bubbler valve closed
5/20/2011	2:50:25 PM	Main Vac valve opened
5/20/2011	2:50:25 PM	Bypass valve opened
5/20/2011	2:50:25 PM	Helium MFC set to  0.000000
5/20/2011	2:50:25 PM	H2 MFC set to  0.000000
5/20/2011	2:50:25 PM	BCl3 MFC set to  0.000000
5/20/2011	2:50:25 PM	PHl3 MFC set to  0.000000
5/20/2011	2:50:25 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:50:25 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:50:25 PM	Tube furnace set to 0
5/20/2011	2:51:25 PM	H2 valve closed
5/20/2011	2:51:25 PM	BCl3 valve closed
5/20/2011	2:51:25 PM	PH3 valve closed
5/20/2011	2:51:25 PM	SiCl4 pre valve closed
5/20/2011	2:51:25 PM	SiCl4 post valve closed
5/20/2011	2:51:25 PM	Bubbler valve closed
5/20/2011	2:51:25 PM	Helium valve opened
5/20/2011	2:51:25 PM	Main Vac valve opened
5/20/2011	2:51:25 PM	Bypass valve opened
5/20/2011	2:51:25 PM	Helium MFC set to  100.000000
5/20/2011	2:51:25 PM	H2 MFC set to  0.000000
5/20/2011	2:51:25 PM	BCl3 MFC set to  0.000000
5/20/2011	2:51:25 PM	PHl3 MFC set to  0.000000
5/20/2011	2:51:25 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:51:25 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:51:25 PM	Tube furnace set to 0
5/20/2011	2:52:25 PM	Helium valve closed
5/20/2011	2:52:25 PM	H2 valve closed
5/20/2011	2:52:25 PM	BCl3 valve closed
5/20/2011	2:52:25 PM	PH3 valve closed
5/20/2011	2:52:25 PM	SiCl4 pre valve closed
5/20/2011	2:52:25 PM	SiCl4 post valve closed
5/20/2011	2:52:25 PM	Bubbler valve closed
5/20/2011	2:52:25 PM	Main Vac valve opened
5/20/2011	2:52:25 PM	Bypass valve opened
5/20/2011	2:52:25 PM	Helium MFC set to  0.000000
5/20/2011	2:52:25 PM	H2 MFC set to  0.000000
5/20/2011	2:52:25 PM	BCl3 MFC set to  0.000000
5/20/2011	2:52:25 PM	PHl3 MFC set to  0.000000
5/20/2011	2:52:25 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:52:25 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:52:26 PM	Tube furnace set to 0
5/20/2011	2:52:27 PM	Run finished at 2:52 PM
5/20/2011	2:52:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	2:53:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	2:53:12 PM	Recipe started at 2:53 PM
5/20/2011	2:53:12 PM	Helium valve closed
5/20/2011	2:53:12 PM	H2 valve closed
5/20/2011	2:53:12 PM	BCl3 valve closed
5/20/2011	2:53:12 PM	PH3 valve closed
5/20/2011	2:53:12 PM	SiCl4 pre valve closed
5/20/2011	2:53:12 PM	SiCl4 post valve closed
5/20/2011	2:53:12 PM	Main Vac valve closed
5/20/2011	2:53:12 PM	Bypass valve closed
5/20/2011	2:53:12 PM	Bubbler valve closed
5/20/2011	2:53:12 PM	Helium MFC set to  0.000000
5/20/2011	2:53:12 PM	H2 MFC set to  0.000000
5/20/2011	2:53:12 PM	BCl3 MFC set to  0.000000
5/20/2011	2:53:12 PM	PHl3 MFC set to  0.000000
5/20/2011	2:53:12 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:53:12 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:53:12 PM	Tube furnace set to 0
5/20/2011	2:53:12 PM	Run finished at 2:53 PM
5/20/2011	2:53:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	2:53:26 PM	Recipe started at 2:53 PM
5/20/2011	2:53:26 PM	Helium valve closed
5/20/2011	2:53:26 PM	BCl3 valve closed
5/20/2011	2:53:26 PM	PH3 valve closed
5/20/2011	2:53:26 PM	SiCl4 pre valve closed
5/20/2011	2:53:26 PM	SiCl4 post valve closed
5/20/2011	2:53:26 PM	Main Vac valve closed
5/20/2011	2:53:26 PM	Bypass valve closed
5/20/2011	2:53:26 PM	Bubbler valve closed
5/20/2011	2:53:27 PM	H2 valve opened
5/20/2011	2:53:27 PM	Helium MFC set to  0.000000
5/20/2011	2:53:27 PM	H2 MFC set to  500.000000
5/20/2011	2:53:27 PM	BCl3 MFC set to  0.000000
5/20/2011	2:53:27 PM	PHl3 MFC set to  0.000000
5/20/2011	2:53:27 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:53:27 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:53:27 PM	Tube furnace set to 0
5/20/2011	2:54:48 PM	Helium valve closed
5/20/2011	2:54:48 PM	BCl3 valve closed
5/20/2011	2:54:48 PM	PH3 valve closed
5/20/2011	2:54:48 PM	SiCl4 pre valve closed
5/20/2011	2:54:48 PM	SiCl4 post valve closed
5/20/2011	2:54:48 PM	Main Vac valve closed
5/20/2011	2:54:48 PM	Bypass valve closed
5/20/2011	2:54:48 PM	H2 valve opened
5/20/2011	2:54:48 PM	Bubbler valve opened
5/20/2011	2:54:48 PM	Helium MFC set to  0.000000
5/20/2011	2:54:48 PM	H2 MFC set to  500.000000
5/20/2011	2:54:48 PM	BCl3 MFC set to  0.000000
5/20/2011	2:54:48 PM	PHl3 MFC set to  0.000000
5/20/2011	2:54:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	2:54:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	2:54:49 PM	Tube furnace set to 250
5/20/2011	3:14:49 PM	Helium valve closed
5/20/2011	3:14:49 PM	BCl3 valve closed
5/20/2011	3:14:49 PM	PH3 valve closed
5/20/2011	3:14:49 PM	SiCl4 pre valve closed
5/20/2011	3:14:49 PM	SiCl4 post valve closed
5/20/2011	3:14:49 PM	Main Vac valve closed
5/20/2011	3:14:49 PM	Bypass valve closed
5/20/2011	3:14:49 PM	H2 valve opened
5/20/2011	3:14:49 PM	Bubbler valve opened
5/20/2011	3:14:49 PM	Helium MFC set to  0.000000
5/20/2011	3:14:49 PM	H2 MFC set to  500.000000
5/20/2011	3:14:49 PM	BCl3 MFC set to  0.000000
5/20/2011	3:14:49 PM	PHl3 MFC set to  0.000000
5/20/2011	3:14:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	3:14:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	3:14:49 PM	Tube furnace set to 1000
5/20/2011	3:34:49 PM	Helium valve closed
5/20/2011	3:34:49 PM	BCl3 valve closed
5/20/2011	3:34:49 PM	Main Vac valve closed
5/20/2011	3:34:49 PM	Bypass valve closed
5/20/2011	3:34:49 PM	H2 valve opened
5/20/2011	3:34:49 PM	PH3 valve opened
5/20/2011	3:34:49 PM	SiCl4 pre valve opened
5/20/2011	3:34:49 PM	SiCl4 post valve opened
5/20/2011	3:34:49 PM	Bubbler valve opened
5/20/2011	3:34:49 PM	Helium MFC set to  0.000000
5/20/2011	3:34:49 PM	H2 MFC set to  500.000000
5/20/2011	3:34:49 PM	BCl3 MFC set to  0.000000
5/20/2011	3:34:49 PM	PHl3 MFC set to  1.000000
5/20/2011	3:34:49 PM	SiCl4 MFC set to  75.000000
5/20/2011	3:34:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	3:34:49 PM	Tube furnace set to 1000
5/20/2011	3:50:49 PM	H2 valve closed
5/20/2011	3:50:49 PM	BCl3 valve closed
5/20/2011	3:50:49 PM	PH3 valve closed
5/20/2011	3:50:49 PM	SiCl4 pre valve closed
5/20/2011	3:50:49 PM	SiCl4 post valve closed
5/20/2011	3:50:49 PM	Main Vac valve closed
5/20/2011	3:50:49 PM	Bypass valve closed
5/20/2011	3:50:49 PM	Helium valve opened
5/20/2011	3:50:49 PM	Bubbler valve opened
5/20/2011	3:50:49 PM	Helium MFC set to  500.000000
5/20/2011	3:50:49 PM	H2 MFC set to  0.000000
5/20/2011	3:50:49 PM	BCl3 MFC set to  0.000000
5/20/2011	3:50:49 PM	PHl3 MFC set to  0.000000
5/20/2011	3:50:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	3:50:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	3:50:49 PM	Tube furnace set to 0
5/20/2011	4:10:49 PM	Helium valve closed
5/20/2011	4:10:49 PM	H2 valve closed
5/20/2011	4:10:49 PM	BCl3 valve closed
5/20/2011	4:10:49 PM	PH3 valve closed
5/20/2011	4:10:49 PM	SiCl4 pre valve closed
5/20/2011	4:10:49 PM	SiCl4 post valve closed
5/20/2011	4:10:49 PM	Main Vac valve closed
5/20/2011	4:10:49 PM	Bypass valve closed
5/20/2011	4:10:49 PM	Bubbler valve closed
5/20/2011	4:10:49 PM	Helium MFC set to  0.000000
5/20/2011	4:10:49 PM	H2 MFC set to  0.000000
5/20/2011	4:10:49 PM	BCl3 MFC set to  0.000000
5/20/2011	4:10:49 PM	PHl3 MFC set to  0.000000
5/20/2011	4:10:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:10:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:10:49 PM	Tube furnace set to 0
5/20/2011	4:10:49 PM	Run finished at 4:10 PM
5/20/2011	4:14:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	4:14:01 PM	Recipe started at 4:14 PM
5/20/2011	4:14:01 PM	H2 valve closed
5/20/2011	4:14:01 PM	BCl3 valve closed
5/20/2011	4:14:01 PM	PH3 valve closed
5/20/2011	4:14:01 PM	SiCl4 pre valve closed
5/20/2011	4:14:01 PM	SiCl4 post valve closed
5/20/2011	4:14:01 PM	Main Vac valve closed
5/20/2011	4:14:01 PM	Bypass valve closed
5/20/2011	4:14:01 PM	Bubbler valve closed
5/20/2011	4:14:01 PM	Helium valve opened
5/20/2011	4:14:01 PM	Helium MFC set to  500.000000
5/20/2011	4:14:01 PM	H2 MFC set to  0.000000
5/20/2011	4:14:01 PM	BCl3 MFC set to  0.000000
5/20/2011	4:14:01 PM	PHl3 MFC set to  0.000000
5/20/2011	4:14:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:14:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:14:01 PM	Tube furnace set to 0
5/20/2011	4:14:01 PM	Helium valve closed
5/20/2011	4:14:01 PM	H2 valve closed
5/20/2011	4:14:01 PM	BCl3 valve closed
5/20/2011	4:14:01 PM	PH3 valve closed
5/20/2011	4:14:01 PM	SiCl4 pre valve closed
5/20/2011	4:14:01 PM	SiCl4 post valve closed
5/20/2011	4:14:01 PM	Main Vac valve closed
5/20/2011	4:14:01 PM	Bypass valve closed
5/20/2011	4:14:01 PM	Bubbler valve closed
5/20/2011	4:14:01 PM	Helium MFC set to  0.000000
5/20/2011	4:14:01 PM	H2 MFC set to  0.000000
5/20/2011	4:14:01 PM	BCl3 MFC set to  0.000000
5/20/2011	4:14:01 PM	PHl3 MFC set to  0.000000
5/20/2011	4:14:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:14:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:14:02 PM	Tube furnace set to 0
5/20/2011	4:14:02 PM	Run finished at 4:14 PM
5/20/2011	4:14:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	4:22:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	4:22:38 PM	Recipe started at 4:22 PM
5/20/2011	4:22:38 PM	H2 valve closed
5/20/2011	4:22:38 PM	BCl3 valve closed
5/20/2011	4:22:38 PM	PH3 valve closed
5/20/2011	4:22:38 PM	SiCl4 pre valve closed
5/20/2011	4:22:38 PM	SiCl4 post valve closed
5/20/2011	4:22:38 PM	Main Vac valve closed
5/20/2011	4:22:38 PM	Bypass valve closed
5/20/2011	4:22:38 PM	Bubbler valve closed
5/20/2011	4:22:38 PM	Helium valve opened
5/20/2011	4:22:38 PM	Helium MFC set to  500.000000
5/20/2011	4:22:38 PM	H2 MFC set to  0.000000
5/20/2011	4:22:38 PM	BCl3 MFC set to  0.000000
5/20/2011	4:22:38 PM	PHl3 MFC set to  0.000000
5/20/2011	4:22:38 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:22:38 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:22:38 PM	Tube furnace set to 0
5/20/2011	4:22:44 PM	Helium valve closed
5/20/2011	4:22:44 PM	H2 valve closed
5/20/2011	4:22:44 PM	BCl3 valve closed
5/20/2011	4:22:44 PM	PH3 valve closed
5/20/2011	4:22:44 PM	SiCl4 pre valve closed
5/20/2011	4:22:44 PM	SiCl4 post valve closed
5/20/2011	4:22:44 PM	Main Vac valve closed
5/20/2011	4:22:44 PM	Bypass valve closed
5/20/2011	4:22:44 PM	Bubbler valve closed
5/20/2011	4:22:44 PM	Helium MFC set to  0.000000
5/20/2011	4:22:44 PM	H2 MFC set to  0.000000
5/20/2011	4:22:44 PM	BCl3 MFC set to  0.000000
5/20/2011	4:22:44 PM	PHl3 MFC set to  0.000000
5/20/2011	4:22:44 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:22:44 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:22:44 PM	Tube furnace set to 0
5/20/2011	4:22:44 PM	Run finished at 4:22 PM
5/20/2011	4:22:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	4:31:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	4:31:22 PM	Recipe started at 4:31 PM
5/20/2011	4:31:22 PM	Helium valve closed
5/20/2011	4:31:22 PM	H2 valve closed
5/20/2011	4:31:22 PM	BCl3 valve closed
5/20/2011	4:31:22 PM	PH3 valve closed
5/20/2011	4:31:22 PM	SiCl4 pre valve closed
5/20/2011	4:31:22 PM	SiCl4 post valve closed
5/20/2011	4:31:22 PM	Main Vac valve closed
5/20/2011	4:31:22 PM	Bubbler valve closed
5/20/2011	4:31:22 PM	Bypass valve opened
5/20/2011	4:31:22 PM	Helium MFC set to  0.000000
5/20/2011	4:31:22 PM	H2 MFC set to  0.000000
5/20/2011	4:31:22 PM	BCl3 MFC set to  0.000000
5/20/2011	4:31:22 PM	PHl3 MFC set to  0.000000
5/20/2011	4:31:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:31:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:31:23 PM	Tube furnace set to 0
5/20/2011	4:31:56 PM	Helium valve closed
5/20/2011	4:31:56 PM	H2 valve closed
5/20/2011	4:31:56 PM	BCl3 valve closed
5/20/2011	4:31:56 PM	PH3 valve closed
5/20/2011	4:31:56 PM	SiCl4 pre valve closed
5/20/2011	4:31:56 PM	SiCl4 post valve closed
5/20/2011	4:31:56 PM	Bubbler valve closed
5/20/2011	4:31:56 PM	Main Vac valve opened
5/20/2011	4:31:56 PM	Bypass valve opened
5/20/2011	4:31:56 PM	Helium MFC set to  0.000000
5/20/2011	4:31:56 PM	H2 MFC set to  0.000000
5/20/2011	4:31:56 PM	BCl3 MFC set to  0.000000
5/20/2011	4:31:56 PM	PHl3 MFC set to  0.000000
5/20/2011	4:31:56 PM	SiCl4 MFC set to  0.000000
5/20/2011	4:31:56 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	4:31:56 PM	Tube furnace set to 0
5/20/2011	4:31:56 PM	Run finished at 4:31 PM
5/20/2011	4:31:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	5:44:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	5:44:59 PM	Recipe started at 5:44 PM
5/20/2011	5:44:59 PM	Helium valve closed
5/20/2011	5:44:59 PM	H2 valve closed
5/20/2011	5:44:59 PM	BCl3 valve closed
5/20/2011	5:44:59 PM	PH3 valve closed
5/20/2011	5:44:59 PM	SiCl4 pre valve closed
5/20/2011	5:44:59 PM	SiCl4 post valve closed
5/20/2011	5:44:59 PM	Main Vac valve closed
5/20/2011	5:44:59 PM	Bubbler valve closed
5/20/2011	5:44:59 PM	Bypass valve opened
5/20/2011	5:44:59 PM	Helium MFC set to  0.000000
5/20/2011	5:44:59 PM	H2 MFC set to  0.000000
5/20/2011	5:44:59 PM	BCl3 MFC set to  0.000000
5/20/2011	5:44:59 PM	PHl3 MFC set to  0.000000
5/20/2011	5:44:59 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:44:59 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:44:59 PM	Tube furnace set to 0
5/20/2011	5:44:59 PM	Helium valve closed
5/20/2011	5:44:59 PM	H2 valve closed
5/20/2011	5:44:59 PM	BCl3 valve closed
5/20/2011	5:44:59 PM	PH3 valve closed
5/20/2011	5:44:59 PM	SiCl4 pre valve closed
5/20/2011	5:44:59 PM	SiCl4 post valve closed
5/20/2011	5:44:59 PM	Bubbler valve closed
5/20/2011	5:44:59 PM	Main Vac valve opened
5/20/2011	5:44:59 PM	Bypass valve opened
5/20/2011	5:44:59 PM	Helium MFC set to  0.000000
5/20/2011	5:44:59 PM	H2 MFC set to  0.000000
5/20/2011	5:44:59 PM	BCl3 MFC set to  0.000000
5/20/2011	5:44:59 PM	PHl3 MFC set to  0.000000
5/20/2011	5:44:59 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:44:59 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:44:59 PM	Tube furnace set to 0
5/20/2011	5:45:59 PM	H2 valve closed
5/20/2011	5:45:59 PM	BCl3 valve closed
5/20/2011	5:45:59 PM	PH3 valve closed
5/20/2011	5:45:59 PM	SiCl4 pre valve closed
5/20/2011	5:45:59 PM	SiCl4 post valve closed
5/20/2011	5:45:59 PM	Bubbler valve closed
5/20/2011	5:45:59 PM	Helium valve opened
5/20/2011	5:45:59 PM	Main Vac valve opened
5/20/2011	5:45:59 PM	Bypass valve opened
5/20/2011	5:45:59 PM	Helium MFC set to  100.000000
5/20/2011	5:45:59 PM	H2 MFC set to  0.000000
5/20/2011	5:45:59 PM	BCl3 MFC set to  0.000000
5/20/2011	5:45:59 PM	PHl3 MFC set to  0.000000
5/20/2011	5:45:59 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:45:59 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:45:59 PM	Tube furnace set to 0
5/20/2011	5:46:59 PM	Helium valve closed
5/20/2011	5:46:59 PM	H2 valve closed
5/20/2011	5:47:00 PM	BCl3 valve closed
5/20/2011	5:47:00 PM	PH3 valve closed
5/20/2011	5:47:00 PM	SiCl4 pre valve closed
5/20/2011	5:47:00 PM	SiCl4 post valve closed
5/20/2011	5:47:00 PM	Bubbler valve closed
5/20/2011	5:47:00 PM	Main Vac valve opened
5/20/2011	5:47:00 PM	Bypass valve opened
5/20/2011	5:47:00 PM	Helium MFC set to  0.000000
5/20/2011	5:47:00 PM	H2 MFC set to  0.000000
5/20/2011	5:47:00 PM	BCl3 MFC set to  0.000000
5/20/2011	5:47:00 PM	PHl3 MFC set to  0.000000
5/20/2011	5:47:00 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:47:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:47:00 PM	Tube furnace set to 0
5/20/2011	5:48:00 PM	H2 valve closed
5/20/2011	5:48:00 PM	BCl3 valve closed
5/20/2011	5:48:00 PM	PH3 valve closed
5/20/2011	5:48:00 PM	SiCl4 pre valve closed
5/20/2011	5:48:00 PM	SiCl4 post valve closed
5/20/2011	5:48:00 PM	Bubbler valve closed
5/20/2011	5:48:00 PM	Helium valve opened
5/20/2011	5:48:00 PM	Main Vac valve opened
5/20/2011	5:48:00 PM	Bypass valve opened
5/20/2011	5:48:00 PM	Helium MFC set to  100.000000
5/20/2011	5:48:00 PM	H2 MFC set to  0.000000
5/20/2011	5:48:00 PM	BCl3 MFC set to  0.000000
5/20/2011	5:48:00 PM	PHl3 MFC set to  0.000000
5/20/2011	5:48:00 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:48:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:48:00 PM	Tube furnace set to 0
5/20/2011	5:49:00 PM	Helium valve closed
5/20/2011	5:49:00 PM	H2 valve closed
5/20/2011	5:49:00 PM	BCl3 valve closed
5/20/2011	5:49:00 PM	PH3 valve closed
5/20/2011	5:49:00 PM	SiCl4 pre valve closed
5/20/2011	5:49:00 PM	SiCl4 post valve closed
5/20/2011	5:49:00 PM	Bubbler valve closed
5/20/2011	5:49:00 PM	Main Vac valve opened
5/20/2011	5:49:00 PM	Bypass valve opened
5/20/2011	5:49:00 PM	Helium MFC set to  0.000000
5/20/2011	5:49:00 PM	H2 MFC set to  0.000000
5/20/2011	5:49:00 PM	BCl3 MFC set to  0.000000
5/20/2011	5:49:00 PM	PHl3 MFC set to  0.000000
5/20/2011	5:49:00 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:49:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:49:00 PM	Tube furnace set to 0
5/20/2011	5:50:00 PM	H2 valve closed
5/20/2011	5:50:00 PM	BCl3 valve closed
5/20/2011	5:50:00 PM	PH3 valve closed
5/20/2011	5:50:00 PM	SiCl4 pre valve closed
5/20/2011	5:50:00 PM	SiCl4 post valve closed
5/20/2011	5:50:00 PM	Bubbler valve closed
5/20/2011	5:50:00 PM	Helium valve opened
5/20/2011	5:50:00 PM	Main Vac valve opened
5/20/2011	5:50:00 PM	Bypass valve opened
5/20/2011	5:50:00 PM	Helium MFC set to  100.000000
5/20/2011	5:50:00 PM	H2 MFC set to  0.000000
5/20/2011	5:50:00 PM	BCl3 MFC set to  0.000000
5/20/2011	5:50:00 PM	PHl3 MFC set to  0.000000
5/20/2011	5:50:00 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:50:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:50:00 PM	Tube furnace set to 0
5/20/2011	5:51:00 PM	Helium valve closed
5/20/2011	5:51:00 PM	H2 valve closed
5/20/2011	5:51:00 PM	BCl3 valve closed
5/20/2011	5:51:00 PM	PH3 valve closed
5/20/2011	5:51:00 PM	SiCl4 pre valve closed
5/20/2011	5:51:00 PM	SiCl4 post valve closed
5/20/2011	5:51:00 PM	Bubbler valve closed
5/20/2011	5:51:00 PM	Main Vac valve opened
5/20/2011	5:51:00 PM	Bypass valve opened
5/20/2011	5:51:00 PM	Helium MFC set to  0.000000
5/20/2011	5:51:00 PM	H2 MFC set to  0.000000
5/20/2011	5:51:00 PM	BCl3 MFC set to  0.000000
5/20/2011	5:51:00 PM	PHl3 MFC set to  0.000000
5/20/2011	5:51:00 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:51:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:51:00 PM	Tube furnace set to 0
5/20/2011	5:52:01 PM	H2 valve closed
5/20/2011	5:52:01 PM	BCl3 valve closed
5/20/2011	5:52:01 PM	PH3 valve closed
5/20/2011	5:52:01 PM	SiCl4 pre valve closed
5/20/2011	5:52:01 PM	SiCl4 post valve closed
5/20/2011	5:52:01 PM	Bubbler valve closed
5/20/2011	5:52:01 PM	Helium valve opened
5/20/2011	5:52:01 PM	Main Vac valve opened
5/20/2011	5:52:01 PM	Bypass valve opened
5/20/2011	5:52:01 PM	Helium MFC set to  100.000000
5/20/2011	5:52:01 PM	H2 MFC set to  0.000000
5/20/2011	5:52:01 PM	BCl3 MFC set to  0.000000
5/20/2011	5:52:01 PM	PHl3 MFC set to  0.000000
5/20/2011	5:52:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:52:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:52:01 PM	Tube furnace set to 0
5/20/2011	5:53:01 PM	Helium valve closed
5/20/2011	5:53:01 PM	H2 valve closed
5/20/2011	5:53:01 PM	BCl3 valve closed
5/20/2011	5:53:01 PM	PH3 valve closed
5/20/2011	5:53:01 PM	SiCl4 pre valve closed
5/20/2011	5:53:01 PM	SiCl4 post valve closed
5/20/2011	5:53:01 PM	Bubbler valve closed
5/20/2011	5:53:01 PM	Main Vac valve opened
5/20/2011	5:53:01 PM	Bypass valve opened
5/20/2011	5:53:01 PM	Helium MFC set to  0.000000
5/20/2011	5:53:01 PM	H2 MFC set to  0.000000
5/20/2011	5:53:01 PM	BCl3 MFC set to  0.000000
5/20/2011	5:53:01 PM	PHl3 MFC set to  0.000000
5/20/2011	5:53:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:53:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:53:01 PM	Tube furnace set to 0
5/20/2011	5:54:01 PM	H2 valve closed
5/20/2011	5:54:01 PM	BCl3 valve closed
5/20/2011	5:54:01 PM	PH3 valve closed
5/20/2011	5:54:01 PM	SiCl4 pre valve closed
5/20/2011	5:54:01 PM	SiCl4 post valve closed
5/20/2011	5:54:01 PM	Bubbler valve closed
5/20/2011	5:54:01 PM	Helium valve opened
5/20/2011	5:54:01 PM	Main Vac valve opened
5/20/2011	5:54:01 PM	Bypass valve opened
5/20/2011	5:54:01 PM	Helium MFC set to  100.000000
5/20/2011	5:54:01 PM	H2 MFC set to  0.000000
5/20/2011	5:54:01 PM	BCl3 MFC set to  0.000000
5/20/2011	5:54:01 PM	PHl3 MFC set to  0.000000
5/20/2011	5:54:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:54:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:54:01 PM	Tube furnace set to 0
5/20/2011	5:55:01 PM	Helium valve closed
5/20/2011	5:55:01 PM	H2 valve closed
5/20/2011	5:55:01 PM	BCl3 valve closed
5/20/2011	5:55:01 PM	PH3 valve closed
5/20/2011	5:55:01 PM	SiCl4 pre valve closed
5/20/2011	5:55:01 PM	SiCl4 post valve closed
5/20/2011	5:55:01 PM	Bubbler valve closed
5/20/2011	5:55:01 PM	Main Vac valve opened
5/20/2011	5:55:01 PM	Bypass valve opened
5/20/2011	5:55:01 PM	Helium MFC set to  0.000000
5/20/2011	5:55:01 PM	H2 MFC set to  0.000000
5/20/2011	5:55:01 PM	BCl3 MFC set to  0.000000
5/20/2011	5:55:01 PM	PHl3 MFC set to  0.000000
5/20/2011	5:55:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:55:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:55:01 PM	Tube furnace set to 0
5/20/2011	5:56:01 PM	H2 valve closed
5/20/2011	5:56:01 PM	BCl3 valve closed
5/20/2011	5:56:01 PM	PH3 valve closed
5/20/2011	5:56:01 PM	SiCl4 pre valve closed
5/20/2011	5:56:01 PM	SiCl4 post valve closed
5/20/2011	5:56:01 PM	Bubbler valve closed
5/20/2011	5:56:01 PM	Helium valve opened
5/20/2011	5:56:01 PM	Main Vac valve opened
5/20/2011	5:56:01 PM	Bypass valve opened
5/20/2011	5:56:01 PM	Helium MFC set to  100.000000
5/20/2011	5:56:01 PM	H2 MFC set to  0.000000
5/20/2011	5:56:01 PM	BCl3 MFC set to  0.000000
5/20/2011	5:56:01 PM	PHl3 MFC set to  0.000000
5/20/2011	5:56:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:56:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:56:02 PM	Tube furnace set to 0
5/20/2011	5:57:02 PM	Helium valve closed
5/20/2011	5:57:02 PM	H2 valve closed
5/20/2011	5:57:02 PM	BCl3 valve closed
5/20/2011	5:57:02 PM	PH3 valve closed
5/20/2011	5:57:02 PM	SiCl4 pre valve closed
5/20/2011	5:57:02 PM	SiCl4 post valve closed
5/20/2011	5:57:02 PM	Bubbler valve closed
5/20/2011	5:57:02 PM	Main Vac valve opened
5/20/2011	5:57:02 PM	Bypass valve opened
5/20/2011	5:57:02 PM	Helium MFC set to  0.000000
5/20/2011	5:57:02 PM	H2 MFC set to  0.000000
5/20/2011	5:57:02 PM	BCl3 MFC set to  0.000000
5/20/2011	5:57:02 PM	PHl3 MFC set to  0.000000
5/20/2011	5:57:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:57:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:57:02 PM	Tube furnace set to 0
5/20/2011	5:58:02 PM	H2 valve closed
5/20/2011	5:58:02 PM	BCl3 valve closed
5/20/2011	5:58:02 PM	PH3 valve closed
5/20/2011	5:58:02 PM	SiCl4 pre valve closed
5/20/2011	5:58:02 PM	SiCl4 post valve closed
5/20/2011	5:58:02 PM	Bubbler valve closed
5/20/2011	5:58:02 PM	Helium valve opened
5/20/2011	5:58:02 PM	Main Vac valve opened
5/20/2011	5:58:02 PM	Bypass valve opened
5/20/2011	5:58:02 PM	Helium MFC set to  100.000000
5/20/2011	5:58:02 PM	H2 MFC set to  0.000000
5/20/2011	5:58:02 PM	BCl3 MFC set to  0.000000
5/20/2011	5:58:02 PM	PHl3 MFC set to  0.000000
5/20/2011	5:58:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:58:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:58:02 PM	Tube furnace set to 0
5/20/2011	5:59:02 PM	Helium valve closed
5/20/2011	5:59:02 PM	H2 valve closed
5/20/2011	5:59:02 PM	BCl3 valve closed
5/20/2011	5:59:02 PM	PH3 valve closed
5/20/2011	5:59:02 PM	SiCl4 pre valve closed
5/20/2011	5:59:02 PM	SiCl4 post valve closed
5/20/2011	5:59:02 PM	Bubbler valve closed
5/20/2011	5:59:02 PM	Main Vac valve opened
5/20/2011	5:59:02 PM	Bypass valve opened
5/20/2011	5:59:02 PM	Helium MFC set to  0.000000
5/20/2011	5:59:02 PM	H2 MFC set to  0.000000
5/20/2011	5:59:02 PM	BCl3 MFC set to  0.000000
5/20/2011	5:59:02 PM	PHl3 MFC set to  0.000000
5/20/2011	5:59:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	5:59:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	5:59:02 PM	Tube furnace set to 0
5/20/2011	6:00:02 PM	H2 valve closed
5/20/2011	6:00:02 PM	BCl3 valve closed
5/20/2011	6:00:02 PM	PH3 valve closed
5/20/2011	6:00:02 PM	SiCl4 pre valve closed
5/20/2011	6:00:02 PM	SiCl4 post valve closed
5/20/2011	6:00:02 PM	Bubbler valve closed
5/20/2011	6:00:02 PM	Helium valve opened
5/20/2011	6:00:02 PM	Main Vac valve opened
5/20/2011	6:00:02 PM	Bypass valve opened
5/20/2011	6:00:02 PM	Helium MFC set to  100.000000
5/20/2011	6:00:02 PM	H2 MFC set to  0.000000
5/20/2011	6:00:02 PM	BCl3 MFC set to  0.000000
5/20/2011	6:00:02 PM	PHl3 MFC set to  0.000000
5/20/2011	6:00:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:00:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:00:02 PM	Tube furnace set to 0
5/20/2011	6:01:02 PM	Helium valve closed
5/20/2011	6:01:02 PM	H2 valve closed
5/20/2011	6:01:02 PM	BCl3 valve closed
5/20/2011	6:01:02 PM	PH3 valve closed
5/20/2011	6:01:02 PM	SiCl4 pre valve closed
5/20/2011	6:01:02 PM	SiCl4 post valve closed
5/20/2011	6:01:02 PM	Bubbler valve closed
5/20/2011	6:01:02 PM	Main Vac valve opened
5/20/2011	6:01:02 PM	Bypass valve opened
5/20/2011	6:01:02 PM	Helium MFC set to  0.000000
5/20/2011	6:01:02 PM	H2 MFC set to  0.000000
5/20/2011	6:01:02 PM	BCl3 MFC set to  0.000000
5/20/2011	6:01:02 PM	PHl3 MFC set to  0.000000
5/20/2011	6:01:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:01:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:01:03 PM	Tube furnace set to 0
5/20/2011	6:02:03 PM	H2 valve closed
5/20/2011	6:02:03 PM	BCl3 valve closed
5/20/2011	6:02:03 PM	PH3 valve closed
5/20/2011	6:02:03 PM	SiCl4 pre valve closed
5/20/2011	6:02:03 PM	SiCl4 post valve closed
5/20/2011	6:02:03 PM	Bubbler valve closed
5/20/2011	6:02:03 PM	Helium valve opened
5/20/2011	6:02:03 PM	Main Vac valve opened
5/20/2011	6:02:03 PM	Bypass valve opened
5/20/2011	6:02:03 PM	Helium MFC set to  100.000000
5/20/2011	6:02:03 PM	H2 MFC set to  0.000000
5/20/2011	6:02:03 PM	BCl3 MFC set to  0.000000
5/20/2011	6:02:03 PM	PHl3 MFC set to  0.000000
5/20/2011	6:02:03 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:02:03 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:02:03 PM	Tube furnace set to 0
5/20/2011	6:03:03 PM	Helium valve closed
5/20/2011	6:03:03 PM	H2 valve closed
5/20/2011	6:03:03 PM	BCl3 valve closed
5/20/2011	6:03:03 PM	PH3 valve closed
5/20/2011	6:03:03 PM	SiCl4 pre valve closed
5/20/2011	6:03:03 PM	SiCl4 post valve closed
5/20/2011	6:03:03 PM	Bubbler valve closed
5/20/2011	6:03:03 PM	Main Vac valve opened
5/20/2011	6:03:03 PM	Bypass valve opened
5/20/2011	6:03:03 PM	Helium MFC set to  0.000000
5/20/2011	6:03:03 PM	H2 MFC set to  0.000000
5/20/2011	6:03:03 PM	BCl3 MFC set to  0.000000
5/20/2011	6:03:03 PM	PHl3 MFC set to  0.000000
5/20/2011	6:03:03 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:03:03 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:03:03 PM	Tube furnace set to 0
5/20/2011	6:04:03 PM	H2 valve closed
5/20/2011	6:04:03 PM	BCl3 valve closed
5/20/2011	6:04:03 PM	PH3 valve closed
5/20/2011	6:04:03 PM	SiCl4 pre valve closed
5/20/2011	6:04:03 PM	SiCl4 post valve closed
5/20/2011	6:04:03 PM	Bubbler valve closed
5/20/2011	6:04:03 PM	Helium valve opened
5/20/2011	6:04:03 PM	Main Vac valve opened
5/20/2011	6:04:03 PM	Bypass valve opened
5/20/2011	6:04:03 PM	Helium MFC set to  100.000000
5/20/2011	6:04:03 PM	H2 MFC set to  0.000000
5/20/2011	6:04:03 PM	BCl3 MFC set to  0.000000
5/20/2011	6:04:03 PM	PHl3 MFC set to  0.000000
5/20/2011	6:04:03 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:04:03 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:04:03 PM	Tube furnace set to 0
5/20/2011	6:05:03 PM	Helium valve closed
5/20/2011	6:05:03 PM	H2 valve closed
5/20/2011	6:05:03 PM	BCl3 valve closed
5/20/2011	6:05:03 PM	PH3 valve closed
5/20/2011	6:05:03 PM	SiCl4 pre valve closed
5/20/2011	6:05:03 PM	SiCl4 post valve closed
5/20/2011	6:05:03 PM	Bubbler valve closed
5/20/2011	6:05:03 PM	Main Vac valve opened
5/20/2011	6:05:03 PM	Bypass valve opened
5/20/2011	6:05:03 PM	Helium MFC set to  0.000000
5/20/2011	6:05:03 PM	H2 MFC set to  0.000000
5/20/2011	6:05:03 PM	BCl3 MFC set to  0.000000
5/20/2011	6:05:03 PM	PHl3 MFC set to  0.000000
5/20/2011	6:05:03 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:05:03 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:05:03 PM	Tube furnace set to 0
5/20/2011	6:05:04 PM	Run finished at 6:05 PM
5/20/2011	6:05:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	6:07:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	6:07:27 PM	Recipe started at 6:07 PM
5/20/2011	6:07:27 PM	Helium valve closed
5/20/2011	6:07:27 PM	H2 valve closed
5/20/2011	6:07:27 PM	BCl3 valve closed
5/20/2011	6:07:27 PM	PH3 valve closed
5/20/2011	6:07:27 PM	SiCl4 pre valve closed
5/20/2011	6:07:27 PM	SiCl4 post valve closed
5/20/2011	6:07:27 PM	Main Vac valve closed
5/20/2011	6:07:27 PM	Bubbler valve closed
5/20/2011	6:07:27 PM	Bypass valve opened
5/20/2011	6:07:27 PM	Helium MFC set to  0.000000
5/20/2011	6:07:27 PM	H2 MFC set to  0.000000
5/20/2011	6:07:27 PM	BCl3 MFC set to  0.000000
5/20/2011	6:07:27 PM	PHl3 MFC set to  0.000000
5/20/2011	6:07:27 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:07:27 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:07:27 PM	Tube furnace set to 0
5/20/2011	6:07:27 PM	Helium valve closed
5/20/2011	6:07:27 PM	H2 valve closed
5/20/2011	6:07:27 PM	BCl3 valve closed
5/20/2011	6:07:27 PM	PH3 valve closed
5/20/2011	6:07:27 PM	SiCl4 pre valve closed
5/20/2011	6:07:27 PM	SiCl4 post valve closed
5/20/2011	6:07:27 PM	Bubbler valve closed
5/20/2011	6:07:27 PM	Main Vac valve opened
5/20/2011	6:07:27 PM	Bypass valve opened
5/20/2011	6:07:27 PM	Helium MFC set to  0.000000
5/20/2011	6:07:27 PM	H2 MFC set to  0.000000
5/20/2011	6:07:27 PM	BCl3 MFC set to  0.000000
5/20/2011	6:07:27 PM	PHl3 MFC set to  0.000000
5/20/2011	6:07:27 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:07:27 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:07:27 PM	Tube furnace set to 0
5/20/2011	6:08:27 PM	H2 valve closed
5/20/2011	6:08:27 PM	BCl3 valve closed
5/20/2011	6:08:27 PM	PH3 valve closed
5/20/2011	6:08:27 PM	SiCl4 pre valve closed
5/20/2011	6:08:27 PM	SiCl4 post valve closed
5/20/2011	6:08:27 PM	Bubbler valve closed
5/20/2011	6:08:27 PM	Helium valve opened
5/20/2011	6:08:27 PM	Main Vac valve opened
5/20/2011	6:08:27 PM	Bypass valve opened
5/20/2011	6:08:27 PM	Helium MFC set to  100.000000
5/20/2011	6:08:27 PM	H2 MFC set to  0.000000
5/20/2011	6:08:27 PM	BCl3 MFC set to  0.000000
5/20/2011	6:08:27 PM	PHl3 MFC set to  0.000000
5/20/2011	6:08:27 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:08:27 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:08:28 PM	Tube furnace set to 0
5/20/2011	6:09:28 PM	Helium valve closed
5/20/2011	6:09:28 PM	H2 valve closed
5/20/2011	6:09:28 PM	BCl3 valve closed
5/20/2011	6:09:28 PM	PH3 valve closed
5/20/2011	6:09:28 PM	SiCl4 pre valve closed
5/20/2011	6:09:28 PM	SiCl4 post valve closed
5/20/2011	6:09:28 PM	Bubbler valve closed
5/20/2011	6:09:28 PM	Main Vac valve opened
5/20/2011	6:09:28 PM	Bypass valve opened
5/20/2011	6:09:28 PM	Helium MFC set to  0.000000
5/20/2011	6:09:28 PM	H2 MFC set to  0.000000
5/20/2011	6:09:28 PM	BCl3 MFC set to  0.000000
5/20/2011	6:09:28 PM	PHl3 MFC set to  0.000000
5/20/2011	6:09:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:09:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:09:28 PM	Tube furnace set to 0
5/20/2011	6:10:28 PM	H2 valve closed
5/20/2011	6:10:28 PM	BCl3 valve closed
5/20/2011	6:10:28 PM	PH3 valve closed
5/20/2011	6:10:28 PM	SiCl4 pre valve closed
5/20/2011	6:10:28 PM	SiCl4 post valve closed
5/20/2011	6:10:28 PM	Bubbler valve closed
5/20/2011	6:10:28 PM	Helium valve opened
5/20/2011	6:10:28 PM	Main Vac valve opened
5/20/2011	6:10:28 PM	Bypass valve opened
5/20/2011	6:10:28 PM	Helium MFC set to  100.000000
5/20/2011	6:10:28 PM	H2 MFC set to  0.000000
5/20/2011	6:10:28 PM	BCl3 MFC set to  0.000000
5/20/2011	6:10:28 PM	PHl3 MFC set to  0.000000
5/20/2011	6:10:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:10:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:10:28 PM	Tube furnace set to 0
5/20/2011	6:11:28 PM	Helium valve closed
5/20/2011	6:11:28 PM	H2 valve closed
5/20/2011	6:11:28 PM	BCl3 valve closed
5/20/2011	6:11:28 PM	PH3 valve closed
5/20/2011	6:11:28 PM	SiCl4 pre valve closed
5/20/2011	6:11:28 PM	SiCl4 post valve closed
5/20/2011	6:11:28 PM	Bubbler valve closed
5/20/2011	6:11:28 PM	Main Vac valve opened
5/20/2011	6:11:28 PM	Bypass valve opened
5/20/2011	6:11:28 PM	Helium MFC set to  0.000000
5/20/2011	6:11:28 PM	H2 MFC set to  0.000000
5/20/2011	6:11:28 PM	BCl3 MFC set to  0.000000
5/20/2011	6:11:28 PM	PHl3 MFC set to  0.000000
5/20/2011	6:11:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:11:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:11:28 PM	Tube furnace set to 0
5/20/2011	6:12:28 PM	H2 valve closed
5/20/2011	6:12:28 PM	BCl3 valve closed
5/20/2011	6:12:28 PM	PH3 valve closed
5/20/2011	6:12:28 PM	SiCl4 pre valve closed
5/20/2011	6:12:28 PM	SiCl4 post valve closed
5/20/2011	6:12:28 PM	Bubbler valve closed
5/20/2011	6:12:28 PM	Helium valve opened
5/20/2011	6:12:28 PM	Main Vac valve opened
5/20/2011	6:12:28 PM	Bypass valve opened
5/20/2011	6:12:28 PM	Helium MFC set to  100.000000
5/20/2011	6:12:28 PM	H2 MFC set to  0.000000
5/20/2011	6:12:28 PM	BCl3 MFC set to  0.000000
5/20/2011	6:12:28 PM	PHl3 MFC set to  0.000000
5/20/2011	6:12:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:12:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:12:28 PM	Tube furnace set to 0
5/20/2011	6:13:28 PM	Helium valve closed
5/20/2011	6:13:28 PM	H2 valve closed
5/20/2011	6:13:28 PM	BCl3 valve closed
5/20/2011	6:13:28 PM	PH3 valve closed
5/20/2011	6:13:28 PM	SiCl4 pre valve closed
5/20/2011	6:13:28 PM	SiCl4 post valve closed
5/20/2011	6:13:28 PM	Bubbler valve closed
5/20/2011	6:13:28 PM	Main Vac valve opened
5/20/2011	6:13:28 PM	Bypass valve opened
5/20/2011	6:13:28 PM	Helium MFC set to  0.000000
5/20/2011	6:13:28 PM	H2 MFC set to  0.000000
5/20/2011	6:13:28 PM	BCl3 MFC set to  0.000000
5/20/2011	6:13:28 PM	PHl3 MFC set to  0.000000
5/20/2011	6:13:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:13:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:13:29 PM	Tube furnace set to 0
5/20/2011	6:14:29 PM	H2 valve closed
5/20/2011	6:14:29 PM	BCl3 valve closed
5/20/2011	6:14:29 PM	PH3 valve closed
5/20/2011	6:14:29 PM	SiCl4 pre valve closed
5/20/2011	6:14:29 PM	SiCl4 post valve closed
5/20/2011	6:14:29 PM	Bubbler valve closed
5/20/2011	6:14:29 PM	Helium valve opened
5/20/2011	6:14:29 PM	Main Vac valve opened
5/20/2011	6:14:29 PM	Bypass valve opened
5/20/2011	6:14:29 PM	Helium MFC set to  100.000000
5/20/2011	6:14:29 PM	H2 MFC set to  0.000000
5/20/2011	6:14:29 PM	BCl3 MFC set to  0.000000
5/20/2011	6:14:29 PM	PHl3 MFC set to  0.000000
5/20/2011	6:14:29 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:14:29 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:14:29 PM	Tube furnace set to 0
5/20/2011	6:15:29 PM	Helium valve closed
5/20/2011	6:15:29 PM	H2 valve closed
5/20/2011	6:15:29 PM	BCl3 valve closed
5/20/2011	6:15:29 PM	PH3 valve closed
5/20/2011	6:15:29 PM	SiCl4 pre valve closed
5/20/2011	6:15:29 PM	SiCl4 post valve closed
5/20/2011	6:15:29 PM	Bubbler valve closed
5/20/2011	6:15:29 PM	Main Vac valve opened
5/20/2011	6:15:29 PM	Bypass valve opened
5/20/2011	6:15:29 PM	Helium MFC set to  0.000000
5/20/2011	6:15:29 PM	H2 MFC set to  0.000000
5/20/2011	6:15:29 PM	BCl3 MFC set to  0.000000
5/20/2011	6:15:29 PM	PHl3 MFC set to  0.000000
5/20/2011	6:15:29 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:15:29 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:15:29 PM	Tube furnace set to 0
5/20/2011	6:16:29 PM	H2 valve closed
5/20/2011	6:16:29 PM	BCl3 valve closed
5/20/2011	6:16:29 PM	PH3 valve closed
5/20/2011	6:16:29 PM	SiCl4 pre valve closed
5/20/2011	6:16:29 PM	SiCl4 post valve closed
5/20/2011	6:16:29 PM	Bubbler valve closed
5/20/2011	6:16:29 PM	Helium valve opened
5/20/2011	6:16:29 PM	Main Vac valve opened
5/20/2011	6:16:29 PM	Bypass valve opened
5/20/2011	6:16:29 PM	Helium MFC set to  100.000000
5/20/2011	6:16:29 PM	H2 MFC set to  0.000000
5/20/2011	6:16:29 PM	BCl3 MFC set to  0.000000
5/20/2011	6:16:29 PM	PHl3 MFC set to  0.000000
5/20/2011	6:16:29 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:16:29 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:16:29 PM	Tube furnace set to 0
5/20/2011	6:17:29 PM	Helium valve closed
5/20/2011	6:17:29 PM	H2 valve closed
5/20/2011	6:17:29 PM	BCl3 valve closed
5/20/2011	6:17:29 PM	PH3 valve closed
5/20/2011	6:17:29 PM	SiCl4 pre valve closed
5/20/2011	6:17:29 PM	SiCl4 post valve closed
5/20/2011	6:17:29 PM	Bubbler valve closed
5/20/2011	6:17:29 PM	Main Vac valve opened
5/20/2011	6:17:29 PM	Bypass valve opened
5/20/2011	6:17:29 PM	Helium MFC set to  0.000000
5/20/2011	6:17:29 PM	H2 MFC set to  0.000000
5/20/2011	6:17:29 PM	BCl3 MFC set to  0.000000
5/20/2011	6:17:29 PM	PHl3 MFC set to  0.000000
5/20/2011	6:17:29 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:17:29 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:17:29 PM	Tube furnace set to 0
5/20/2011	6:18:29 PM	H2 valve closed
5/20/2011	6:18:29 PM	BCl3 valve closed
5/20/2011	6:18:29 PM	PH3 valve closed
5/20/2011	6:18:29 PM	SiCl4 pre valve closed
5/20/2011	6:18:29 PM	SiCl4 post valve closed
5/20/2011	6:18:29 PM	Bubbler valve closed
5/20/2011	6:18:29 PM	Helium valve opened
5/20/2011	6:18:29 PM	Main Vac valve opened
5/20/2011	6:18:29 PM	Bypass valve opened
5/20/2011	6:18:29 PM	Helium MFC set to  100.000000
5/20/2011	6:18:29 PM	H2 MFC set to  0.000000
5/20/2011	6:18:29 PM	BCl3 MFC set to  0.000000
5/20/2011	6:18:29 PM	PHl3 MFC set to  0.000000
5/20/2011	6:18:29 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:18:29 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:18:30 PM	Tube furnace set to 0
5/20/2011	6:19:30 PM	Helium valve closed
5/20/2011	6:19:30 PM	H2 valve closed
5/20/2011	6:19:30 PM	BCl3 valve closed
5/20/2011	6:19:30 PM	PH3 valve closed
5/20/2011	6:19:30 PM	SiCl4 pre valve closed
5/20/2011	6:19:30 PM	SiCl4 post valve closed
5/20/2011	6:19:30 PM	Bubbler valve closed
5/20/2011	6:19:30 PM	Main Vac valve opened
5/20/2011	6:19:30 PM	Bypass valve opened
5/20/2011	6:19:30 PM	Helium MFC set to  0.000000
5/20/2011	6:19:30 PM	H2 MFC set to  0.000000
5/20/2011	6:19:30 PM	BCl3 MFC set to  0.000000
5/20/2011	6:19:30 PM	PHl3 MFC set to  0.000000
5/20/2011	6:19:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:19:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:19:30 PM	Tube furnace set to 0
5/20/2011	6:20:30 PM	H2 valve closed
5/20/2011	6:20:30 PM	BCl3 valve closed
5/20/2011	6:20:30 PM	PH3 valve closed
5/20/2011	6:20:30 PM	SiCl4 pre valve closed
5/20/2011	6:20:30 PM	SiCl4 post valve closed
5/20/2011	6:20:30 PM	Bubbler valve closed
5/20/2011	6:20:30 PM	Helium valve opened
5/20/2011	6:20:30 PM	Main Vac valve opened
5/20/2011	6:20:30 PM	Bypass valve opened
5/20/2011	6:20:30 PM	Helium MFC set to  100.000000
5/20/2011	6:20:30 PM	H2 MFC set to  0.000000
5/20/2011	6:20:30 PM	BCl3 MFC set to  0.000000
5/20/2011	6:20:30 PM	PHl3 MFC set to  0.000000
5/20/2011	6:20:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:20:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:20:30 PM	Tube furnace set to 0
5/20/2011	6:21:30 PM	Helium valve closed
5/20/2011	6:21:30 PM	H2 valve closed
5/20/2011	6:21:30 PM	BCl3 valve closed
5/20/2011	6:21:30 PM	PH3 valve closed
5/20/2011	6:21:30 PM	SiCl4 pre valve closed
5/20/2011	6:21:30 PM	SiCl4 post valve closed
5/20/2011	6:21:30 PM	Bubbler valve closed
5/20/2011	6:21:30 PM	Main Vac valve opened
5/20/2011	6:21:30 PM	Bypass valve opened
5/20/2011	6:21:30 PM	Helium MFC set to  0.000000
5/20/2011	6:21:30 PM	H2 MFC set to  0.000000
5/20/2011	6:21:30 PM	BCl3 MFC set to  0.000000
5/20/2011	6:21:30 PM	PHl3 MFC set to  0.000000
5/20/2011	6:21:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:21:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:21:30 PM	Tube furnace set to 0
5/20/2011	6:22:30 PM	H2 valve closed
5/20/2011	6:22:30 PM	BCl3 valve closed
5/20/2011	6:22:30 PM	PH3 valve closed
5/20/2011	6:22:30 PM	SiCl4 pre valve closed
5/20/2011	6:22:30 PM	SiCl4 post valve closed
5/20/2011	6:22:30 PM	Bubbler valve closed
5/20/2011	6:22:30 PM	Helium valve opened
5/20/2011	6:22:30 PM	Main Vac valve opened
5/20/2011	6:22:30 PM	Bypass valve opened
5/20/2011	6:22:30 PM	Helium MFC set to  100.000000
5/20/2011	6:22:30 PM	H2 MFC set to  0.000000
5/20/2011	6:22:30 PM	BCl3 MFC set to  0.000000
5/20/2011	6:22:30 PM	PHl3 MFC set to  0.000000
5/20/2011	6:22:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:22:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:22:30 PM	Tube furnace set to 0
5/20/2011	6:23:30 PM	Helium valve closed
5/20/2011	6:23:30 PM	H2 valve closed
5/20/2011	6:23:30 PM	BCl3 valve closed
5/20/2011	6:23:30 PM	PH3 valve closed
5/20/2011	6:23:30 PM	SiCl4 pre valve closed
5/20/2011	6:23:30 PM	SiCl4 post valve closed
5/20/2011	6:23:30 PM	Bubbler valve closed
5/20/2011	6:23:30 PM	Main Vac valve opened
5/20/2011	6:23:30 PM	Bypass valve opened
5/20/2011	6:23:30 PM	Helium MFC set to  0.000000
5/20/2011	6:23:30 PM	H2 MFC set to  0.000000
5/20/2011	6:23:30 PM	BCl3 MFC set to  0.000000
5/20/2011	6:23:30 PM	PHl3 MFC set to  0.000000
5/20/2011	6:23:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:23:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:23:31 PM	Tube furnace set to 0
5/20/2011	6:24:31 PM	H2 valve closed
5/20/2011	6:24:31 PM	BCl3 valve closed
5/20/2011	6:24:31 PM	PH3 valve closed
5/20/2011	6:24:31 PM	SiCl4 pre valve closed
5/20/2011	6:24:31 PM	SiCl4 post valve closed
5/20/2011	6:24:31 PM	Bubbler valve closed
5/20/2011	6:24:31 PM	Helium valve opened
5/20/2011	6:24:31 PM	Main Vac valve opened
5/20/2011	6:24:31 PM	Bypass valve opened
5/20/2011	6:24:31 PM	Helium MFC set to  100.000000
5/20/2011	6:24:31 PM	H2 MFC set to  0.000000
5/20/2011	6:24:31 PM	BCl3 MFC set to  0.000000
5/20/2011	6:24:31 PM	PHl3 MFC set to  0.000000
5/20/2011	6:24:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:24:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:24:31 PM	Tube furnace set to 0
5/20/2011	6:25:31 PM	Helium valve closed
5/20/2011	6:25:31 PM	H2 valve closed
5/20/2011	6:25:31 PM	BCl3 valve closed
5/20/2011	6:25:31 PM	PH3 valve closed
5/20/2011	6:25:31 PM	SiCl4 pre valve closed
5/20/2011	6:25:31 PM	SiCl4 post valve closed
5/20/2011	6:25:31 PM	Bubbler valve closed
5/20/2011	6:25:31 PM	Main Vac valve opened
5/20/2011	6:25:31 PM	Bypass valve opened
5/20/2011	6:25:31 PM	Helium MFC set to  0.000000
5/20/2011	6:25:31 PM	H2 MFC set to  0.000000
5/20/2011	6:25:31 PM	BCl3 MFC set to  0.000000
5/20/2011	6:25:31 PM	PHl3 MFC set to  0.000000
5/20/2011	6:25:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:25:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:25:31 PM	Tube furnace set to 0
5/20/2011	6:26:31 PM	H2 valve closed
5/20/2011	6:26:31 PM	BCl3 valve closed
5/20/2011	6:26:31 PM	PH3 valve closed
5/20/2011	6:26:31 PM	SiCl4 pre valve closed
5/20/2011	6:26:31 PM	SiCl4 post valve closed
5/20/2011	6:26:31 PM	Bubbler valve closed
5/20/2011	6:26:31 PM	Helium valve opened
5/20/2011	6:26:31 PM	Main Vac valve opened
5/20/2011	6:26:31 PM	Bypass valve opened
5/20/2011	6:26:31 PM	Helium MFC set to  100.000000
5/20/2011	6:26:31 PM	H2 MFC set to  0.000000
5/20/2011	6:26:31 PM	BCl3 MFC set to  0.000000
5/20/2011	6:26:31 PM	PHl3 MFC set to  0.000000
5/20/2011	6:26:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:26:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:26:31 PM	Tube furnace set to 0
5/20/2011	6:26:58 PM	Run aborted at 6:26 PM
5/20/2011	6:26:58 PM	Helium valve closed
5/20/2011	6:26:58 PM	H2 valve closed
5/20/2011	6:26:58 PM	BCl3 valve closed
5/20/2011	6:26:58 PM	PH3 valve closed
5/20/2011	6:26:58 PM	SiCl4 pre valve closed
5/20/2011	6:26:58 PM	SiCl4 post valve closed
5/20/2011	6:26:58 PM	Bypass valve closed
5/20/2011	6:26:58 PM	Main Vac valve closed
5/20/2011	6:26:58 PM	Bubbler valve closed
5/20/2011	6:26:58 PM	Helium MFC set to  0.000000
5/20/2011	6:26:58 PM	H2 MFC set to  0.000000
5/20/2011	6:26:58 PM	BCl3 MFC set to  0.000000
5/20/2011	6:26:58 PM	PHl3 MFC set to  0.000000
5/20/2011	6:26:58 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:26:58 PM	Tube furnace set to 0
5/20/2011	6:26:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	6:27:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	6:27:01 PM	Recipe started at 6:27 PM
5/20/2011	6:27:01 PM	Helium valve closed
5/20/2011	6:27:01 PM	H2 valve closed
5/20/2011	6:27:01 PM	BCl3 valve closed
5/20/2011	6:27:01 PM	PH3 valve closed
5/20/2011	6:27:01 PM	SiCl4 pre valve closed
5/20/2011	6:27:01 PM	SiCl4 post valve closed
5/20/2011	6:27:01 PM	Main Vac valve closed
5/20/2011	6:27:01 PM	Bubbler valve closed
5/20/2011	6:27:01 PM	Bypass valve opened
5/20/2011	6:27:01 PM	Helium MFC set to  0.000000
5/20/2011	6:27:01 PM	H2 MFC set to  0.000000
5/20/2011	6:27:01 PM	BCl3 MFC set to  0.000000
5/20/2011	6:27:01 PM	PHl3 MFC set to  0.000000
5/20/2011	6:27:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:27:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:27:01 PM	Tube furnace set to 0
5/20/2011	6:27:01 PM	Helium valve closed
5/20/2011	6:27:01 PM	H2 valve closed
5/20/2011	6:27:01 PM	BCl3 valve closed
5/20/2011	6:27:01 PM	PH3 valve closed
5/20/2011	6:27:01 PM	SiCl4 pre valve closed
5/20/2011	6:27:01 PM	SiCl4 post valve closed
5/20/2011	6:27:01 PM	Bubbler valve closed
5/20/2011	6:27:01 PM	Main Vac valve opened
5/20/2011	6:27:01 PM	Bypass valve opened
5/20/2011	6:27:01 PM	Helium MFC set to  0.000000
5/20/2011	6:27:01 PM	H2 MFC set to  0.000000
5/20/2011	6:27:01 PM	BCl3 MFC set to  0.000000
5/20/2011	6:27:01 PM	PHl3 MFC set to  0.000000
5/20/2011	6:27:01 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:27:01 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:27:01 PM	Tube furnace set to 0
5/20/2011	6:27:02 PM	Run finished at 6:27 PM
5/20/2011	6:27:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	6:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	6:27:41 PM	Recipe started at 6:27 PM
5/20/2011	6:27:41 PM	Helium valve closed
5/20/2011	6:27:41 PM	H2 valve closed
5/20/2011	6:27:41 PM	BCl3 valve closed
5/20/2011	6:27:41 PM	PH3 valve closed
5/20/2011	6:27:41 PM	SiCl4 pre valve closed
5/20/2011	6:27:41 PM	SiCl4 post valve closed
5/20/2011	6:27:41 PM	Main Vac valve closed
5/20/2011	6:27:41 PM	Bypass valve closed
5/20/2011	6:27:41 PM	Bubbler valve closed
5/20/2011	6:27:41 PM	Helium MFC set to  0.000000
5/20/2011	6:27:41 PM	H2 MFC set to  0.000000
5/20/2011	6:27:41 PM	BCl3 MFC set to  0.000000
5/20/2011	6:27:41 PM	PHl3 MFC set to  0.000000
5/20/2011	6:27:41 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:27:41 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:27:42 PM	Tube furnace set to 0
5/20/2011	6:27:42 PM	Run finished at 6:27 PM
5/20/2011	6:27:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	6:27:51 PM	Recipe started at 6:27 PM
5/20/2011	6:27:51 PM	Helium valve closed
5/20/2011	6:27:51 PM	BCl3 valve closed
5/20/2011	6:27:51 PM	PH3 valve closed
5/20/2011	6:27:51 PM	SiCl4 pre valve closed
5/20/2011	6:27:51 PM	SiCl4 post valve closed
5/20/2011	6:27:51 PM	Main Vac valve closed
5/20/2011	6:27:51 PM	Bypass valve closed
5/20/2011	6:27:51 PM	Bubbler valve closed
5/20/2011	6:27:51 PM	H2 valve opened
5/20/2011	6:27:51 PM	Helium MFC set to  0.000000
5/20/2011	6:27:51 PM	H2 MFC set to  500.000000
5/20/2011	6:27:51 PM	BCl3 MFC set to  0.000000
5/20/2011	6:27:51 PM	PHl3 MFC set to  0.000000
5/20/2011	6:27:51 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:27:51 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:27:51 PM	Tube furnace set to 0
5/20/2011	6:29:10 PM	Helium valve closed
5/20/2011	6:29:10 PM	BCl3 valve closed
5/20/2011	6:29:10 PM	PH3 valve closed
5/20/2011	6:29:10 PM	SiCl4 pre valve closed
5/20/2011	6:29:10 PM	SiCl4 post valve closed
5/20/2011	6:29:10 PM	Main Vac valve closed
5/20/2011	6:29:10 PM	Bypass valve closed
5/20/2011	6:29:10 PM	H2 valve opened
5/20/2011	6:29:10 PM	Bubbler valve opened
5/20/2011	6:29:11 PM	Helium MFC set to  0.000000
5/20/2011	6:29:11 PM	H2 MFC set to  500.000000
5/20/2011	6:29:11 PM	BCl3 MFC set to  0.000000
5/20/2011	6:29:11 PM	PHl3 MFC set to  0.000000
5/20/2011	6:29:11 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:29:11 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:29:11 PM	Tube furnace set to 250
5/20/2011	6:49:11 PM	Helium valve closed
5/20/2011	6:49:11 PM	BCl3 valve closed
5/20/2011	6:49:11 PM	PH3 valve closed
5/20/2011	6:49:11 PM	SiCl4 pre valve closed
5/20/2011	6:49:11 PM	SiCl4 post valve closed
5/20/2011	6:49:11 PM	Main Vac valve closed
5/20/2011	6:49:11 PM	Bypass valve closed
5/20/2011	6:49:11 PM	H2 valve opened
5/20/2011	6:49:11 PM	Bubbler valve opened
5/20/2011	6:49:11 PM	Helium MFC set to  0.000000
5/20/2011	6:49:11 PM	H2 MFC set to  500.000000
5/20/2011	6:49:11 PM	BCl3 MFC set to  0.000000
5/20/2011	6:49:11 PM	PHl3 MFC set to  0.000000
5/20/2011	6:49:11 PM	SiCl4 MFC set to  0.000000
5/20/2011	6:49:11 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	6:49:11 PM	Tube furnace set to 1000
5/20/2011	7:09:11 PM	Helium valve closed
5/20/2011	7:09:11 PM	BCl3 valve closed
5/20/2011	7:09:11 PM	Main Vac valve closed
5/20/2011	7:09:11 PM	Bypass valve closed
5/20/2011	7:09:11 PM	H2 valve opened
5/20/2011	7:09:11 PM	PH3 valve opened
5/20/2011	7:09:11 PM	SiCl4 pre valve opened
5/20/2011	7:09:11 PM	SiCl4 post valve opened
5/20/2011	7:09:11 PM	Bubbler valve opened
5/20/2011	7:09:11 PM	Helium MFC set to  0.000000
5/20/2011	7:09:11 PM	H2 MFC set to  500.000000
5/20/2011	7:09:11 PM	BCl3 MFC set to  0.000000
5/20/2011	7:09:11 PM	PHl3 MFC set to  1.000000
5/20/2011	7:09:11 PM	SiCl4 MFC set to  75.000000
5/20/2011	7:09:11 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:09:11 PM	Tube furnace set to 1000
5/20/2011	7:25:11 PM	H2 valve closed
5/20/2011	7:25:11 PM	BCl3 valve closed
5/20/2011	7:25:11 PM	PH3 valve closed
5/20/2011	7:25:11 PM	SiCl4 pre valve closed
5/20/2011	7:25:11 PM	SiCl4 post valve closed
5/20/2011	7:25:11 PM	Main Vac valve closed
5/20/2011	7:25:11 PM	Bypass valve closed
5/20/2011	7:25:11 PM	Helium valve opened
5/20/2011	7:25:11 PM	Bubbler valve opened
5/20/2011	7:25:11 PM	Helium MFC set to  500.000000
5/20/2011	7:25:11 PM	H2 MFC set to  0.000000
5/20/2011	7:25:11 PM	BCl3 MFC set to  0.000000
5/20/2011	7:25:11 PM	PHl3 MFC set to  0.000000
5/20/2011	7:25:11 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:25:11 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:25:11 PM	Tube furnace set to 0
5/20/2011	7:45:11 PM	Helium valve closed
5/20/2011	7:45:11 PM	H2 valve closed
5/20/2011	7:45:11 PM	BCl3 valve closed
5/20/2011	7:45:11 PM	PH3 valve closed
5/20/2011	7:45:11 PM	SiCl4 pre valve closed
5/20/2011	7:45:11 PM	SiCl4 post valve closed
5/20/2011	7:45:11 PM	Main Vac valve closed
5/20/2011	7:45:11 PM	Bypass valve closed
5/20/2011	7:45:11 PM	Bubbler valve closed
5/20/2011	7:45:11 PM	Helium MFC set to  0.000000
5/20/2011	7:45:11 PM	H2 MFC set to  0.000000
5/20/2011	7:45:11 PM	BCl3 MFC set to  0.000000
5/20/2011	7:45:11 PM	PHl3 MFC set to  0.000000
5/20/2011	7:45:11 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:45:11 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:45:11 PM	Tube furnace set to 0
5/20/2011	7:45:11 PM	Run finished at 7:45 PM
5/20/2011	7:47:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:47:27 PM	Recipe started at 7:47 PM
5/20/2011	7:47:27 PM	H2 valve closed
5/20/2011	7:47:27 PM	BCl3 valve closed
5/20/2011	7:47:27 PM	PH3 valve closed
5/20/2011	7:47:27 PM	SiCl4 pre valve closed
5/20/2011	7:47:27 PM	SiCl4 post valve closed
5/20/2011	7:47:27 PM	Main Vac valve closed
5/20/2011	7:47:27 PM	Bypass valve closed
5/20/2011	7:47:27 PM	Bubbler valve closed
5/20/2011	7:47:27 PM	Helium valve opened
5/20/2011	7:47:27 PM	Helium MFC set to  500.000000
5/20/2011	7:47:27 PM	H2 MFC set to  0.000000
5/20/2011	7:47:27 PM	BCl3 MFC set to  0.000000
5/20/2011	7:47:27 PM	PHl3 MFC set to  0.000000
5/20/2011	7:47:27 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:47:27 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:47:27 PM	Tube furnace set to 0
5/20/2011	7:47:28 PM	Helium valve closed
5/20/2011	7:47:28 PM	H2 valve closed
5/20/2011	7:47:28 PM	BCl3 valve closed
5/20/2011	7:47:28 PM	PH3 valve closed
5/20/2011	7:47:28 PM	SiCl4 pre valve closed
5/20/2011	7:47:28 PM	SiCl4 post valve closed
5/20/2011	7:47:28 PM	Main Vac valve closed
5/20/2011	7:47:28 PM	Bypass valve closed
5/20/2011	7:47:28 PM	Bubbler valve closed
5/20/2011	7:47:28 PM	Helium MFC set to  0.000000
5/20/2011	7:47:28 PM	H2 MFC set to  0.000000
5/20/2011	7:47:28 PM	BCl3 MFC set to  0.000000
5/20/2011	7:47:28 PM	PHl3 MFC set to  0.000000
5/20/2011	7:47:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:47:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:47:28 PM	Tube furnace set to 0
5/20/2011	7:47:28 PM	Run finished at 7:47 PM
5/20/2011	7:47:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:49:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:49:47 PM	Recipe started at 7:49 PM
5/20/2011	7:49:47 PM	H2 valve closed
5/20/2011	7:49:47 PM	BCl3 valve closed
5/20/2011	7:49:47 PM	PH3 valve closed
5/20/2011	7:49:47 PM	SiCl4 pre valve closed
5/20/2011	7:49:47 PM	SiCl4 post valve closed
5/20/2011	7:49:47 PM	Main Vac valve closed
5/20/2011	7:49:47 PM	Bypass valve closed
5/20/2011	7:49:47 PM	Bubbler valve closed
5/20/2011	7:49:47 PM	Helium valve opened
5/20/2011	7:49:47 PM	Helium MFC set to  500.000000
5/20/2011	7:49:47 PM	H2 MFC set to  0.000000
5/20/2011	7:49:47 PM	BCl3 MFC set to  0.000000
5/20/2011	7:49:47 PM	PHl3 MFC set to  0.000000
5/20/2011	7:49:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:49:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:49:47 PM	Tube furnace set to 0
5/20/2011	7:49:48 PM	Helium valve closed
5/20/2011	7:49:48 PM	H2 valve closed
5/20/2011	7:49:48 PM	BCl3 valve closed
5/20/2011	7:49:48 PM	PH3 valve closed
5/20/2011	7:49:48 PM	SiCl4 pre valve closed
5/20/2011	7:49:48 PM	SiCl4 post valve closed
5/20/2011	7:49:48 PM	Main Vac valve closed
5/20/2011	7:49:48 PM	Bypass valve closed
5/20/2011	7:49:48 PM	Bubbler valve closed
5/20/2011	7:49:48 PM	Helium MFC set to  0.000000
5/20/2011	7:49:48 PM	H2 MFC set to  0.000000
5/20/2011	7:49:48 PM	BCl3 MFC set to  0.000000
5/20/2011	7:49:48 PM	PHl3 MFC set to  0.000000
5/20/2011	7:49:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:49:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:49:48 PM	Tube furnace set to 0
5/20/2011	7:49:49 PM	Run finished at 7:49 PM
5/20/2011	7:49:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:50:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:50:16 PM	Recipe started at 7:50 PM
5/20/2011	7:50:16 PM	H2 valve closed
5/20/2011	7:50:16 PM	BCl3 valve closed
5/20/2011	7:50:16 PM	PH3 valve closed
5/20/2011	7:50:16 PM	SiCl4 pre valve closed
5/20/2011	7:50:16 PM	SiCl4 post valve closed
5/20/2011	7:50:16 PM	Main Vac valve closed
5/20/2011	7:50:16 PM	Bypass valve closed
5/20/2011	7:50:16 PM	Bubbler valve closed
5/20/2011	7:50:16 PM	Helium valve opened
5/20/2011	7:50:16 PM	Helium MFC set to  500.000000
5/20/2011	7:50:16 PM	H2 MFC set to  0.000000
5/20/2011	7:50:16 PM	BCl3 MFC set to  0.000000
5/20/2011	7:50:16 PM	PHl3 MFC set to  0.000000
5/20/2011	7:50:16 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:50:16 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:50:16 PM	Tube furnace set to 0
5/20/2011	7:50:17 PM	Helium valve closed
5/20/2011	7:50:17 PM	H2 valve closed
5/20/2011	7:50:17 PM	BCl3 valve closed
5/20/2011	7:50:17 PM	PH3 valve closed
5/20/2011	7:50:17 PM	SiCl4 pre valve closed
5/20/2011	7:50:17 PM	SiCl4 post valve closed
5/20/2011	7:50:17 PM	Main Vac valve closed
5/20/2011	7:50:17 PM	Bypass valve closed
5/20/2011	7:50:17 PM	Bubbler valve closed
5/20/2011	7:50:17 PM	Helium MFC set to  0.000000
5/20/2011	7:50:17 PM	H2 MFC set to  0.000000
5/20/2011	7:50:17 PM	BCl3 MFC set to  0.000000
5/20/2011	7:50:17 PM	PHl3 MFC set to  0.000000
5/20/2011	7:50:17 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:50:17 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:50:17 PM	Tube furnace set to 0
5/20/2011	7:50:17 PM	Run finished at 7:50 PM
5/20/2011	7:50:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	7:56:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	7:56:02 PM	Recipe started at 7:56 PM
5/20/2011	7:56:02 PM	Helium valve closed
5/20/2011	7:56:02 PM	H2 valve closed
5/20/2011	7:56:02 PM	BCl3 valve closed
5/20/2011	7:56:02 PM	PH3 valve closed
5/20/2011	7:56:02 PM	SiCl4 pre valve closed
5/20/2011	7:56:02 PM	SiCl4 post valve closed
5/20/2011	7:56:02 PM	Main Vac valve closed
5/20/2011	7:56:02 PM	Bubbler valve closed
5/20/2011	7:56:02 PM	Bypass valve opened
5/20/2011	7:56:02 PM	Helium MFC set to  0.000000
5/20/2011	7:56:02 PM	H2 MFC set to  0.000000
5/20/2011	7:56:02 PM	BCl3 MFC set to  0.000000
5/20/2011	7:56:02 PM	PHl3 MFC set to  0.000000
5/20/2011	7:56:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:56:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:56:02 PM	Tube furnace set to 0
5/20/2011	7:56:34 PM	Helium valve closed
5/20/2011	7:56:34 PM	H2 valve closed
5/20/2011	7:56:34 PM	BCl3 valve closed
5/20/2011	7:56:34 PM	PH3 valve closed
5/20/2011	7:56:34 PM	SiCl4 pre valve closed
5/20/2011	7:56:34 PM	SiCl4 post valve closed
5/20/2011	7:56:34 PM	Bubbler valve closed
5/20/2011	7:56:34 PM	Main Vac valve opened
5/20/2011	7:56:34 PM	Bypass valve opened
5/20/2011	7:56:34 PM	Helium MFC set to  0.000000
5/20/2011	7:56:34 PM	H2 MFC set to  0.000000
5/20/2011	7:56:34 PM	BCl3 MFC set to  0.000000
5/20/2011	7:56:34 PM	PHl3 MFC set to  0.000000
5/20/2011	7:56:34 PM	SiCl4 MFC set to  0.000000
5/20/2011	7:56:34 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	7:56:34 PM	Tube furnace set to 0
5/20/2011	7:56:34 PM	Run finished at 7:56 PM
5/20/2011	7:56:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	9:31:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	9:31:46 PM	Recipe started at 9:31 PM
5/20/2011	9:31:46 PM	Helium valve closed
5/20/2011	9:31:46 PM	H2 valve closed
5/20/2011	9:31:46 PM	BCl3 valve closed
5/20/2011	9:31:46 PM	PH3 valve closed
5/20/2011	9:31:46 PM	SiCl4 pre valve closed
5/20/2011	9:31:46 PM	SiCl4 post valve closed
5/20/2011	9:31:46 PM	Main Vac valve closed
5/20/2011	9:31:46 PM	Bubbler valve closed
5/20/2011	9:31:46 PM	Bypass valve opened
5/20/2011	9:31:46 PM	Helium MFC set to  0.000000
5/20/2011	9:31:46 PM	H2 MFC set to  0.000000
5/20/2011	9:31:46 PM	BCl3 MFC set to  0.000000
5/20/2011	9:31:46 PM	PHl3 MFC set to  0.000000
5/20/2011	9:31:46 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:31:46 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:31:46 PM	Tube furnace set to 0
5/20/2011	9:31:46 PM	Helium valve closed
5/20/2011	9:31:46 PM	H2 valve closed
5/20/2011	9:31:46 PM	BCl3 valve closed
5/20/2011	9:31:46 PM	PH3 valve closed
5/20/2011	9:31:46 PM	SiCl4 pre valve closed
5/20/2011	9:31:46 PM	SiCl4 post valve closed
5/20/2011	9:31:46 PM	Bubbler valve closed
5/20/2011	9:31:46 PM	Main Vac valve opened
5/20/2011	9:31:46 PM	Bypass valve opened
5/20/2011	9:31:46 PM	Helium MFC set to  0.000000
5/20/2011	9:31:46 PM	H2 MFC set to  0.000000
5/20/2011	9:31:46 PM	BCl3 MFC set to  0.000000
5/20/2011	9:31:46 PM	PHl3 MFC set to  0.000000
5/20/2011	9:31:46 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:31:46 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:31:46 PM	Tube furnace set to 0
5/20/2011	9:32:46 PM	H2 valve closed
5/20/2011	9:32:46 PM	BCl3 valve closed
5/20/2011	9:32:46 PM	PH3 valve closed
5/20/2011	9:32:46 PM	SiCl4 pre valve closed
5/20/2011	9:32:46 PM	SiCl4 post valve closed
5/20/2011	9:32:46 PM	Bubbler valve closed
5/20/2011	9:32:46 PM	Helium valve opened
5/20/2011	9:32:46 PM	Main Vac valve opened
5/20/2011	9:32:46 PM	Bypass valve opened
5/20/2011	9:32:46 PM	Helium MFC set to  100.000000
5/20/2011	9:32:46 PM	H2 MFC set to  0.000000
5/20/2011	9:32:46 PM	BCl3 MFC set to  0.000000
5/20/2011	9:32:46 PM	PHl3 MFC set to  0.000000
5/20/2011	9:32:46 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:32:46 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:32:47 PM	Tube furnace set to 0
5/20/2011	9:33:47 PM	Helium valve closed
5/20/2011	9:33:47 PM	H2 valve closed
5/20/2011	9:33:47 PM	BCl3 valve closed
5/20/2011	9:33:47 PM	PH3 valve closed
5/20/2011	9:33:47 PM	SiCl4 pre valve closed
5/20/2011	9:33:47 PM	SiCl4 post valve closed
5/20/2011	9:33:47 PM	Bubbler valve closed
5/20/2011	9:33:47 PM	Main Vac valve opened
5/20/2011	9:33:47 PM	Bypass valve opened
5/20/2011	9:33:47 PM	Helium MFC set to  0.000000
5/20/2011	9:33:47 PM	H2 MFC set to  0.000000
5/20/2011	9:33:47 PM	BCl3 MFC set to  0.000000
5/20/2011	9:33:47 PM	PHl3 MFC set to  0.000000
5/20/2011	9:33:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:33:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:33:47 PM	Tube furnace set to 0
5/20/2011	9:34:47 PM	H2 valve closed
5/20/2011	9:34:47 PM	BCl3 valve closed
5/20/2011	9:34:47 PM	PH3 valve closed
5/20/2011	9:34:47 PM	SiCl4 pre valve closed
5/20/2011	9:34:47 PM	SiCl4 post valve closed
5/20/2011	9:34:47 PM	Bubbler valve closed
5/20/2011	9:34:47 PM	Helium valve opened
5/20/2011	9:34:47 PM	Main Vac valve opened
5/20/2011	9:34:47 PM	Bypass valve opened
5/20/2011	9:34:47 PM	Helium MFC set to  100.000000
5/20/2011	9:34:47 PM	H2 MFC set to  0.000000
5/20/2011	9:34:47 PM	BCl3 MFC set to  0.000000
5/20/2011	9:34:47 PM	PHl3 MFC set to  0.000000
5/20/2011	9:34:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:34:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:34:47 PM	Tube furnace set to 0
5/20/2011	9:35:47 PM	Helium valve closed
5/20/2011	9:35:47 PM	H2 valve closed
5/20/2011	9:35:47 PM	BCl3 valve closed
5/20/2011	9:35:47 PM	PH3 valve closed
5/20/2011	9:35:47 PM	SiCl4 pre valve closed
5/20/2011	9:35:47 PM	SiCl4 post valve closed
5/20/2011	9:35:47 PM	Bubbler valve closed
5/20/2011	9:35:47 PM	Main Vac valve opened
5/20/2011	9:35:47 PM	Bypass valve opened
5/20/2011	9:35:47 PM	Helium MFC set to  0.000000
5/20/2011	9:35:47 PM	H2 MFC set to  0.000000
5/20/2011	9:35:47 PM	BCl3 MFC set to  0.000000
5/20/2011	9:35:47 PM	PHl3 MFC set to  0.000000
5/20/2011	9:35:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:35:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:35:47 PM	Tube furnace set to 0
5/20/2011	9:36:47 PM	H2 valve closed
5/20/2011	9:36:47 PM	BCl3 valve closed
5/20/2011	9:36:47 PM	PH3 valve closed
5/20/2011	9:36:47 PM	SiCl4 pre valve closed
5/20/2011	9:36:47 PM	SiCl4 post valve closed
5/20/2011	9:36:47 PM	Bubbler valve closed
5/20/2011	9:36:47 PM	Helium valve opened
5/20/2011	9:36:47 PM	Main Vac valve opened
5/20/2011	9:36:47 PM	Bypass valve opened
5/20/2011	9:36:47 PM	Helium MFC set to  100.000000
5/20/2011	9:36:47 PM	H2 MFC set to  0.000000
5/20/2011	9:36:47 PM	BCl3 MFC set to  0.000000
5/20/2011	9:36:47 PM	PHl3 MFC set to  0.000000
5/20/2011	9:36:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:36:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:36:47 PM	Tube furnace set to 0
5/20/2011	9:37:47 PM	Helium valve closed
5/20/2011	9:37:47 PM	H2 valve closed
5/20/2011	9:37:47 PM	BCl3 valve closed
5/20/2011	9:37:47 PM	PH3 valve closed
5/20/2011	9:37:47 PM	SiCl4 pre valve closed
5/20/2011	9:37:47 PM	SiCl4 post valve closed
5/20/2011	9:37:47 PM	Bubbler valve closed
5/20/2011	9:37:47 PM	Main Vac valve opened
5/20/2011	9:37:47 PM	Bypass valve opened
5/20/2011	9:37:47 PM	Helium MFC set to  0.000000
5/20/2011	9:37:47 PM	H2 MFC set to  0.000000
5/20/2011	9:37:47 PM	BCl3 MFC set to  0.000000
5/20/2011	9:37:47 PM	PHl3 MFC set to  0.000000
5/20/2011	9:37:47 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:37:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:37:48 PM	Tube furnace set to 0
5/20/2011	9:38:48 PM	H2 valve closed
5/20/2011	9:38:48 PM	BCl3 valve closed
5/20/2011	9:38:48 PM	PH3 valve closed
5/20/2011	9:38:48 PM	SiCl4 pre valve closed
5/20/2011	9:38:48 PM	SiCl4 post valve closed
5/20/2011	9:38:48 PM	Bubbler valve closed
5/20/2011	9:38:48 PM	Helium valve opened
5/20/2011	9:38:48 PM	Main Vac valve opened
5/20/2011	9:38:48 PM	Bypass valve opened
5/20/2011	9:38:48 PM	Helium MFC set to  100.000000
5/20/2011	9:38:48 PM	H2 MFC set to  0.000000
5/20/2011	9:38:48 PM	BCl3 MFC set to  0.000000
5/20/2011	9:38:48 PM	PHl3 MFC set to  0.000000
5/20/2011	9:38:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:38:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:38:48 PM	Tube furnace set to 0
5/20/2011	9:39:48 PM	Helium valve closed
5/20/2011	9:39:48 PM	H2 valve closed
5/20/2011	9:39:48 PM	BCl3 valve closed
5/20/2011	9:39:48 PM	PH3 valve closed
5/20/2011	9:39:48 PM	SiCl4 pre valve closed
5/20/2011	9:39:48 PM	SiCl4 post valve closed
5/20/2011	9:39:48 PM	Bubbler valve closed
5/20/2011	9:39:48 PM	Main Vac valve opened
5/20/2011	9:39:48 PM	Bypass valve opened
5/20/2011	9:39:48 PM	Helium MFC set to  0.000000
5/20/2011	9:39:48 PM	H2 MFC set to  0.000000
5/20/2011	9:39:48 PM	BCl3 MFC set to  0.000000
5/20/2011	9:39:48 PM	PHl3 MFC set to  0.000000
5/20/2011	9:39:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:39:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:39:48 PM	Tube furnace set to 0
5/20/2011	9:40:48 PM	H2 valve closed
5/20/2011	9:40:48 PM	BCl3 valve closed
5/20/2011	9:40:48 PM	PH3 valve closed
5/20/2011	9:40:48 PM	SiCl4 pre valve closed
5/20/2011	9:40:48 PM	SiCl4 post valve closed
5/20/2011	9:40:48 PM	Bubbler valve closed
5/20/2011	9:40:48 PM	Helium valve opened
5/20/2011	9:40:48 PM	Main Vac valve opened
5/20/2011	9:40:48 PM	Bypass valve opened
5/20/2011	9:40:48 PM	Helium MFC set to  100.000000
5/20/2011	9:40:48 PM	H2 MFC set to  0.000000
5/20/2011	9:40:48 PM	BCl3 MFC set to  0.000000
5/20/2011	9:40:48 PM	PHl3 MFC set to  0.000000
5/20/2011	9:40:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:40:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:40:48 PM	Tube furnace set to 0
5/20/2011	9:41:48 PM	Helium valve closed
5/20/2011	9:41:48 PM	H2 valve closed
5/20/2011	9:41:48 PM	BCl3 valve closed
5/20/2011	9:41:48 PM	PH3 valve closed
5/20/2011	9:41:48 PM	SiCl4 pre valve closed
5/20/2011	9:41:48 PM	SiCl4 post valve closed
5/20/2011	9:41:48 PM	Bubbler valve closed
5/20/2011	9:41:48 PM	Main Vac valve opened
5/20/2011	9:41:48 PM	Bypass valve opened
5/20/2011	9:41:48 PM	Helium MFC set to  0.000000
5/20/2011	9:41:48 PM	H2 MFC set to  0.000000
5/20/2011	9:41:48 PM	BCl3 MFC set to  0.000000
5/20/2011	9:41:48 PM	PHl3 MFC set to  0.000000
5/20/2011	9:41:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:41:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:41:48 PM	Tube furnace set to 0
5/20/2011	9:42:48 PM	H2 valve closed
5/20/2011	9:42:48 PM	BCl3 valve closed
5/20/2011	9:42:48 PM	PH3 valve closed
5/20/2011	9:42:48 PM	SiCl4 pre valve closed
5/20/2011	9:42:48 PM	SiCl4 post valve closed
5/20/2011	9:42:48 PM	Bubbler valve closed
5/20/2011	9:42:48 PM	Helium valve opened
5/20/2011	9:42:48 PM	Main Vac valve opened
5/20/2011	9:42:48 PM	Bypass valve opened
5/20/2011	9:42:48 PM	Helium MFC set to  100.000000
5/20/2011	9:42:48 PM	H2 MFC set to  0.000000
5/20/2011	9:42:48 PM	BCl3 MFC set to  0.000000
5/20/2011	9:42:48 PM	PHl3 MFC set to  0.000000
5/20/2011	9:42:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:42:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:42:49 PM	Tube furnace set to 0
5/20/2011	9:43:49 PM	Helium valve closed
5/20/2011	9:43:49 PM	H2 valve closed
5/20/2011	9:43:49 PM	BCl3 valve closed
5/20/2011	9:43:49 PM	PH3 valve closed
5/20/2011	9:43:49 PM	SiCl4 pre valve closed
5/20/2011	9:43:49 PM	SiCl4 post valve closed
5/20/2011	9:43:49 PM	Bubbler valve closed
5/20/2011	9:43:49 PM	Main Vac valve opened
5/20/2011	9:43:49 PM	Bypass valve opened
5/20/2011	9:43:49 PM	Helium MFC set to  0.000000
5/20/2011	9:43:49 PM	H2 MFC set to  0.000000
5/20/2011	9:43:49 PM	BCl3 MFC set to  0.000000
5/20/2011	9:43:49 PM	PHl3 MFC set to  0.000000
5/20/2011	9:43:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:43:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:43:49 PM	Tube furnace set to 0
5/20/2011	9:44:49 PM	H2 valve closed
5/20/2011	9:44:49 PM	BCl3 valve closed
5/20/2011	9:44:49 PM	PH3 valve closed
5/20/2011	9:44:49 PM	SiCl4 pre valve closed
5/20/2011	9:44:49 PM	SiCl4 post valve closed
5/20/2011	9:44:49 PM	Bubbler valve closed
5/20/2011	9:44:49 PM	Helium valve opened
5/20/2011	9:44:49 PM	Main Vac valve opened
5/20/2011	9:44:49 PM	Bypass valve opened
5/20/2011	9:44:49 PM	Helium MFC set to  100.000000
5/20/2011	9:44:49 PM	H2 MFC set to  0.000000
5/20/2011	9:44:49 PM	BCl3 MFC set to  0.000000
5/20/2011	9:44:49 PM	PHl3 MFC set to  0.000000
5/20/2011	9:44:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:44:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:44:49 PM	Tube furnace set to 0
5/20/2011	9:45:49 PM	Helium valve closed
5/20/2011	9:45:49 PM	H2 valve closed
5/20/2011	9:45:49 PM	BCl3 valve closed
5/20/2011	9:45:49 PM	PH3 valve closed
5/20/2011	9:45:49 PM	SiCl4 pre valve closed
5/20/2011	9:45:49 PM	SiCl4 post valve closed
5/20/2011	9:45:49 PM	Bubbler valve closed
5/20/2011	9:45:49 PM	Main Vac valve opened
5/20/2011	9:45:49 PM	Bypass valve opened
5/20/2011	9:45:49 PM	Helium MFC set to  0.000000
5/20/2011	9:45:49 PM	H2 MFC set to  0.000000
5/20/2011	9:45:49 PM	BCl3 MFC set to  0.000000
5/20/2011	9:45:49 PM	PHl3 MFC set to  0.000000
5/20/2011	9:45:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:45:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:45:49 PM	Tube furnace set to 0
5/20/2011	9:46:49 PM	H2 valve closed
5/20/2011	9:46:49 PM	BCl3 valve closed
5/20/2011	9:46:49 PM	PH3 valve closed
5/20/2011	9:46:49 PM	SiCl4 pre valve closed
5/20/2011	9:46:49 PM	SiCl4 post valve closed
5/20/2011	9:46:49 PM	Bubbler valve closed
5/20/2011	9:46:49 PM	Helium valve opened
5/20/2011	9:46:49 PM	Main Vac valve opened
5/20/2011	9:46:49 PM	Bypass valve opened
5/20/2011	9:46:49 PM	Helium MFC set to  100.000000
5/20/2011	9:46:49 PM	H2 MFC set to  0.000000
5/20/2011	9:46:49 PM	BCl3 MFC set to  0.000000
5/20/2011	9:46:49 PM	PHl3 MFC set to  0.000000
5/20/2011	9:46:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:46:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:46:49 PM	Tube furnace set to 0
5/20/2011	9:47:49 PM	Helium valve closed
5/20/2011	9:47:49 PM	H2 valve closed
5/20/2011	9:47:49 PM	BCl3 valve closed
5/20/2011	9:47:49 PM	PH3 valve closed
5/20/2011	9:47:49 PM	SiCl4 pre valve closed
5/20/2011	9:47:49 PM	SiCl4 post valve closed
5/20/2011	9:47:49 PM	Bubbler valve closed
5/20/2011	9:47:49 PM	Main Vac valve opened
5/20/2011	9:47:49 PM	Bypass valve opened
5/20/2011	9:47:49 PM	Helium MFC set to  0.000000
5/20/2011	9:47:49 PM	H2 MFC set to  0.000000
5/20/2011	9:47:49 PM	BCl3 MFC set to  0.000000
5/20/2011	9:47:49 PM	PHl3 MFC set to  0.000000
5/20/2011	9:47:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:47:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:47:50 PM	Tube furnace set to 0
5/20/2011	9:48:50 PM	H2 valve closed
5/20/2011	9:48:50 PM	BCl3 valve closed
5/20/2011	9:48:50 PM	PH3 valve closed
5/20/2011	9:48:50 PM	SiCl4 pre valve closed
5/20/2011	9:48:50 PM	SiCl4 post valve closed
5/20/2011	9:48:50 PM	Bubbler valve closed
5/20/2011	9:48:50 PM	Helium valve opened
5/20/2011	9:48:50 PM	Main Vac valve opened
5/20/2011	9:48:50 PM	Bypass valve opened
5/20/2011	9:48:50 PM	Helium MFC set to  100.000000
5/20/2011	9:48:50 PM	H2 MFC set to  0.000000
5/20/2011	9:48:50 PM	BCl3 MFC set to  0.000000
5/20/2011	9:48:50 PM	PHl3 MFC set to  0.000000
5/20/2011	9:48:50 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:48:50 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:48:50 PM	Tube furnace set to 0
5/20/2011	9:49:50 PM	Helium valve closed
5/20/2011	9:49:50 PM	H2 valve closed
5/20/2011	9:49:50 PM	BCl3 valve closed
5/20/2011	9:49:50 PM	PH3 valve closed
5/20/2011	9:49:50 PM	SiCl4 pre valve closed
5/20/2011	9:49:50 PM	SiCl4 post valve closed
5/20/2011	9:49:50 PM	Bubbler valve closed
5/20/2011	9:49:50 PM	Main Vac valve opened
5/20/2011	9:49:50 PM	Bypass valve opened
5/20/2011	9:49:50 PM	Helium MFC set to  0.000000
5/20/2011	9:49:50 PM	H2 MFC set to  0.000000
5/20/2011	9:49:50 PM	BCl3 MFC set to  0.000000
5/20/2011	9:49:50 PM	PHl3 MFC set to  0.000000
5/20/2011	9:49:50 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:49:50 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:49:50 PM	Tube furnace set to 0
5/20/2011	9:50:50 PM	H2 valve closed
5/20/2011	9:50:50 PM	BCl3 valve closed
5/20/2011	9:50:50 PM	PH3 valve closed
5/20/2011	9:50:50 PM	SiCl4 pre valve closed
5/20/2011	9:50:50 PM	SiCl4 post valve closed
5/20/2011	9:50:50 PM	Bubbler valve closed
5/20/2011	9:50:50 PM	Helium valve opened
5/20/2011	9:50:50 PM	Main Vac valve opened
5/20/2011	9:50:50 PM	Bypass valve opened
5/20/2011	9:50:50 PM	Helium MFC set to  100.000000
5/20/2011	9:50:50 PM	H2 MFC set to  0.000000
5/20/2011	9:50:50 PM	BCl3 MFC set to  0.000000
5/20/2011	9:50:50 PM	PHl3 MFC set to  0.000000
5/20/2011	9:50:50 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:50:50 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:50:50 PM	Tube furnace set to 0
5/20/2011	9:51:50 PM	Helium valve closed
5/20/2011	9:51:50 PM	H2 valve closed
5/20/2011	9:51:50 PM	BCl3 valve closed
5/20/2011	9:51:50 PM	PH3 valve closed
5/20/2011	9:51:50 PM	SiCl4 pre valve closed
5/20/2011	9:51:50 PM	SiCl4 post valve closed
5/20/2011	9:51:50 PM	Bubbler valve closed
5/20/2011	9:51:50 PM	Main Vac valve opened
5/20/2011	9:51:50 PM	Bypass valve opened
5/20/2011	9:51:50 PM	Helium MFC set to  0.000000
5/20/2011	9:51:50 PM	H2 MFC set to  0.000000
5/20/2011	9:51:50 PM	BCl3 MFC set to  0.000000
5/20/2011	9:51:50 PM	PHl3 MFC set to  0.000000
5/20/2011	9:51:50 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:51:50 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:51:51 PM	Tube furnace set to 0
5/20/2011	9:51:52 PM	Run finished at 9:51 PM
5/20/2011	9:51:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/20/2011	9:52:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	9:52:28 PM	Recipe started at 9:52 PM
5/20/2011	9:52:28 PM	Helium valve closed
5/20/2011	9:52:28 PM	H2 valve closed
5/20/2011	9:52:28 PM	BCl3 valve closed
5/20/2011	9:52:28 PM	PH3 valve closed
5/20/2011	9:52:28 PM	SiCl4 pre valve closed
5/20/2011	9:52:28 PM	SiCl4 post valve closed
5/20/2011	9:52:28 PM	Main Vac valve closed
5/20/2011	9:52:28 PM	Bypass valve closed
5/20/2011	9:52:28 PM	Bubbler valve closed
5/20/2011	9:52:28 PM	Helium MFC set to  0.000000
5/20/2011	9:52:28 PM	H2 MFC set to  0.000000
5/20/2011	9:52:28 PM	BCl3 MFC set to  0.000000
5/20/2011	9:52:28 PM	PHl3 MFC set to  0.000000
5/20/2011	9:52:28 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:52:28 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:52:28 PM	Tube furnace set to 0
5/20/2011	9:52:28 PM	Run finished at 9:52 PM
5/20/2011	9:52:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	9:52:38 PM	Recipe started at 9:52 PM
5/20/2011	9:52:38 PM	Helium valve closed
5/20/2011	9:52:38 PM	BCl3 valve closed
5/20/2011	9:52:38 PM	PH3 valve closed
5/20/2011	9:52:38 PM	SiCl4 pre valve closed
5/20/2011	9:52:38 PM	SiCl4 post valve closed
5/20/2011	9:52:38 PM	Main Vac valve closed
5/20/2011	9:52:38 PM	Bypass valve closed
5/20/2011	9:52:38 PM	Bubbler valve closed
5/20/2011	9:52:38 PM	H2 valve opened
5/20/2011	9:52:38 PM	Helium MFC set to  0.000000
5/20/2011	9:52:38 PM	H2 MFC set to  500.000000
5/20/2011	9:52:38 PM	BCl3 MFC set to  0.000000
5/20/2011	9:52:38 PM	PHl3 MFC set to  0.000000
5/20/2011	9:52:38 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:52:38 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:52:38 PM	Tube furnace set to 0
5/20/2011	9:53:57 PM	Helium valve closed
5/20/2011	9:53:57 PM	BCl3 valve closed
5/20/2011	9:53:57 PM	PH3 valve closed
5/20/2011	9:53:57 PM	SiCl4 pre valve closed
5/20/2011	9:53:57 PM	SiCl4 post valve closed
5/20/2011	9:53:57 PM	Main Vac valve closed
5/20/2011	9:53:57 PM	Bypass valve closed
5/20/2011	9:53:57 PM	H2 valve opened
5/20/2011	9:53:57 PM	Bubbler valve opened
5/20/2011	9:53:57 PM	Helium MFC set to  0.000000
5/20/2011	9:53:57 PM	H2 MFC set to  500.000000
5/20/2011	9:53:57 PM	BCl3 MFC set to  0.000000
5/20/2011	9:53:57 PM	PHl3 MFC set to  0.000000
5/20/2011	9:53:57 PM	SiCl4 MFC set to  0.000000
5/20/2011	9:53:57 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	9:53:57 PM	Tube furnace set to 250
5/20/2011	10:13:57 PM	Helium valve closed
5/20/2011	10:13:57 PM	BCl3 valve closed
5/20/2011	10:13:57 PM	PH3 valve closed
5/20/2011	10:13:57 PM	SiCl4 pre valve closed
5/20/2011	10:13:57 PM	SiCl4 post valve closed
5/20/2011	10:13:57 PM	Main Vac valve closed
5/20/2011	10:13:57 PM	Bypass valve closed
5/20/2011	10:13:57 PM	H2 valve opened
5/20/2011	10:13:57 PM	Bubbler valve opened
5/20/2011	10:13:57 PM	Helium MFC set to  0.000000
5/20/2011	10:13:57 PM	H2 MFC set to  500.000000
5/20/2011	10:13:57 PM	BCl3 MFC set to  0.000000
5/20/2011	10:13:57 PM	PHl3 MFC set to  0.000000
5/20/2011	10:13:57 PM	SiCl4 MFC set to  0.000000
5/20/2011	10:13:57 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:13:57 PM	Tube furnace set to 1000
5/20/2011	10:33:57 PM	Helium valve closed
5/20/2011	10:33:57 PM	BCl3 valve closed
5/20/2011	10:33:57 PM	Main Vac valve closed
5/20/2011	10:33:57 PM	Bypass valve closed
5/20/2011	10:33:57 PM	H2 valve opened
5/20/2011	10:33:57 PM	PH3 valve opened
5/20/2011	10:33:57 PM	SiCl4 pre valve opened
5/20/2011	10:33:57 PM	SiCl4 post valve opened
5/20/2011	10:33:57 PM	Bubbler valve opened
5/20/2011	10:33:57 PM	Helium MFC set to  0.000000
5/20/2011	10:33:57 PM	H2 MFC set to  500.000000
5/20/2011	10:33:57 PM	BCl3 MFC set to  0.000000
5/20/2011	10:33:57 PM	PHl3 MFC set to  1.000000
5/20/2011	10:33:57 PM	SiCl4 MFC set to  75.000000
5/20/2011	10:33:57 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:33:58 PM	Tube furnace set to 1000
5/20/2011	10:49:58 PM	H2 valve closed
5/20/2011	10:49:58 PM	BCl3 valve closed
5/20/2011	10:49:58 PM	PH3 valve closed
5/20/2011	10:49:58 PM	SiCl4 pre valve closed
5/20/2011	10:49:58 PM	SiCl4 post valve closed
5/20/2011	10:49:58 PM	Main Vac valve closed
5/20/2011	10:49:58 PM	Bypass valve closed
5/20/2011	10:49:58 PM	Helium valve opened
5/20/2011	10:49:58 PM	Bubbler valve opened
5/20/2011	10:49:58 PM	Helium MFC set to  500.000000
5/20/2011	10:49:58 PM	H2 MFC set to  0.000000
5/20/2011	10:49:58 PM	BCl3 MFC set to  0.000000
5/20/2011	10:49:58 PM	PHl3 MFC set to  0.000000
5/20/2011	10:49:58 PM	SiCl4 MFC set to  0.000000
5/20/2011	10:49:58 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	10:49:58 PM	Tube furnace set to 0
5/20/2011	11:09:58 PM	Helium valve closed
5/20/2011	11:09:58 PM	H2 valve closed
5/20/2011	11:09:58 PM	BCl3 valve closed
5/20/2011	11:09:58 PM	PH3 valve closed
5/20/2011	11:09:58 PM	SiCl4 pre valve closed
5/20/2011	11:09:58 PM	SiCl4 post valve closed
5/20/2011	11:09:58 PM	Main Vac valve closed
5/20/2011	11:09:58 PM	Bypass valve closed
5/20/2011	11:09:58 PM	Bubbler valve closed
5/20/2011	11:09:58 PM	Helium MFC set to  0.000000
5/20/2011	11:09:58 PM	H2 MFC set to  0.000000
5/20/2011	11:09:58 PM	BCl3 MFC set to  0.000000
5/20/2011	11:09:58 PM	PHl3 MFC set to  0.000000
5/20/2011	11:09:58 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:09:58 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:09:58 PM	Tube furnace set to 0
5/20/2011	11:09:58 PM	Run finished at 11:09 PM
5/20/2011	11:13:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:13:31 PM	Recipe started at 11:13 PM
5/20/2011	11:13:31 PM	H2 valve closed
5/20/2011	11:13:31 PM	BCl3 valve closed
5/20/2011	11:13:31 PM	PH3 valve closed
5/20/2011	11:13:31 PM	SiCl4 pre valve closed
5/20/2011	11:13:31 PM	SiCl4 post valve closed
5/20/2011	11:13:31 PM	Main Vac valve closed
5/20/2011	11:13:31 PM	Bypass valve closed
5/20/2011	11:13:31 PM	Bubbler valve closed
5/20/2011	11:13:31 PM	Helium valve opened
5/20/2011	11:13:31 PM	Helium MFC set to  500.000000
5/20/2011	11:13:31 PM	H2 MFC set to  0.000000
5/20/2011	11:13:31 PM	BCl3 MFC set to  0.000000
5/20/2011	11:13:31 PM	PHl3 MFC set to  0.000000
5/20/2011	11:13:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:13:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:13:31 PM	Tube furnace set to 0
5/20/2011	11:13:32 PM	Helium valve closed
5/20/2011	11:13:32 PM	H2 valve closed
5/20/2011	11:13:32 PM	BCl3 valve closed
5/20/2011	11:13:32 PM	PH3 valve closed
5/20/2011	11:13:32 PM	SiCl4 pre valve closed
5/20/2011	11:13:33 PM	SiCl4 post valve closed
5/20/2011	11:13:33 PM	Main Vac valve closed
5/20/2011	11:13:33 PM	Bypass valve closed
5/20/2011	11:13:33 PM	Bubbler valve closed
5/20/2011	11:13:33 PM	Helium MFC set to  0.000000
5/20/2011	11:13:33 PM	H2 MFC set to  0.000000
5/20/2011	11:13:33 PM	BCl3 MFC set to  0.000000
5/20/2011	11:13:33 PM	PHl3 MFC set to  0.000000
5/20/2011	11:13:33 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:13:33 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:13:33 PM	Tube furnace set to 0
5/20/2011	11:13:33 PM	Run finished at 11:13 PM
5/20/2011	11:13:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:14:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:14:36 PM	Recipe started at 11:14 PM
5/20/2011	11:14:37 PM	H2 valve closed
5/20/2011	11:14:37 PM	BCl3 valve closed
5/20/2011	11:14:37 PM	PH3 valve closed
5/20/2011	11:14:37 PM	SiCl4 pre valve closed
5/20/2011	11:14:37 PM	SiCl4 post valve closed
5/20/2011	11:14:37 PM	Main Vac valve closed
5/20/2011	11:14:37 PM	Bypass valve closed
5/20/2011	11:14:37 PM	Bubbler valve closed
5/20/2011	11:14:37 PM	Helium valve opened
5/20/2011	11:14:37 PM	Helium MFC set to  500.000000
5/20/2011	11:14:37 PM	H2 MFC set to  0.000000
5/20/2011	11:14:37 PM	BCl3 MFC set to  0.000000
5/20/2011	11:14:37 PM	PHl3 MFC set to  0.000000
5/20/2011	11:14:37 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:14:37 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:14:37 PM	Tube furnace set to 0
5/20/2011	11:14:38 PM	Helium valve closed
5/20/2011	11:14:38 PM	H2 valve closed
5/20/2011	11:14:38 PM	BCl3 valve closed
5/20/2011	11:14:38 PM	PH3 valve closed
5/20/2011	11:14:38 PM	SiCl4 pre valve closed
5/20/2011	11:14:38 PM	SiCl4 post valve closed
5/20/2011	11:14:38 PM	Main Vac valve closed
5/20/2011	11:14:38 PM	Bypass valve closed
5/20/2011	11:14:38 PM	Bubbler valve closed
5/20/2011	11:14:38 PM	Helium MFC set to  0.000000
5/20/2011	11:14:38 PM	H2 MFC set to  0.000000
5/20/2011	11:14:38 PM	BCl3 MFC set to  0.000000
5/20/2011	11:14:38 PM	PHl3 MFC set to  0.000000
5/20/2011	11:14:38 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:14:38 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:14:38 PM	Tube furnace set to 0
5/20/2011	11:14:38 PM	Run finished at 11:14 PM
5/20/2011	11:14:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:15:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:15:30 PM	Recipe started at 11:15 PM
5/20/2011	11:15:30 PM	H2 valve closed
5/20/2011	11:15:30 PM	BCl3 valve closed
5/20/2011	11:15:30 PM	PH3 valve closed
5/20/2011	11:15:30 PM	SiCl4 pre valve closed
5/20/2011	11:15:30 PM	SiCl4 post valve closed
5/20/2011	11:15:30 PM	Main Vac valve closed
5/20/2011	11:15:30 PM	Bypass valve closed
5/20/2011	11:15:30 PM	Bubbler valve closed
5/20/2011	11:15:30 PM	Helium valve opened
5/20/2011	11:15:30 PM	Helium MFC set to  500.000000
5/20/2011	11:15:30 PM	H2 MFC set to  0.000000
5/20/2011	11:15:30 PM	BCl3 MFC set to  0.000000
5/20/2011	11:15:30 PM	PHl3 MFC set to  0.000000
5/20/2011	11:15:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:15:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:15:30 PM	Tube furnace set to 0
5/20/2011	11:15:31 PM	Helium valve closed
5/20/2011	11:15:31 PM	H2 valve closed
5/20/2011	11:15:31 PM	BCl3 valve closed
5/20/2011	11:15:31 PM	PH3 valve closed
5/20/2011	11:15:31 PM	SiCl4 pre valve closed
5/20/2011	11:15:31 PM	SiCl4 post valve closed
5/20/2011	11:15:31 PM	Main Vac valve closed
5/20/2011	11:15:31 PM	Bypass valve closed
5/20/2011	11:15:31 PM	Bubbler valve closed
5/20/2011	11:15:31 PM	Helium MFC set to  0.000000
5/20/2011	11:15:31 PM	H2 MFC set to  0.000000
5/20/2011	11:15:31 PM	BCl3 MFC set to  0.000000
5/20/2011	11:15:31 PM	PHl3 MFC set to  0.000000
5/20/2011	11:15:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:15:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:15:31 PM	Tube furnace set to 0
5/20/2011	11:15:31 PM	Run finished at 11:15 PM
5/20/2011	11:15:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:16:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:16:22 PM	Recipe started at 11:16 PM
5/20/2011	11:16:22 PM	H2 valve closed
5/20/2011	11:16:22 PM	BCl3 valve closed
5/20/2011	11:16:22 PM	PH3 valve closed
5/20/2011	11:16:22 PM	SiCl4 pre valve closed
5/20/2011	11:16:22 PM	SiCl4 post valve closed
5/20/2011	11:16:22 PM	Main Vac valve closed
5/20/2011	11:16:22 PM	Bypass valve closed
5/20/2011	11:16:22 PM	Bubbler valve closed
5/20/2011	11:16:22 PM	Helium valve opened
5/20/2011	11:16:22 PM	Helium MFC set to  500.000000
5/20/2011	11:16:22 PM	H2 MFC set to  0.000000
5/20/2011	11:16:22 PM	BCl3 MFC set to  0.000000
5/20/2011	11:16:22 PM	PHl3 MFC set to  0.000000
5/20/2011	11:16:22 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:16:22 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:16:22 PM	Tube furnace set to 0
5/20/2011	11:16:23 PM	Helium valve closed
5/20/2011	11:16:23 PM	H2 valve closed
5/20/2011	11:16:23 PM	BCl3 valve closed
5/20/2011	11:16:23 PM	PH3 valve closed
5/20/2011	11:16:23 PM	SiCl4 pre valve closed
5/20/2011	11:16:23 PM	SiCl4 post valve closed
5/20/2011	11:16:23 PM	Main Vac valve closed
5/20/2011	11:16:23 PM	Bypass valve closed
5/20/2011	11:16:23 PM	Bubbler valve closed
5/20/2011	11:16:23 PM	Helium MFC set to  0.000000
5/20/2011	11:16:23 PM	H2 MFC set to  0.000000
5/20/2011	11:16:23 PM	BCl3 MFC set to  0.000000
5/20/2011	11:16:23 PM	PHl3 MFC set to  0.000000
5/20/2011	11:16:23 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:16:23 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:16:23 PM	Tube furnace set to 0
5/20/2011	11:16:23 PM	Run finished at 11:16 PM
5/20/2011	11:16:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:16:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:16:59 PM	Recipe started at 11:16 PM
5/20/2011	11:16:59 PM	H2 valve closed
5/20/2011	11:16:59 PM	BCl3 valve closed
5/20/2011	11:16:59 PM	PH3 valve closed
5/20/2011	11:16:59 PM	SiCl4 pre valve closed
5/20/2011	11:16:59 PM	SiCl4 post valve closed
5/20/2011	11:16:59 PM	Main Vac valve closed
5/20/2011	11:16:59 PM	Bypass valve closed
5/20/2011	11:16:59 PM	Bubbler valve closed
5/20/2011	11:16:59 PM	Helium valve opened
5/20/2011	11:16:59 PM	Helium MFC set to  500.000000
5/20/2011	11:16:59 PM	H2 MFC set to  0.000000
5/20/2011	11:16:59 PM	BCl3 MFC set to  0.000000
5/20/2011	11:16:59 PM	PHl3 MFC set to  0.000000
5/20/2011	11:16:59 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:16:59 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:16:59 PM	Tube furnace set to 0
5/20/2011	11:16:59 PM	Helium valve closed
5/20/2011	11:16:59 PM	H2 valve closed
5/20/2011	11:16:59 PM	BCl3 valve closed
5/20/2011	11:16:59 PM	PH3 valve closed
5/20/2011	11:16:59 PM	SiCl4 pre valve closed
5/20/2011	11:16:59 PM	SiCl4 post valve closed
5/20/2011	11:16:59 PM	Main Vac valve closed
5/20/2011	11:16:59 PM	Bypass valve closed
5/20/2011	11:16:59 PM	Bubbler valve closed
5/20/2011	11:16:59 PM	Helium MFC set to  0.000000
5/20/2011	11:16:59 PM	H2 MFC set to  0.000000
5/20/2011	11:16:59 PM	BCl3 MFC set to  0.000000
5/20/2011	11:16:59 PM	PHl3 MFC set to  0.000000
5/20/2011	11:16:59 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:16:59 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:16:59 PM	Tube furnace set to 0
5/20/2011	11:17:00 PM	Run finished at 11:17 PM
5/20/2011	11:17:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:17:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:17:30 PM	Recipe started at 11:17 PM
5/20/2011	11:17:30 PM	H2 valve closed
5/20/2011	11:17:30 PM	BCl3 valve closed
5/20/2011	11:17:30 PM	PH3 valve closed
5/20/2011	11:17:30 PM	SiCl4 pre valve closed
5/20/2011	11:17:30 PM	SiCl4 post valve closed
5/20/2011	11:17:30 PM	Main Vac valve closed
5/20/2011	11:17:30 PM	Bypass valve closed
5/20/2011	11:17:30 PM	Bubbler valve closed
5/20/2011	11:17:30 PM	Helium valve opened
5/20/2011	11:17:30 PM	Helium MFC set to  500.000000
5/20/2011	11:17:30 PM	H2 MFC set to  0.000000
5/20/2011	11:17:30 PM	BCl3 MFC set to  0.000000
5/20/2011	11:17:30 PM	PHl3 MFC set to  0.000000
5/20/2011	11:17:30 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:17:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:17:30 PM	Tube furnace set to 0
5/20/2011	11:17:31 PM	Helium valve closed
5/20/2011	11:17:31 PM	H2 valve closed
5/20/2011	11:17:31 PM	BCl3 valve closed
5/20/2011	11:17:31 PM	PH3 valve closed
5/20/2011	11:17:31 PM	SiCl4 pre valve closed
5/20/2011	11:17:31 PM	SiCl4 post valve closed
5/20/2011	11:17:31 PM	Main Vac valve closed
5/20/2011	11:17:31 PM	Bypass valve closed
5/20/2011	11:17:31 PM	Bubbler valve closed
5/20/2011	11:17:31 PM	Helium MFC set to  0.000000
5/20/2011	11:17:31 PM	H2 MFC set to  0.000000
5/20/2011	11:17:31 PM	BCl3 MFC set to  0.000000
5/20/2011	11:17:31 PM	PHl3 MFC set to  0.000000
5/20/2011	11:17:31 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:17:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:17:31 PM	Tube furnace set to 0
5/20/2011	11:17:31 PM	Run finished at 11:17 PM
5/20/2011	11:17:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:18:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:18:48 PM	Recipe started at 11:18 PM
5/20/2011	11:18:48 PM	H2 valve closed
5/20/2011	11:18:48 PM	BCl3 valve closed
5/20/2011	11:18:48 PM	PH3 valve closed
5/20/2011	11:18:48 PM	SiCl4 pre valve closed
5/20/2011	11:18:48 PM	SiCl4 post valve closed
5/20/2011	11:18:48 PM	Main Vac valve closed
5/20/2011	11:18:48 PM	Bypass valve closed
5/20/2011	11:18:48 PM	Bubbler valve closed
5/20/2011	11:18:48 PM	Helium valve opened
5/20/2011	11:18:48 PM	Helium MFC set to  500.000000
5/20/2011	11:18:48 PM	H2 MFC set to  0.000000
5/20/2011	11:18:48 PM	BCl3 MFC set to  0.000000
5/20/2011	11:18:48 PM	PHl3 MFC set to  0.000000
5/20/2011	11:18:48 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:18:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:18:48 PM	Tube furnace set to 0
5/20/2011	11:18:49 PM	Helium valve closed
5/20/2011	11:18:49 PM	H2 valve closed
5/20/2011	11:18:49 PM	BCl3 valve closed
5/20/2011	11:18:49 PM	PH3 valve closed
5/20/2011	11:18:49 PM	SiCl4 pre valve closed
5/20/2011	11:18:49 PM	SiCl4 post valve closed
5/20/2011	11:18:49 PM	Main Vac valve closed
5/20/2011	11:18:49 PM	Bypass valve closed
5/20/2011	11:18:49 PM	Bubbler valve closed
5/20/2011	11:18:49 PM	Helium MFC set to  0.000000
5/20/2011	11:18:49 PM	H2 MFC set to  0.000000
5/20/2011	11:18:49 PM	BCl3 MFC set to  0.000000
5/20/2011	11:18:49 PM	PHl3 MFC set to  0.000000
5/20/2011	11:18:49 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:18:49 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:18:49 PM	Tube furnace set to 0
5/20/2011	11:18:50 PM	Run finished at 11:18 PM
5/20/2011	11:18:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2011	11:24:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:24:02 PM	Recipe started at 11:24 PM
5/20/2011	11:24:02 PM	Helium valve closed
5/20/2011	11:24:02 PM	H2 valve closed
5/20/2011	11:24:02 PM	BCl3 valve closed
5/20/2011	11:24:02 PM	PH3 valve closed
5/20/2011	11:24:02 PM	SiCl4 pre valve closed
5/20/2011	11:24:02 PM	SiCl4 post valve closed
5/20/2011	11:24:02 PM	Main Vac valve closed
5/20/2011	11:24:02 PM	Bubbler valve closed
5/20/2011	11:24:02 PM	Bypass valve opened
5/20/2011	11:24:02 PM	Helium MFC set to  0.000000
5/20/2011	11:24:02 PM	H2 MFC set to  0.000000
5/20/2011	11:24:02 PM	BCl3 MFC set to  0.000000
5/20/2011	11:24:02 PM	PHl3 MFC set to  0.000000
5/20/2011	11:24:02 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:24:02 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:24:02 PM	Tube furnace set to 0
5/20/2011	11:24:33 PM	Helium valve closed
5/20/2011	11:24:33 PM	H2 valve closed
5/20/2011	11:24:33 PM	BCl3 valve closed
5/20/2011	11:24:33 PM	PH3 valve closed
5/20/2011	11:24:33 PM	SiCl4 pre valve closed
5/20/2011	11:24:33 PM	SiCl4 post valve closed
5/20/2011	11:24:33 PM	Bubbler valve closed
5/20/2011	11:24:33 PM	Main Vac valve opened
5/20/2011	11:24:33 PM	Bypass valve opened
5/20/2011	11:24:33 PM	Helium MFC set to  0.000000
5/20/2011	11:24:33 PM	H2 MFC set to  0.000000
5/20/2011	11:24:33 PM	BCl3 MFC set to  0.000000
5/20/2011	11:24:33 PM	PHl3 MFC set to  0.000000
5/20/2011	11:24:33 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:24:33 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:24:34 PM	Tube furnace set to 0
5/20/2011	11:24:34 PM	Run finished at 11:24 PM
5/20/2011	11:24:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2011	11:24:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/20/2011	11:24:40 PM	Recipe started at 11:24 PM
5/20/2011	11:24:40 PM	Helium valve closed
5/20/2011	11:24:40 PM	H2 valve closed
5/20/2011	11:24:40 PM	BCl3 valve closed
5/20/2011	11:24:40 PM	PH3 valve closed
5/20/2011	11:24:40 PM	SiCl4 pre valve closed
5/20/2011	11:24:40 PM	SiCl4 post valve closed
5/20/2011	11:24:40 PM	Main Vac valve closed
5/20/2011	11:24:40 PM	Bypass valve closed
5/20/2011	11:24:40 PM	Bubbler valve closed
5/20/2011	11:24:40 PM	Helium MFC set to  0.000000
5/20/2011	11:24:40 PM	H2 MFC set to  0.000000
5/20/2011	11:24:40 PM	BCl3 MFC set to  0.000000
5/20/2011	11:24:40 PM	PHl3 MFC set to  0.000000
5/20/2011	11:24:40 PM	SiCl4 MFC set to  0.000000
5/20/2011	11:24:40 PM	Bypass solenoid MFC set to  0.000000
5/20/2011	11:24:40 PM	Tube furnace set to 0
5/20/2011	11:24:41 PM	Run finished at 11:24 PM
5/20/2011	11:24:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
